KR101280400B1 - 광전 소자 및 그 제조방법 - Google Patents
광전 소자 및 그 제조방법 Download PDFInfo
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- KR101280400B1 KR101280400B1 KR1020110011432A KR20110011432A KR101280400B1 KR 101280400 B1 KR101280400 B1 KR 101280400B1 KR 1020110011432 A KR1020110011432 A KR 1020110011432A KR 20110011432 A KR20110011432 A KR 20110011432A KR 101280400 B1 KR101280400 B1 KR 101280400B1
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- 230000005693 optoelectronics Effects 0.000 title abstract description 17
- 238000004519 manufacturing process Methods 0.000 title description 9
- 239000004065 semiconductor Substances 0.000 claims abstract description 47
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 239000000463 material Substances 0.000 claims abstract description 27
- 239000012535 impurity Substances 0.000 claims abstract description 15
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 14
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 163
- 230000003287 optical effect Effects 0.000 description 11
- 238000005530 etching Methods 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 9
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 7
- 238000005275 alloying Methods 0.000 description 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 5
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 238000000605 extraction Methods 0.000 description 5
- 230000001052 transient effect Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 4
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 229910052594 sapphire Inorganic materials 0.000 description 4
- 239000010980 sapphire Substances 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
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- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 229910010093 LiAlO Inorganic materials 0.000 description 2
- BYDQGSVXQDOSJJ-UHFFFAOYSA-N [Ge].[Au] Chemical compound [Ge].[Au] BYDQGSVXQDOSJJ-UHFFFAOYSA-N 0.000 description 2
- 229960000583 acetic acid Drugs 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- HOHAQBNFPZHTJB-UHFFFAOYSA-N beryllium gold Chemical compound [Be].[Au] HOHAQBNFPZHTJB-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- YQNQTEBHHUSESQ-UHFFFAOYSA-N lithium aluminate Chemical compound [Li+].[O-][Al]=O YQNQTEBHHUSESQ-UHFFFAOYSA-N 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- SKRWFPLZQAAQSU-UHFFFAOYSA-N stibanylidynetin;hydrate Chemical compound O.[Sn].[Sb] SKRWFPLZQAAQSU-UHFFFAOYSA-N 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- BEQNOZDXPONEMR-UHFFFAOYSA-N cadmium;oxotin Chemical compound [Cd].[Sn]=O BEQNOZDXPONEMR-UHFFFAOYSA-N 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000012362 glacial acetic acid Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- GPYPVKIFOKLUGD-UHFFFAOYSA-N gold indium Chemical compound [In].[Au] GPYPVKIFOKLUGD-UHFFFAOYSA-N 0.000 description 1
