KR101202141B1 - 기판 처리 장치 - Google Patents

기판 처리 장치 Download PDF

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Publication number
KR101202141B1
KR101202141B1 KR1020100024260A KR20100024260A KR101202141B1 KR 101202141 B1 KR101202141 B1 KR 101202141B1 KR 1020100024260 A KR1020100024260 A KR 1020100024260A KR 20100024260 A KR20100024260 A KR 20100024260A KR 101202141 B1 KR101202141 B1 KR 101202141B1
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KR
South Korea
Prior art keywords
nozzle
liquid
roller
cleaning
substrate
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KR1020100024260A
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English (en)
Korean (ko)
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KR20100110726A (ko
Inventor
요시노리 다카기
Original Assignee
다이니폰 스크린 세이조우 가부시키가이샤
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Publication of KR20100110726A publication Critical patent/KR20100110726A/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0204—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to the edges of essentially flat articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/023—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
    • H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Epidemiology (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Public Health (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Coating Apparatus (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Materials For Photolithography (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020100024260A 2009-04-03 2010-03-18 기판 처리 장치 Active KR101202141B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009090925A JP2010240550A (ja) 2009-04-03 2009-04-03 基板処理装置
JPJP-P-2009-090925 2009-04-03

Publications (2)

Publication Number Publication Date
KR20100110726A KR20100110726A (ko) 2010-10-13
KR101202141B1 true KR101202141B1 (ko) 2012-11-15

Family

ID=42942939

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020100024260A Active KR101202141B1 (ko) 2009-04-03 2010-03-18 기판 처리 장치

Country Status (4)

Country Link
JP (1) JP2010240550A (enExample)
KR (1) KR101202141B1 (enExample)
CN (1) CN101856646B (enExample)
TW (1) TWI399822B (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101842824B1 (ko) * 2014-03-10 2018-03-27 가부시키가이샤 스크린 홀딩스 기판 처리 시스템 및 배관 세정 방법
KR102250362B1 (ko) * 2014-07-08 2021-05-12 세메스 주식회사 예비 토출 유닛, 이를 가지는 기판 처리 장치 및 방법
JP6347708B2 (ja) * 2014-09-26 2018-06-27 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および洗浄方法
JP6697324B2 (ja) * 2016-05-26 2020-05-20 株式会社Ｓｃｒｅｅｎホールディングス ノズル清掃装置、塗布装置およびノズル清掃方法
CN106427219B (zh) * 2016-11-18 2018-07-06 深圳华云数码有限公司 清洗机构、喷墨打印机以及清洗方法
JP6905830B2 (ja) * 2017-01-11 2021-07-21 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
TWI640369B (zh) * 2017-05-26 2018-11-11 弘塑科技股份有限公司 基板處理裝置、噴頭清洗裝置和噴頭清洗方法
CN108933092A (zh) * 2017-05-26 2018-12-04 弘塑科技股份有限公司 基板处理装置、喷头清洗装置和喷头清洗方法
JP7018323B2 (ja) * 2018-01-22 2022-02-10 Ｔｏｗａ株式会社 加工装置、及び製品の製造方法
JP6939627B2 (ja) * 2018-02-16 2021-09-22 株式会社アイシン 塗布装置
JP7279096B2 (ja) * 2021-02-26 2023-05-22 株式会社Ｓｃｒｅｅｎホールディングス ノズル洗浄装置、ノズル洗浄方法および塗布装置
CN113733274B (zh) * 2021-09-22 2022-04-26 淮阴工学院 一种工业设计用木工加工装置
KR102629496B1 (ko) * 2021-12-24 2024-01-29 세메스 주식회사 홈 포트 및 기판 처리 장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005254090A (ja) 2004-03-10 2005-09-22 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2007094061A (ja) 2005-09-29 2007-04-12 Toppan Printing Co Ltd 予備吐出部を有するスピンレスコート装置及びそれを用いたカラーフィルタの製造方法
JP2007268391A (ja) 2006-03-31 2007-10-18 Tokyo Ohka Kogyo Co Ltd 予備吐出装置及び予備吐出方法
JP2008114106A (ja) 2006-11-01 2008-05-22 Seiko Epson Corp 吐出方法及び液滴吐出装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3518948B2 (ja) * 1995-08-24 2004-04-12 大日本スクリーン製造株式会社 基板の回転処理装置
JP2001310147A (ja) * 2000-05-02 2001-11-06 Tokyo Ohka Kogyo Co Ltd スリットコータの予備吐出装置および予備吐出方法
JP3940054B2 (ja) * 2002-10-07 2007-07-04 大日本スクリーン製造株式会社 ノズル清掃装置およびこのノズル清掃装置を備えた基板処理装置
JP2004175525A (ja) * 2002-11-27 2004-06-24 Showa Mfg Co Ltd 薄型パネルの起立装置
JP4315787B2 (ja) * 2003-11-18 2009-08-19 大日本スクリーン製造株式会社 基板処理装置、並びに被充填体における液体充填度および気体混入度判定構造
JP4490797B2 (ja) * 2004-01-23 2010-06-30 大日本スクリーン製造株式会社 基板処理装置
JP4451175B2 (ja) * 2004-03-19 2010-04-14 大日本スクリーン製造株式会社 ノズル洗浄装置および基板処理装置
JP4526288B2 (ja) * 2004-03-25 2010-08-18 東京応化工業株式会社 スリットノズル先端の調整装置及び調整方法
JP4417205B2 (ja) * 2004-08-27 2010-02-17 大日本スクリーン製造株式会社 基板処理装置
JP4324538B2 (ja) * 2004-10-04 2009-09-02 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
TWI263542B (en) * 2004-10-04 2006-10-11 Dainippon Screen Mfg Apparatus for and method of processing substrate
JP2007165554A (ja) * 2005-12-13 2007-06-28 Dainippon Screen Mfg Co Ltd 基板処理装置及び基板処理方法
JP4472630B2 (ja) * 2005-12-28 2010-06-02 大日本スクリーン製造株式会社 基板処理装置
JP4859242B2 (ja) * 2006-07-27 2012-01-25 芝浦メカトロニクス株式会社 基板の処理装置
JP4717782B2 (ja) * 2006-11-13 2011-07-06 大日本スクリーン製造株式会社 基板処理装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005254090A (ja) 2004-03-10 2005-09-22 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2007094061A (ja) 2005-09-29 2007-04-12 Toppan Printing Co Ltd 予備吐出部を有するスピンレスコート装置及びそれを用いたカラーフィルタの製造方法
JP2007268391A (ja) 2006-03-31 2007-10-18 Tokyo Ohka Kogyo Co Ltd 予備吐出装置及び予備吐出方法
JP2008114106A (ja) 2006-11-01 2008-05-22 Seiko Epson Corp 吐出方法及び液滴吐出装置

Also Published As

Publication number Publication date
JP2010240550A (ja) 2010-10-28
CN101856646A (zh) 2010-10-13
CN101856646B (zh) 2013-08-07
TWI399822B (zh) 2013-06-21
TW201041066A (en) 2010-11-16
KR20100110726A (ko) 2010-10-13

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