JP6277693B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP6277693B2 JP6277693B2 JP2013247862A JP2013247862A JP6277693B2 JP 6277693 B2 JP6277693 B2 JP 6277693B2 JP 2013247862 A JP2013247862 A JP 2013247862A JP 2013247862 A JP2013247862 A JP 2013247862A JP 6277693 B2 JP6277693 B2 JP 6277693B2
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- Prior art keywords
- layer
- metal layer
- barrier metal
- semiconductor device
- solder
- Prior art date
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- 239000004065 semiconductor Substances 0.000 title claims description 96
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical group [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 112
- 229910052751 metal Inorganic materials 0.000 claims description 64
- 239000002184 metal Substances 0.000 claims description 64
- 239000010931 gold Substances 0.000 claims description 57
- 229910000679 solder Inorganic materials 0.000 claims description 57
- 230000004888 barrier function Effects 0.000 claims description 51
- 239000000758 substrate Substances 0.000 claims description 24
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 16
- 239000010936 titanium Substances 0.000 claims description 13
- 229910052759 nickel Inorganic materials 0.000 claims description 10
- 239000011133 lead Substances 0.000 claims description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 229910017052 cobalt Inorganic materials 0.000 claims description 4
- 239000010941 cobalt Substances 0.000 claims description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010955 niobium Substances 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 197
- 230000004048 modification Effects 0.000 description 10
- 238000012986 modification Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000011800 void material Substances 0.000 description 5
- 229910000480 nickel oxide Inorganic materials 0.000 description 4
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000001846 repelling effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
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Description
表面と裏面を備え、前記表面に半導体素子および前記半導体素子の電極が設けられ、前記電極の下面に達する開口が前記裏面に設けられた半導体基板と、
前記開口の側面および底面を覆う第1金属層と、
前記開口の内において前記第1金属層を覆うように設けられたバリアメタル層と、
前記バリアメタル層の材料よりも半田に対する密着性が高い材料で形成され、前記開口内において前記バリアメタル層の少なくとも一部を覆うように前記バリアメタル層に積層された第2金属層と、
を備え、
前記第2金属層は、前記バリアメタル層のうち前記底面に重ねられた部分を覆い、前記バリアメタル層のうち前記側面に重ねられた部分を露出させることを特徴とする。
以下図2〜5を用いて説明する製造プロセスで用いるメタル形成方法としては、電解めっき、無電解めっき、蒸着、およびスパッタ等の公知のメタル積層技術を適宜に用いればよい。
図11および図12は、実施の形態に対する比較例にかかる半導体装置200を示す断面図である。図11は、比較例にかかる半導体装置200の断面図であり、実施の形態にかかる半導体装置100との違いは、Au層18、19を備えていないことである。図12は、半導体装置200が形成された半導体基板12を半田でダイボンドした場合に、Ni層16と半田の密着性が悪いので半田層32内におけるNi層16周辺にボイド132が発生した状態を示している。
Claims (9)
- 表面と裏面を備え、前記表面に半導体素子および前記半導体素子の電極が設けられ、前記電極の下面に達する開口が前記裏面に設けられた半導体基板と、
前記開口の側面および底面を覆う第1金属層と、
前記開口の内において前記第1金属層を覆うように設けられたバリアメタル層と、
前記バリアメタル層の材料よりも半田に対する密着性が高い材料で形成され、前記開口内において前記バリアメタル層の少なくとも一部を覆うように前記バリアメタル層に積層された第2金属層と、
を備え、
前記第2金属層は、前記バリアメタル層のうち前記底面に重ねられた部分を覆い、前記バリアメタル層のうち前記側面に重ねられた部分を露出させることを特徴とする半導体装置。 - 前記バリアメタル層は、ニッケル、白金、鉛、チタン、およびコバルトからなる群から選択した1つの材料から形成されたことを特徴とする請求項1に記載の半導体装置。
- 前記バリアメタル層は、ニッケル、白金、鉛、チタン、およびコバルトからなる群から選択した1つの材料の酸化物から形成されたことを特徴とする請求項1に記載の半導体装置。
- 前記バリアメタル層は、
第1バリアメタル層と、
前記第1バリアメタル層の材料よりも、層内の応力が低い材料からなる第2バリアメタル層と、
を少なくとも1回以上互いに重ねて積層したものであることを特徴とする請求項1に記載の半導体装置。 - 前記第1バリアメタル層がニッケルから形成され、
前記第2バリアメタル層が、白金、鉛、チタン、金、アルミニウム、ニオブ、および銅からなる群から選択した1つの材料から形成されたことを特徴とする請求項4に記載の半導体装置。 - 前記第1バリアメタル層は、前記第2バリアメタル層よりも厚いことを特徴とする請求項4または5に記載の半導体装置。
- 前記バリアメタル層は、前記開口の内部から前記裏面における前記開口の縁部まで設けられ前記縁部の外側には設けられていないことを特徴とする請求項1〜6のいずれか1項に記載の半導体装置。
- 前記半導体素子がトランジスタであり、前記表面にゲート、ソース、ドレインがこの順に並べて設けられ、
前記電極が前記ソースの上に設けたソース電極であることを特徴とする請求項1〜7のいずれか1項に記載の半導体装置。 - 前記第1金属層および前記第2金属層が金からなり、前記バリアメタル層がニッケルを含むことを特徴とする請求項1〜8のいずれか1項に記載の半導体装置。
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DE102014221620.6A DE102014221620B4 (de) | 2013-11-29 | 2014-10-24 | Halbleitervorrichtung |
KR1020140164164A KR101596232B1 (ko) | 2013-11-29 | 2014-11-24 | 반도체장치 |
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US10861792B2 (en) | 2019-03-25 | 2020-12-08 | Raytheon Company | Patterned wafer solder diffusion barrier |
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