ES330374A1 - Un dispositivo de manantial de iones que tiene un recinto de vacio. - Google Patents

Un dispositivo de manantial de iones que tiene un recinto de vacio.

Info

Publication number
ES330374A1
ES330374A1 ES330374A ES330374A ES330374A1 ES 330374 A1 ES330374 A1 ES 330374A1 ES 330374 A ES330374 A ES 330374A ES 330374 A ES330374 A ES 330374A ES 330374 A1 ES330374 A1 ES 330374A1
Authority
ES
Spain
Prior art keywords
chamber
negative electrodes
positive
ion source
pascal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES330374A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of ES330374A1 publication Critical patent/ES330374A1/es
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
ES330374A 1965-08-20 1966-10-27 Un dispositivo de manantial de iones que tiene un recinto de vacio. Expired ES330374A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR29045A FR1454051A (fr) 1965-08-20 1965-08-20 Source d'ions

Publications (1)

Publication Number Publication Date
ES330374A1 true ES330374A1 (es) 1968-03-16

Family

ID=8587015

Family Applications (1)

Application Number Title Priority Date Filing Date
ES330374A Expired ES330374A1 (es) 1965-08-20 1966-10-27 Un dispositivo de manantial de iones que tiene un recinto de vacio.

Country Status (9)

Country Link
US (1) US3408519A (es)
BE (1) BE685529A (es)
CH (1) CH460970A (es)
DE (1) DE1291026B (es)
ES (1) ES330374A1 (es)
FR (1) FR1454051A (es)
GB (1) GB1114634A (es)
LU (1) LU51760A1 (es)
NL (1) NL6611721A (es)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3514666A (en) * 1967-06-16 1970-05-26 Avco Corp Charged particle generator yielding a mono-energetic ion beam
GB1503517A (en) * 1974-09-10 1978-03-15 Science Res Council Electrostatic accelerators
FR2416545A1 (fr) * 1978-02-03 1979-08-31 Thomson Csf Source d'ions produisant un flux dense d'ions de basse energie, et dispositif de traitement de surface comportant une telle source
CZ306214B6 (cs) * 2015-07-01 2016-10-05 České Vysoké Učení Technické V Praze, Fakulta Elektrotechnická Stabilizovaný a homogenizovaný zdroj netermálního plazmatu
US9691584B1 (en) * 2016-06-30 2017-06-27 Varian Semiconductor Equipment Associates, Inc. Ion source for enhanced ionization

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL213062A (es) * 1956-01-27
GB892344A (en) * 1959-03-18 1962-03-28 Nat Res Dev Ion source
DE1498845A1 (de) * 1962-01-31 1969-05-14 Leybold Heraeus Gmbh & Co Kg Ionisierungsvorrichtung fuer in grossen Totaldruckbereichen verwendbare Massenspektrometer

Also Published As

Publication number Publication date
FR1454051A (fr) 1966-07-22
BE685529A (es) 1967-02-01
NL6611721A (es) 1967-02-21
CH460970A (fr) 1968-08-15
US3408519A (en) 1968-10-29
DE1291026B (de) 1969-03-20
GB1114634A (en) 1968-05-22
LU51760A1 (es) 1966-10-12

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