FR1441903A - Source d'ions - Google Patents

Source d'ions

Info

Publication number
FR1441903A
FR1441903A FR24391A FR24391A FR1441903A FR 1441903 A FR1441903 A FR 1441903A FR 24391 A FR24391 A FR 24391A FR 24391 A FR24391 A FR 24391A FR 1441903 A FR1441903 A FR 1441903A
Authority
FR
France
Prior art keywords
ion source
ion
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR24391A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB28900/64A external-priority patent/GB1064101A/en
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Priority to FR24391A priority Critical patent/FR1441903A/fr
Application granted granted Critical
Publication of FR1441903A publication Critical patent/FR1441903A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
FR24391A 1964-07-13 1965-07-12 Source d'ions Expired FR1441903A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR24391A FR1441903A (fr) 1964-07-13 1965-07-12 Source d'ions

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB28900/64A GB1064101A (en) 1964-07-13 1964-07-13 Improvements in or relating to ion sources
FR24391A FR1441903A (fr) 1964-07-13 1965-07-12 Source d'ions

Publications (1)

Publication Number Publication Date
FR1441903A true FR1441903A (fr) 1966-06-10

Family

ID=26164727

Family Applications (1)

Application Number Title Priority Date Filing Date
FR24391A Expired FR1441903A (fr) 1964-07-13 1965-07-12 Source d'ions

Country Status (1)

Country Link
FR (1) FR1441903A (fr)

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