FR1454051A - Source d'ions - Google Patents

Source d'ions

Info

Publication number
FR1454051A
FR1454051A FR29045A FR29045A FR1454051A FR 1454051 A FR1454051 A FR 1454051A FR 29045 A FR29045 A FR 29045A FR 29045 A FR29045 A FR 29045A FR 1454051 A FR1454051 A FR 1454051A
Authority
FR
France
Prior art keywords
ion source
ion
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR29045A
Other languages
English (en)
Inventor
Claude Etievant
Pierre Hubert
Mariano Perulli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR29045A priority Critical patent/FR1454051A/fr
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of FR1454051A publication Critical patent/FR1454051A/fr
Application granted granted Critical
Priority to US571109A priority patent/US3408519A/en
Priority to CH1151166A priority patent/CH460970A/fr
Priority to GB36001/66A priority patent/GB1114634A/en
Priority to LU51760A priority patent/LU51760A1/xx
Priority to BE685529D priority patent/BE685529A/xx
Priority to DEC39900A priority patent/DE1291026B/de
Priority to NL6611721A priority patent/NL6611721A/xx
Priority to ES330374A priority patent/ES330374A1/es
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
FR29045A 1965-08-20 1965-08-20 Source d'ions Expired FR1454051A (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR29045A FR1454051A (fr) 1965-08-20 1965-08-20 Source d'ions
US571109A US3408519A (en) 1965-08-20 1966-08-08 Ion source with spaced electrode ionizing pits
CH1151166A CH460970A (fr) 1965-08-20 1966-08-10 Source d'ions à faible débit de gaz neutre
GB36001/66A GB1114634A (en) 1965-08-20 1966-08-11 Improvements in or relating to a charged particle source having a low rate of flow ofneutral gas
LU51760A LU51760A1 (fr) 1965-08-20 1966-08-12
BE685529D BE685529A (fr) 1965-08-20 1966-08-16
DEC39900A DE1291026B (de) 1965-08-20 1966-08-17 Ionenquelle
NL6611721A NL6611721A (fr) 1965-08-20 1966-08-19
ES330374A ES330374A1 (es) 1965-08-20 1966-10-27 Un dispositivo de manantial de iones que tiene un recinto de vacio.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR29045A FR1454051A (fr) 1965-08-20 1965-08-20 Source d'ions

Publications (1)

Publication Number Publication Date
FR1454051A true FR1454051A (fr) 1966-07-22

Family

ID=8587015

Family Applications (1)

Application Number Title Priority Date Filing Date
FR29045A Expired FR1454051A (fr) 1965-08-20 1965-08-20 Source d'ions

Country Status (9)

Country Link
US (1) US3408519A (fr)
BE (1) BE685529A (fr)
CH (1) CH460970A (fr)
DE (1) DE1291026B (fr)
ES (1) ES330374A1 (fr)
FR (1) FR1454051A (fr)
GB (1) GB1114634A (fr)
LU (1) LU51760A1 (fr)
NL (1) NL6611721A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3514666A (en) * 1967-06-16 1970-05-26 Avco Corp Charged particle generator yielding a mono-energetic ion beam
GB1503517A (en) * 1974-09-10 1978-03-15 Science Res Council Electrostatic accelerators
FR2416545A1 (fr) * 1978-02-03 1979-08-31 Thomson Csf Source d'ions produisant un flux dense d'ions de basse energie, et dispositif de traitement de surface comportant une telle source
CZ2015455A3 (cs) * 2015-07-01 2016-10-05 České Vysoké Učení Technické V Praze, Fakulta Elektrotechnická Stabilizovaný a homogenizovaný zdroj netermálního plazmatu
US9691584B1 (en) * 2016-06-30 2017-06-27 Varian Semiconductor Equipment Associates, Inc. Ion source for enhanced ionization

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL213062A (fr) * 1956-01-27
GB892344A (en) * 1959-03-18 1962-03-28 Nat Res Dev Ion source
DE1498845A1 (de) * 1962-01-31 1969-05-14 Leybold Heraeus Gmbh & Co Kg Ionisierungsvorrichtung fuer in grossen Totaldruckbereichen verwendbare Massenspektrometer

Also Published As

Publication number Publication date
ES330374A1 (es) 1968-03-16
DE1291026B (de) 1969-03-20
NL6611721A (fr) 1967-02-21
US3408519A (en) 1968-10-29
CH460970A (fr) 1968-08-15
GB1114634A (en) 1968-05-22
LU51760A1 (fr) 1966-10-12
BE685529A (fr) 1967-02-01

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