KR101172645B1 - 그레이 톤 마스크의 제조 방법 및 그레이 톤 마스크 - Google Patents

그레이 톤 마스크의 제조 방법 및 그레이 톤 마스크 Download PDF

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Publication number
KR101172645B1
KR101172645B1 KR1020040050390A KR20040050390A KR101172645B1 KR 101172645 B1 KR101172645 B1 KR 101172645B1 KR 1020040050390 A KR1020040050390 A KR 1020040050390A KR 20040050390 A KR20040050390 A KR 20040050390A KR 101172645 B1 KR101172645 B1 KR 101172645B1
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KR
South Korea
Prior art keywords
pattern
semi
film
light shielding
transmissive
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Expired - Fee Related
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KR1020040050390A
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English (en)
Korean (ko)
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KR20050002662A (ko
Inventor
카주히사 이무라
미치아키 사노
Original Assignee
호야 가부시키가이샤
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G03F7/2059—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a scanning corpuscular radiation beam, e.g. an electron beam
    • G03F7/2063—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a scanning corpuscular radiation beam, e.g. an electron beam for the production of exposure masks or reticles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
    • H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Inorganic Chemistry (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020040050390A 2003-06-30 2004-06-30 그레이 톤 마스크의 제조 방법 및 그레이 톤 마스크 Expired - Fee Related KR101172645B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2003-00187960 2003-06-30
JP2003187960 2003-06-30

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020070029448A Division KR101182038B1 (ko) 2003-06-30 2007-03-26 그레이톤 마스크의 제조 방법 및 그레이톤 마스크

Publications (2)

Publication Number Publication Date
KR20050002662A KR20050002662A (ko) 2005-01-10
KR101172645B1 true KR101172645B1 (ko) 2012-08-08

Family

ID=34587128

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020040050390A Expired - Fee Related KR101172645B1 (ko) 2003-06-30 2004-06-30 그레이 톤 마스크의 제조 방법 및 그레이 톤 마스크
KR1020070029448A Expired - Fee Related KR101182038B1 (ko) 2003-06-30 2007-03-26 그레이톤 마스크의 제조 방법 및 그레이톤 마스크
KR1020110097940A Expired - Fee Related KR101215742B1 (ko) 2003-06-30 2011-09-28 그레이 톤 마스크의 제조 방법 및 그레이 톤 마스크

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020070029448A Expired - Fee Related KR101182038B1 (ko) 2003-06-30 2007-03-26 그레이톤 마스크의 제조 방법 및 그레이톤 마스크
KR1020110097940A Expired - Fee Related KR101215742B1 (ko) 2003-06-30 2011-09-28 그레이 톤 마스크의 제조 방법 및 그레이 톤 마스크

Country Status (4)

Country Link
JP (2) JP4729606B2 (enrdf_load_stackoverflow)
KR (3) KR101172645B1 (enrdf_load_stackoverflow)
CN (1) CN100337306C (enrdf_load_stackoverflow)
TW (1) TWI286663B (enrdf_load_stackoverflow)

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* Cited by examiner, † Cited by third party
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JP4587837B2 (ja) * 2005-02-18 2010-11-24 Ｈｏｙａ株式会社 グレートーンマスクの製造方法及びグレートーンマスク
TW200639576A (en) * 2005-02-28 2006-11-16 Hoya Corp Method of manufacturing gray level mask, gray level mask, and gray level mask blank
KR100800301B1 (ko) * 2005-07-05 2008-02-01 주식회사 에스앤에스텍 그레이톤 블랭크마스크 및 포토마스크 제조방법
KR100850511B1 (ko) * 2005-12-22 2008-08-05 주식회사 에스앤에스텍 하프톤 블랭크 마스크 및 포토마스크의 제조방법
KR100812253B1 (ko) * 2006-01-20 2008-03-10 주식회사 에스앤에스텍 그레이톤 포토마스크의 제조방법, 그레이톤 포토마스크 및그레이톤 블랭크마스크
CN1808267B (zh) * 2006-02-13 2010-12-01 友达光电股份有限公司 掩膜及其制造方法及其应用
KR100822296B1 (ko) * 2006-04-10 2008-04-15 엘지마이크론 주식회사 다단 구조를 가지는 하프톤 마스크 및 그 제조 방법
TW200913013A (en) * 2007-07-30 2009-03-16 Hoya Corp Method of manufacturing a gray tone mask, gray tone mask, method of inspecting a gray tone mask, and method of transferring a pattern
JP2009128558A (ja) * 2007-11-22 2009-06-11 Hoya Corp フォトマスク及びフォトマスクの製造方法、並びにパターン転写方法
CN101738846B (zh) * 2008-11-17 2012-02-29 北京京东方光电科技有限公司 掩模板及其制备方法
KR101186890B1 (ko) * 2009-05-21 2012-10-02 엘지이노텍 주식회사 하프톤 마스크 및 이의 제조 방법
CN101943854B (zh) * 2009-07-03 2012-07-04 深圳清溢光电股份有限公司 半灰阶掩模板半曝光区的设计方法及其制造方法
CN108267927B (zh) * 2011-12-21 2021-08-24 大日本印刷株式会社 大型相移掩膜
JP6063650B2 (ja) * 2012-06-18 2017-01-18 Hoya株式会社 フォトマスクの製造方法
JP5635577B2 (ja) * 2012-09-26 2014-12-03 Hoya株式会社 フォトマスクの製造方法、フォトマスク、パターン転写方法、及びフラットパネルディスプレイの製造方法
JP6157832B2 (ja) * 2012-10-12 2017-07-05 Hoya株式会社 電子デバイスの製造方法、表示装置の製造方法、フォトマスクの製造方法、及びフォトマスク
KR102253995B1 (ko) * 2013-03-12 2021-05-18 마이크로닉 아베 기계적으로 생성된 정렬 표식 방법 및 정렬 시스템
CN104849525B (zh) * 2014-02-13 2017-12-01 上海和辉光电有限公司 使用测试组件的测试方法
KR102378211B1 (ko) * 2015-06-23 2022-03-25 삼성디스플레이 주식회사 마스크 및 이를 이용한 표시장치의 제조방법
CN105529274B (zh) * 2016-02-02 2018-10-26 京东方科技集团股份有限公司 薄膜晶体管的制作方法、阵列基板和显示装置
CN105717737B (zh) * 2016-04-26 2019-08-02 深圳市华星光电技术有限公司 一种掩膜版及彩色滤光片基板的制备方法
CN106887439A (zh) * 2017-03-21 2017-06-23 上海中航光电子有限公司 阵列基板及其制作方法、显示面板

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Also Published As

Publication number Publication date
JP4729606B2 (ja) 2011-07-20
TWI286663B (en) 2007-09-11
JP2008310367A (ja) 2008-12-25
JP2008282046A (ja) 2008-11-20
JP4806701B2 (ja) 2011-11-02
CN100337306C (zh) 2007-09-12
CN1577085A (zh) 2005-02-09
KR20050002662A (ko) 2005-01-10
KR20110122654A (ko) 2011-11-10
KR20070038493A (ko) 2007-04-10
KR101215742B1 (ko) 2012-12-26
TW200506514A (en) 2005-02-16
KR101182038B1 (ko) 2012-09-11

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