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000011133 lead Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/84—Coatings, e.g. passivation layers or antireflective coatings
- H10H20/841—Reflective coatings, e.g. dielectric Bragg reflectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/819—Bodies characterised by their shape, e.g. curved or truncated substrates
- H10H20/82—Roughened surfaces, e.g. at the interface between epitaxial layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/832—Electrodes characterised by their material
- H10H20/833—Transparent materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/84—Coatings, e.g. passivation layers or antireflective coatings
Landscapes
- Led Devices (AREA)
- Photovoltaic Devices (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US30266210P | 2010-02-09 | 2010-02-09 | |
| US61/302,662 | 2010-02-09 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020120148460A Division KR101290629B1 (ko) | 2010-02-09 | 2012-12-18 | 광전 소자 및 그 제조방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20110093672A KR20110093672A (ko) | 2011-08-18 |
| KR101280400B1 true KR101280400B1 (ko) | 2013-07-01 |
Family
ID=44352986
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020110011432A Active KR101280400B1 (ko) | 2010-02-09 | 2011-02-09 | 광전 소자 및 그 제조방법 |
| KR1020120148460A Active KR101290629B1 (ko) | 2010-02-09 | 2012-12-18 | 광전 소자 및 그 제조방법 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020120148460A Active KR101290629B1 (ko) | 2010-02-09 | 2012-12-18 | 광전 소자 및 그 제조방법 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US8207550B2 (enExample) |
| JP (5) | JP5635432B2 (enExample) |
| KR (2) | KR101280400B1 (enExample) |
| CN (2) | CN103715320B (enExample) |
| DE (1) | DE102011010629B4 (enExample) |
| TW (6) | TWI513040B (enExample) |
Families Citing this family (47)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20090022700A (ko) * | 2007-08-31 | 2009-03-04 | 엘지이노텍 주식회사 | 반도체 발광소자 및 그 제조방법 |
| US7985979B2 (en) | 2007-12-19 | 2011-07-26 | Koninklijke Philips Electronics, N.V. | Semiconductor light emitting device with light extraction structures |
| US10205059B2 (en) | 2010-02-09 | 2019-02-12 | Epistar Corporation | Optoelectronic device and the manufacturing method thereof |
| TWI513040B (zh) * | 2010-02-09 | 2015-12-11 | Epistar Corp | 光電元件及其製造方法 |
| US9640728B2 (en) * | 2010-02-09 | 2017-05-02 | Epistar Corporation | Optoelectronic device and the manufacturing method thereof |
| JP5727271B2 (ja) * | 2011-03-24 | 2015-06-03 | スタンレー電気株式会社 | 半導体発光素子 |
| TWI458122B (zh) * | 2011-11-23 | 2014-10-21 | Toshiba Kk | 半導體發光元件 |
| KR101984698B1 (ko) * | 2012-01-11 | 2019-05-31 | 삼성전자주식회사 | 기판 구조체, 이로부터 제조된 반도체소자 및 그 제조방법 |
| CN108054261A (zh) * | 2012-02-14 | 2018-05-18 | 晶元光电股份有限公司 | 具有平整表面的电流扩散层的发光元件 |
| US20130234149A1 (en) * | 2012-03-09 | 2013-09-12 | Electro Scientific Industries, Inc. | Sidewall texturing of light emitting diode structures |
