CH430891A - Zerstäubungs-Ionenquelle - Google Patents

Zerstäubungs-Ionenquelle

Info

Publication number
CH430891A
CH430891A CH980165A CH980165A CH430891A CH 430891 A CH430891 A CH 430891A CH 980165 A CH980165 A CH 980165A CH 980165 A CH980165 A CH 980165A CH 430891 A CH430891 A CH 430891A
Authority
CH
Switzerland
Prior art keywords
ion source
atomizing
atomizing ion
source
ion
Prior art date
Application number
CH980165A
Other languages
English (en)
Inventor
Jefferey Hill Kenneth
Stuart Nelson Richard
Original Assignee
Atomic Energy Authority Uk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atomic Energy Authority Uk filed Critical Atomic Energy Authority Uk
Publication of CH430891A publication Critical patent/CH430891A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
CH980165A 1964-07-13 1965-07-13 Zerstäubungs-Ionenquelle CH430891A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB28900/64A GB1064101A (en) 1964-07-13 1964-07-13 Improvements in or relating to ion sources

Publications (1)

Publication Number Publication Date
CH430891A true CH430891A (de) 1967-02-28

Family

ID=10282997

Family Applications (1)

Application Number Title Priority Date Filing Date
CH980165A CH430891A (de) 1964-07-13 1965-07-13 Zerstäubungs-Ionenquelle

Country Status (5)

Country Link
US (1) US3393339A (de)
CH (1) CH430891A (de)
DE (1) DE1514972B2 (de)
GB (1) GB1064101A (de)
NL (1) NL6508972A (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3555332A (en) * 1967-10-25 1971-01-12 Perkin Elmer Corp Apparatus for producing a high energy beam of selected metallic ions
US3610986A (en) * 1970-05-01 1971-10-05 Union Carbide Corp Electron beam source including a pilot nonthermionic, electron source
NL7407254A (nl) * 1974-05-30 1975-12-02 Philips Nv Navulbare koude kathode in een gasontladings- elektronen-ionenkanon.
US3898496A (en) * 1974-08-12 1975-08-05 Us Energy Means for obtaining a metal ion beam from a heavy-ion cyclotron source
DE2610165C2 (de) * 1976-03-11 1983-11-10 Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt Duoplasmatron-Ionenquelle zur Erzeugung mehrfach geladener Ionen
US4135094A (en) * 1977-07-27 1979-01-16 E. I. Du Pont De Nemours And Company Method and apparatus for rejuvenating ion sources
US4166952A (en) * 1978-02-24 1979-09-04 E. I. Du Pont De Nemours And Company Method and apparatus for the elemental analysis of solids
US4755344A (en) * 1980-04-11 1988-07-05 The United States Of America As Represented By The United States Department Of Energy Method and apparatus for the production of cluster ions
FR2613897B1 (fr) * 1987-04-10 1990-11-09 Realisations Nucleaires Et Dispositif de suppression des micro-projections dans une source d'ions a arc sous vide

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2964634A (en) * 1960-12-13 Apparatus for producing neutrons
US2772363A (en) * 1952-03-21 1956-11-27 Cons Electrodynamics Corp Method and apparatus for ionization of solids
US2947868A (en) * 1959-07-27 1960-08-02 Geophysics Corp Of America Mass spectrometer

Also Published As

Publication number Publication date
DE1514972B2 (de) 1970-11-26
GB1064101A (en) 1967-04-05
DE1514972A1 (de) 1970-03-05
US3393339A (en) 1968-07-16
NL6508972A (de) 1966-01-14

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