FR1402020A - Perfectionnements aux sources d'ions - Google Patents
Perfectionnements aux sources d'ionsInfo
- Publication number
- FR1402020A FR1402020A FR972401A FR972401A FR1402020A FR 1402020 A FR1402020 A FR 1402020A FR 972401 A FR972401 A FR 972401A FR 972401 A FR972401 A FR 972401A FR 1402020 A FR1402020 A FR 1402020A
- Authority
- FR
- France
- Prior art keywords
- ion sources
- sources
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR972401A FR1402020A (fr) | 1964-04-27 | 1964-04-27 | Perfectionnements aux sources d'ions |
US447792A US3355615A (en) | 1964-04-27 | 1965-04-13 | Ion source having critically dimensioned extraction means |
GB16692/65A GB1033447A (en) | 1964-04-27 | 1965-04-21 | Ion sources |
DEC35700A DE1261605B (de) | 1964-04-27 | 1965-04-27 | Thermische Ionenquelle mit Oberflaechenionisation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR972401A FR1402020A (fr) | 1964-04-27 | 1964-04-27 | Perfectionnements aux sources d'ions |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1402020A true FR1402020A (fr) | 1965-06-11 |
Family
ID=8828750
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR972401A Expired FR1402020A (fr) | 1964-04-27 | 1964-04-27 | Perfectionnements aux sources d'ions |
Country Status (4)
Country | Link |
---|---|
US (1) | US3355615A (fr) |
DE (1) | DE1261605B (fr) |
FR (1) | FR1402020A (fr) |
GB (1) | GB1033447A (fr) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3864575A (en) * | 1970-07-25 | 1975-02-04 | Nujeeb Hashmi | Contact ionization ion source |
US3660715A (en) * | 1970-08-18 | 1972-05-02 | Atomic Energy Commission | Ion source with mosaic ion extraction means |
US3930163A (en) * | 1974-03-22 | 1975-12-30 | Varian Associates | Ion beam apparatus with separately replaceable elements |
FR2279093A1 (fr) * | 1974-06-28 | 1976-02-13 | Anvar | Procede et dispositif d'analyse chimique locale des solides |
US3955091A (en) * | 1974-11-11 | 1976-05-04 | Accelerators, Inc. | Method and apparatus for extracting well-formed, high current ion beams from a plasma source |
DE2805273C3 (de) * | 1978-02-08 | 1982-03-18 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen | Einrichtung zum Erzeugen eines Strahles beschleunigter Ionen durch Kontaktionisation |
US4259145A (en) * | 1979-06-29 | 1981-03-31 | International Business Machines Corporation | Ion source for reactive ion etching |
US4833319A (en) * | 1987-02-27 | 1989-05-23 | Hughes Aircraft Company | Carrier gas cluster source for thermally conditioned clusters |
JP3268180B2 (ja) * | 1994-11-18 | 2002-03-25 | 株式会社東芝 | イオン発生装置、イオン照射装置、及び半導体装置の製造方法 |
US7220937B2 (en) | 2000-03-17 | 2007-05-22 | Applied Materials, Inc. | Plasma reactor with overhead RF source power electrode with low loss, low arcing tendency and low contamination |
US7141757B2 (en) | 2000-03-17 | 2006-11-28 | Applied Materials, Inc. | Plasma reactor with overhead RF source power electrode having a resonance that is virtually pressure independent |
US6894245B2 (en) | 2000-03-17 | 2005-05-17 | Applied Materials, Inc. | Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression |
US7196283B2 (en) * | 2000-03-17 | 2007-03-27 | Applied Materials, Inc. | Plasma reactor overhead source power electrode with low arcing tendency, cylindrical gas outlets and shaped surface |
US7030335B2 (en) * | 2000-03-17 | 2006-04-18 | Applied Materials, Inc. | Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression |
US8048806B2 (en) | 2000-03-17 | 2011-11-01 | Applied Materials, Inc. | Methods to avoid unstable plasma states during a process transition |
US8617351B2 (en) | 2002-07-09 | 2013-12-31 | Applied Materials, Inc. | Plasma reactor with minimal D.C. coils for cusp, solenoid and mirror fields for plasma uniformity and device damage reduction |
US6586886B1 (en) | 2001-12-19 | 2003-07-01 | Applied Materials, Inc. | Gas distribution plate electrode for a plasma reactor |
TWI283899B (en) | 2002-07-09 | 2007-07-11 | Applied Materials Inc | Capacitively coupled plasma reactor with magnetic plasma control |
US7470626B2 (en) | 2003-05-16 | 2008-12-30 | Applied Materials, Inc. | Method of characterizing a chamber based upon concurrent behavior of selected plasma parameters as a function of source power, bias power and chamber pressure |
US7901952B2 (en) | 2003-05-16 | 2011-03-08 | Applied Materials, Inc. | Plasma reactor control by translating desired values of M plasma parameters to values of N chamber parameters |
US7910013B2 (en) | 2003-05-16 | 2011-03-22 | Applied Materials, Inc. | Method of controlling a chamber based upon predetermined concurrent behavior of selected plasma parameters as a function of source power, bias power and chamber pressure |
US7795153B2 (en) | 2003-05-16 | 2010-09-14 | Applied Materials, Inc. | Method of controlling a chamber based upon predetermined concurrent behavior of selected plasma parameters as a function of selected chamber parameters |
US7452824B2 (en) | 2003-05-16 | 2008-11-18 | Applied Materials, Inc. | Method of characterizing a chamber based upon concurrent behavior of selected plasma parameters as a function of plural chamber parameters |
US7247218B2 (en) | 2003-05-16 | 2007-07-24 | Applied Materials, Inc. | Plasma density, energy and etch rate measurements at bias power input and real time feedback control of plasma source and bias power |
US7359177B2 (en) | 2005-05-10 | 2008-04-15 | Applied Materials, Inc. | Dual bias frequency plasma reactor with feedback control of E.S.C. voltage using wafer voltage measurement at the bias supply output |
USD978226S1 (en) * | 2020-11-10 | 2023-02-14 | Emart International Inc | Collapsible screen |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3263415A (en) * | 1961-03-06 | 1966-08-02 | Aerojet General Co | Ion propulsion device |
FR1327142A (fr) * | 1961-04-10 | 1963-05-17 | Du Pont | Procédé de polymérisation des composés éthyléniquement non saturés et catalyseur pour ce procédé |
US3185849A (en) * | 1962-11-30 | 1965-05-25 | Exxon Production Research Co | Pulsed neutron source utilizing an accelerator tube |
-
1964
- 1964-04-27 FR FR972401A patent/FR1402020A/fr not_active Expired
-
1965
- 1965-04-13 US US447792A patent/US3355615A/en not_active Expired - Lifetime
- 1965-04-21 GB GB16692/65A patent/GB1033447A/en not_active Expired
- 1965-04-27 DE DEC35700A patent/DE1261605B/de active Pending
Also Published As
Publication number | Publication date |
---|---|
GB1033447A (en) | 1966-06-22 |
DE1261605B (de) | 1968-02-22 |
US3355615A (en) | 1967-11-28 |
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