| CN103367561B (zh) * | 2012-03-30 | 2016-08-17 | 清华大学 | 发光二极管的制备方法 |
| CN103367585B (zh) | 2012-03-30 | 2016-04-13 | 清华大学 | 发光二极管 |
| CN103367383B (zh) | 2012-03-30 | 2016-04-13 | 清华大学 | 发光二极管 |
| CA2818145C (en) | 2012-06-08 | 2021-01-05 | Wulftec International Inc. | Apparatuses for wrapping a load and supplying film for wrapping a load and associated methods |
| KR101393605B1 (ko) * | 2012-08-01 | 2014-05-09 | 광전자 주식회사 | 요철형 질화갈륨층을 가진 알루미늄갈륨인듐인계 발광다이오드 및 그 제조 방법 |
| KR101412142B1 (ko) * | 2012-09-13 | 2014-06-25 | 광전자 주식회사 | 엔형 질화갈륨 윈도우층을 가진 알루미늄갈륨인듐인계 발광다이오드 및 그 제조 방법 |
| TWI591848B (zh) | 2013-11-28 | 2017-07-11 | 晶元光電股份有限公司 | 發光元件及其製造方法 |
| WO2015094208A1 (en) * | 2013-12-18 | 2015-06-25 | Intel Corporation | Partial layer transfer system and method |
| TWI552382B (zh) * | 2014-01-24 | 2016-10-01 | 隆達電子股份有限公司 | 發光二極體裝置及其製造方法 |
| CN103872203A (zh) * | 2014-04-08 | 2014-06-18 | 三安光电股份有限公司 | 具有表面微结构的高亮度发光二极管及其制备和筛选方法 |
| KR102153111B1 (ko) * | 2014-04-10 | 2020-09-07 | 엘지이노텍 주식회사 | 발광소자 |
| EP3142157B1 (en) * | 2014-05-08 | 2020-03-25 | LG Innotek Co., Ltd. | Light emitting device |
| JP6595801B2 (ja) * | 2014-05-30 | 2019-10-23 | エルジー イノテック カンパニー リミテッド | 発光素子 |
| KR102237105B1 (ko) * | 2014-05-30 | 2021-04-08 | 엘지이노텍 주식회사 | 발광소자 |
| KR102164070B1 (ko) * | 2014-05-30 | 2020-10-12 | 엘지이노텍 주식회사 | 발광소자 |
| KR102199995B1 (ko) * | 2014-06-02 | 2021-01-11 | 엘지이노텍 주식회사 | 발광소자 |
| US9871171B2 (en) * | 2014-11-07 | 2018-01-16 | Epistar Corporation | Light-emitting device and manufacturing method thereof |
| WO2016072050A1 (ja) | 2014-11-07 | 2016-05-12 | 信越半導体株式会社 | 発光素子及び発光素子の製造方法 |
| JP6468459B2 (ja) * | 2015-03-31 | 2019-02-13 | ウシオ電機株式会社 | 半導体発光素子 |
| JP6650143B2 (ja) | 2015-09-30 | 2020-02-19 | ローム株式会社 | 半導体発光素子 |
| US9847454B2 (en) * | 2015-10-02 | 2017-12-19 | Epistar Corporation | Light-emitting device |
| CN105185883B (zh) * | 2015-10-12 | 2019-05-10 | 扬州乾照光电有限公司 | 侧壁粗化的AlGaInP基LED及其制造方法 |
| CN105428485B (zh) * | 2015-12-21 | 2019-06-21 | 扬州乾照光电有限公司 | GaP表面粗化的AlGaInP基LED及其制造方法 |
| JP6332301B2 (ja) * | 2016-02-25 | 2018-05-30 | 日亜化学工業株式会社 | 発光素子 |
| CN105914274A (zh) * | 2016-06-13 | 2016-08-31 | 南昌凯迅光电有限公司 | 一种侧壁粗化高亮度发光二极管及其制备方法 |
| TWI622188B (zh) | 2016-12-08 | 2018-04-21 | 錼創科技股份有限公司 | 發光二極體晶片 |
| CN106784223B (zh) * | 2016-12-22 | 2019-05-14 | 天津三安光电有限公司 | 发光二极管及其制作方法 |
| TWI626766B (zh) * | 2017-06-01 | 2018-06-11 | 錼創科技股份有限公司 | 發光元件 |
| CN109830498B (zh) * | 2019-01-17 | 2022-07-19 | 泉州三安半导体科技有限公司 | 一种半导体发光元件 |
| CN112152085B (zh) * | 2020-11-24 | 2021-02-12 | 度亘激光技术(苏州)有限公司 | 半导体结构的制备方法、半导体结构和半导体器件 |
| CN112885718B (zh) * | 2021-01-20 | 2022-07-05 | 厦门乾照光电股份有限公司 | 一种复合导电薄膜的制备方法 |
| KR102629307B1 (ko) * | 2022-04-26 | 2024-01-29 | 숭실대학교산학협력단 | 질화물 반도체 소자의 제조방법 |
| CN115458647B (zh) * | 2022-10-31 | 2025-08-19 | 天津三安光电有限公司 | 一种垂直led芯片结构及其制造方法及发光装置 |
| KR102721221B1 (ko) * | 2023-05-30 | 2024-10-24 | 웨이브로드 주식회사 | 반도체 소자용 템플릿을 이용한 반도체 적층체 및 그 제조 방법 |
