KR101596232B1 - 반도체장치 - Google Patents

반도체장치 Download PDF

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KR101596232B1
KR101596232B1 KR1020140164164A KR20140164164A KR101596232B1 KR 101596232 B1 KR101596232 B1 KR 101596232B1 KR 1020140164164 A KR1020140164164 A KR 1020140164164A KR 20140164164 A KR20140164164 A KR 20140164164A KR 101596232 B1 KR101596232 B1 KR 101596232B1
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layer
metal layer
barrier metal
opening
semiconductor device
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KR20150062963A (ko
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히데토시 코야마
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미쓰비시덴키 가부시키가이샤
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    • H01L2224/05599—Material
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JP6863574B2 (ja) * 2017-02-22 2021-04-21 住友電工デバイス・イノベーション株式会社 半導体装置の製造方法
JP2019145546A (ja) * 2018-02-16 2019-08-29 住友電工デバイス・イノベーション株式会社 半導体装置の製造方法
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CN113809030B (zh) * 2021-11-16 2022-03-15 深圳市时代速信科技有限公司 半导体器件和半导体器件的制备方法

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