KR100854620B1 - 낮은 아킹 경향, 원통형 가스 출구들, 및 형상 표면을 갖는플라즈마 리액터 오버헤드 전원 전극 - Google Patents

낮은 아킹 경향, 원통형 가스 출구들, 및 형상 표면을 갖는플라즈마 리액터 오버헤드 전원 전극 Download PDF

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KR100854620B1
KR100854620B1 KR1020060008118A KR20060008118A KR100854620B1 KR 100854620 B1 KR100854620 B1 KR 100854620B1 KR 1020060008118 A KR1020060008118 A KR 1020060008118A KR 20060008118 A KR20060008118 A KR 20060008118A KR 100854620 B1 KR100854620 B1 KR 100854620B1
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electrode
pressure
plasma
gas
orifices
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KR20060087428A (ko
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쥬니어. 더글러스 에이. 부치버거
다니엘 제이. 호프만
올가 레글만
제임스 카두치
케이지 호리오카
장규 양
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어플라이드 머티어리얼스, 인코포레이티드
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    • E—FIXED CONSTRUCTIONS
    • E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
    • E01C—CONSTRUCTION OF, OR SURFACES FOR, ROADS, SPORTS GROUNDS, OR THE LIKE; MACHINES OR AUXILIARY TOOLS FOR CONSTRUCTION OR REPAIR
    • E01C5/00—Pavings made of prefabricated single units
    • E01C5/22—Pavings made of prefabricated single units made of units composed of a mixture of materials covered by two or more of groups E01C5/008, E01C5/02 - E01C5/20 except embedded reinforcing materials
    • E01C5/226—Pavings made of prefabricated single units made of units composed of a mixture of materials covered by two or more of groups E01C5/008, E01C5/02 - E01C5/20 except embedded reinforcing materials having an upper layer of rubber, with or without inserts of other materials; with rubber inserts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • E—FIXED CONSTRUCTIONS
    • E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
    • E01C—CONSTRUCTION OF, OR SURFACES FOR, ROADS, SPORTS GROUNDS, OR THE LIKE; MACHINES OR AUXILIARY TOOLS FOR CONSTRUCTION OR REPAIR
    • E01C15/00—Pavings specially adapted for footpaths, sidewalks or cycle tracks

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Architecture (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020060008118A 2005-01-28 2006-01-26 낮은 아킹 경향, 원통형 가스 출구들, 및 형상 표면을 갖는플라즈마 리액터 오버헤드 전원 전극 Expired - Fee Related KR100854620B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/046,538 2005-01-28
US11/046,538 US7196283B2 (en) 2000-03-17 2005-01-28 Plasma reactor overhead source power electrode with low arcing tendency, cylindrical gas outlets and shaped surface

Publications (2)

Publication Number Publication Date
KR20060087428A KR20060087428A (ko) 2006-08-02
KR100854620B1 true KR100854620B1 (ko) 2008-08-27

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KR1020060008118A Expired - Fee Related KR100854620B1 (ko) 2005-01-28 2006-01-26 낮은 아킹 경향, 원통형 가스 출구들, 및 형상 표면을 갖는플라즈마 리액터 오버헤드 전원 전극

Country Status (7)

Country Link
US (1) US7196283B2 (enExample)
EP (1) EP1691396A3 (enExample)
JP (2) JP4813908B2 (enExample)
KR (1) KR100854620B1 (enExample)
CN (1) CN1812684A (enExample)
MY (1) MY137871A (enExample)
TW (1) TWI348334B (enExample)

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