| KR102722728B1 (ko) * | 2023-07-21 | 2024-10-28 | 웨이브로드 주식회사 | 마이크로 led 디스플레이용 칩 온 웨이퍼의 제조 방법 |
| KR102740260B1 (ko) * | 2023-12-19 | 2024-12-10 | 웨이브로드 주식회사 | 마이크로 led 디스플레이용 칩 온 웨이퍼의 제조 방법 |
| CN119108471B (zh) * | 2024-11-08 | 2025-06-27 | 南昌凯迅光电股份有限公司 | 一种红光led芯片及其制作方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10256602A (ja) * | 1997-03-12 | 1998-09-25 | Sharp Corp | 半導体発光素子 |
| JP2001036129A (ja) * | 1999-07-16 | 2001-02-09 | Dowa Mining Co Ltd | 発光ダイオード及びその製造方法 |
| US20040075095A1 (en) * | 2002-10-11 | 2004-04-22 | Yukio Shakuda | Semiconductor light emitting device |
| KR20090017200A (ko) * | 2007-08-14 | 2009-02-18 | 한국광기술원 | 인듐주석산화물 투명전극 직접 접촉층을 포함하는 발광다이오드 및 그의 제조방법 |
Family Cites Families (74)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4933910B1 (enExample) * | 1969-10-31 | 1974-09-10 | ||
| JPS577131A (en) * | 1980-06-16 | 1982-01-14 | Junichi Nishizawa | Manufacture of p-n junction |
| JPH077847B2 (ja) * | 1984-12-17 | 1995-01-30 | 株式会社東芝 | 半導体発光素子 |
| US5413956A (en) * | 1992-03-04 | 1995-05-09 | Sharp Kabushiki Kaisha | Method for producing a semiconductor laser device |
| JPH05251739A (ja) * | 1992-03-06 | 1993-09-28 | Toshiba Corp | 半導体発光デバイス |
| JP3234993B2 (ja) * | 1992-09-24 | 2001-12-04 | ローム株式会社 | 発光ダイオードチップ、およびこれを用いた発光ダイオードチップアレイ |
| JPH07153993A (ja) * | 1993-11-29 | 1995-06-16 | Daido Steel Co Ltd | 発光ダイオード |
| US5606572A (en) * | 1994-03-24 | 1997-02-25 | Vixel Corporation | Integration of laser with photodiode for feedback control |
| US5585648A (en) * | 1995-02-03 | 1996-12-17 | Tischler; Michael A. | High brightness electroluminescent device, emitting in the green to ultraviolet spectrum, and method of making the same |
| AU5386296A (en) * | 1995-04-05 | 1996-10-23 | Uniax Corporation | Smart polymer image processor |
| CN1114959C (zh) * | 1996-05-30 | 2003-07-16 | 罗姆股份有限公司 | 半导体发光器件及其制造方法 |
| JP2907170B2 (ja) * | 1996-12-28 | 1999-06-21 | サンケン電気株式会社 | 半導体発光素子 |
| JPH1187750A (ja) * | 1997-09-04 | 1999-03-30 | Asahi Chem Ind Co Ltd | 不純物半導体の製造方法、p型半導体、n型半導体、半導体装置 |
| US6097041A (en) * | 1998-08-24 | 2000-08-01 | Kingmax Technology Inc. | Light-emitting diode with anti-reflector |
| CN2413388Y (zh) * | 2000-02-29 | 2001-01-03 | 中国科学院长春光学精密机械与物理研究所 | DH-Ga1-xAlxAsLED液相外延片 |
| US6888171B2 (en) * | 2000-12-22 | 2005-05-03 | Dallan Luming Science & Technology Group Co., Ltd. | Light emitting diode |
| TWI294699B (en) * | 2006-01-27 | 2008-03-11 | Epistar Corp | Light emitting device and method of forming the same |
| US6797990B2 (en) * | 2001-06-29 | 2004-09-28 | Showa Denko Kabushiki Kaisha | Boron phosphide-based semiconductor device and production method thereof |
| JP2003069074A (ja) * | 2001-08-14 | 2003-03-07 | Shurai Kagi Kofun Yugenkoshi | 半導体装置 |
| US6784462B2 (en) * | 2001-12-13 | 2004-08-31 | Rensselaer Polytechnic Institute | Light-emitting diode with planar omni-directional reflector |
| TW577178B (en) * | 2002-03-04 | 2004-02-21 | United Epitaxy Co Ltd | High efficient reflective metal layer of light emitting diode |
| KR100942038B1 (ko) * | 2002-04-15 | 2010-02-11 | 쇼오트 아게 | 유기 광전 소자 및 유기 광전 소자 제조 방법 |
| JP2004047760A (ja) * | 2002-07-12 | 2004-02-12 | Hitachi Cable Ltd | 発光ダイオード用エピタキシャルウェハ及び発光ダイオード |
| JP4004378B2 (ja) * | 2002-10-24 | 2007-11-07 | ローム株式会社 | 半導体発光素子 |
| JP3997523B2 (ja) * | 2002-11-28 | 2007-10-24 | 信越半導体株式会社 | 発光素子 |
| JP2004207441A (ja) * | 2002-12-25 | 2004-07-22 | Sharp Corp | 酸化物半導体発光素子 |
| CN1510765A (zh) * | 2002-12-26 | 2004-07-07 | 炬鑫科技股份有限公司 | 氮化镓基ⅲ-ⅴ族化合物半导体led的发光装置及其制造方法 |
| US20040211972A1 (en) * | 2003-04-22 | 2004-10-28 | Gelcore, Llc | Flip-chip light emitting diode |
| JP2004349584A (ja) * | 2003-05-23 | 2004-12-09 | Sharp Corp | 酸化物半導体発光素子 |
| JP4325471B2 (ja) * | 2003-10-23 | 2009-09-02 | ソニー株式会社 | エッチング方法および素子分離方法 |
| JP4164689B2 (ja) * | 2003-11-21 | 2008-10-15 | サンケン電気株式会社 | 半導体発光素子 |
| CN1638585A (zh) * | 2003-12-26 | 2005-07-13 | 日东电工株式会社 | 电致发光装置,平面光源和使用该平面光源的显示器 |
| JP2005203516A (ja) * | 2004-01-14 | 2005-07-28 | Shurai Kagi Kofun Yugenkoshi | 発光ダイオード素子とその製造方法 |
| JP4868709B2 (ja) * | 2004-03-09 | 2012-02-01 | 三洋電機株式会社 | 発光素子 |
| JP2005277218A (ja) * | 2004-03-25 | 2005-10-06 | Shin Etsu Handotai Co Ltd | 発光素子及びその製造方法 |
| US7061026B2 (en) * | 2004-04-16 | 2006-06-13 | Arima Optoelectronics Corp. | High brightness gallium nitride-based light emitting diode with transparent conducting oxide spreading layer |
| US20050236636A1 (en) * | 2004-04-23 | 2005-10-27 | Supernova Optoelectronics Corp. | GaN-based light-emitting diode structure |
| JP4092658B2 (ja) * | 2004-04-27 | 2008-05-28 | 信越半導体株式会社 | 発光素子の製造方法 |
| DE102004021175B4 (de) * | 2004-04-30 | 2023-06-29 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Halbleiterchips für die Optoelektronik und Verfahren zu deren Herstellung |
| US7821019B2 (en) * | 2004-10-04 | 2010-10-26 | Svt Associates, Inc. | Triple heterostructure incorporating a strained zinc oxide layer for emitting light at high temperatures |
| TWI320294B (en) * | 2005-02-23 | 2010-02-01 | Organic semiconductor light-emitting element and display device | |
| JP4899348B2 (ja) * | 2005-05-31 | 2012-03-21 | 信越半導体株式会社 | 発光素子の製造方法 |
| JP2007042751A (ja) * | 2005-08-01 | 2007-02-15 | Hitachi Cable Ltd | 半導体発光素子 |
| WO2007015330A1 (ja) * | 2005-08-03 | 2007-02-08 | Stanley Electric Co., Ltd. | 半導体発光素子及びその製造方法 |
| JP4933130B2 (ja) * | 2006-02-16 | 2012-05-16 | 昭和電工株式会社 | GaN系半導体発光素子およびその製造方法 |
| JP4852322B2 (ja) * | 2006-03-03 | 2012-01-11 | ローム株式会社 | 窒化物半導体発光素子及びその製造方法 |
| JP2008004587A (ja) * | 2006-06-20 | 2008-01-10 | Sharp Corp | 半導体発光素子及びその製造方法並びに化合物半導体発光ダイオード |
| US7777240B2 (en) * | 2006-10-17 | 2010-08-17 | Epistar Corporation | Optoelectronic device |
| US7692203B2 (en) * | 2006-10-20 | 2010-04-06 | Hitachi Cable, Ltd. | Semiconductor light emitting device |
| TWI370555B (en) * | 2006-12-29 | 2012-08-11 | Epistar Corp | Light-emitting diode and method for manufacturing the same |
| JP2008288248A (ja) * | 2007-05-15 | 2008-11-27 | Hitachi Cable Ltd | 半導体発光素子 |
| TWI348230B (en) * | 2007-08-08 | 2011-09-01 | Huga Optotech Inc | Semiconductor light-emitting device with high heat-dissipation efficiency and method of fabricating the same |
| JP4985260B2 (ja) * | 2007-09-18 | 2012-07-25 | 日立電線株式会社 | 発光装置 |
| KR20090032207A (ko) * | 2007-09-27 | 2009-04-01 | 삼성전기주식회사 | 질화갈륨계 발광다이오드 소자 |
| GB0719554D0 (en) * | 2007-10-05 | 2007-11-14 | Univ Glasgow | semiconductor optoelectronic devices and methods for making semiconductor optoelectronic devices |
| KR101413273B1 (ko) * | 2007-10-31 | 2014-06-27 | 삼성디스플레이 주식회사 | 광 검출 장치 |
| JP2009123754A (ja) * | 2007-11-12 | 2009-06-04 | Hitachi Cable Ltd | 発光装置及び発光装置の製造方法 |
| JP5083817B2 (ja) * | 2007-11-22 | 2012-11-28 | シャープ株式会社 | Iii族窒化物半導体発光素子及びその製造方法 |
| CN101471413B (zh) * | 2007-12-28 | 2012-06-27 | 晶元光电股份有限公司 | 发光元件及其制造方法 |
| JP2009200178A (ja) * | 2008-02-20 | 2009-09-03 | Hitachi Cable Ltd | 半導体発光素子 |
| JP2009206265A (ja) * | 2008-02-27 | 2009-09-10 | Hitachi Cable Ltd | 半導体発光素子及び半導体発光素子の製造方法 |
| TWI392114B (zh) * | 2008-03-04 | 2013-04-01 | Huga Optotech Inc | 發光二極體及其形成方法 |
| JP2010080817A (ja) * | 2008-09-29 | 2010-04-08 | Hitachi Cable Ltd | 発光素子 |
| KR20110067046A (ko) * | 2008-10-09 | 2011-06-20 | 더 리전츠 오브 더 유니버시티 오브 캘리포니아 | 발광 다이오드의 칩 형상화를 위한 광전기화학 식각 |
| CN201340857Y (zh) * | 2008-11-14 | 2009-11-04 | 厦门乾照光电股份有限公司 | 一种高亮度发光二极管 |
| TWI478372B (zh) * | 2009-03-20 | 2015-03-21 | Huga Optotech Inc | 具有中空結構之柱狀結構之發光元件及其形成方法 |
| TWI408832B (zh) * | 2009-03-30 | 2013-09-11 | Huga Optotech Inc | 具有中空結構之柱狀結構之發光元件及其形成方法 |
| JP2010263050A (ja) * | 2009-05-01 | 2010-11-18 | Showa Denko Kk | 発光ダイオード及びその製造方法、並びに発光ダイオードランプ |
| US8450767B2 (en) * | 2009-05-08 | 2013-05-28 | Epistar Corporation | Light-emitting device |
| US7906795B2 (en) * | 2009-05-08 | 2011-03-15 | Epistar Corporation | Light-emitting device |
| JP5257231B2 (ja) * | 2009-05-13 | 2013-08-07 | ソニー株式会社 | 発光ダイオードおよびその製造方法 |
| JP2011035017A (ja) * | 2009-07-30 | 2011-02-17 | Hitachi Cable Ltd | 発光素子 |
| US8513688B2 (en) * | 2009-12-02 | 2013-08-20 | Walsin Lihwa Corporation | Method for enhancing electrical injection efficiency and light extraction efficiency of light-emitting devices |
| TWI513040B (zh) * | 2010-02-09 | 2015-12-11 | Epistar Corp | 光電元件及其製造方法 |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10256602A (ja) * | 1997-03-12 | 1998-09-25 | Sharp Corp | 半導体発光素子 |
| JP2001036129A (ja) * | 1999-07-16 | 2001-02-09 | Dowa Mining Co Ltd | 発光ダイオード及びその製造方法 |
| US20040075095A1 (en) * | 2002-10-11 | 2004-04-22 | Yukio Shakuda | Semiconductor light emitting device |
| KR20090017200A (ko) * | 2007-08-14 | 2009-02-18 | 한국광기술원 | 인듐주석산화물 투명전극 직접 접촉층을 포함하는 발광다이오드 및 그의 제조방법 |
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