BE685529A - - Google Patents

Info

Publication number
BE685529A
BE685529A BE685529DA BE685529A BE 685529 A BE685529 A BE 685529A BE 685529D A BE685529D A BE 685529DA BE 685529 A BE685529 A BE 685529A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE685529A publication Critical patent/BE685529A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
BE685529D 1965-08-20 1966-08-16 BE685529A (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR29045A FR1454051A (fr) 1965-08-20 1965-08-20 Source d'ions

Publications (1)

Publication Number Publication Date
BE685529A true BE685529A (xx) 1967-02-01

Family

ID=8587015

Family Applications (1)

Application Number Title Priority Date Filing Date
BE685529D BE685529A (xx) 1965-08-20 1966-08-16

Country Status (9)

Country Link
US (1) US3408519A (xx)
BE (1) BE685529A (xx)
CH (1) CH460970A (xx)
DE (1) DE1291026B (xx)
ES (1) ES330374A1 (xx)
FR (1) FR1454051A (xx)
GB (1) GB1114634A (xx)
LU (1) LU51760A1 (xx)
NL (1) NL6611721A (xx)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3514666A (en) * 1967-06-16 1970-05-26 Avco Corp Charged particle generator yielding a mono-energetic ion beam
GB1503517A (en) * 1974-09-10 1978-03-15 Science Res Council Electrostatic accelerators
FR2416545A1 (fr) * 1978-02-03 1979-08-31 Thomson Csf Source d'ions produisant un flux dense d'ions de basse energie, et dispositif de traitement de surface comportant une telle source
CZ2015455A3 (cs) * 2015-07-01 2016-10-05 České Vysoké Učení Technické V Praze, Fakulta Elektrotechnická Stabilizovaný a homogenizovaný zdroj netermálního plazmatu
US9691584B1 (en) * 2016-06-30 2017-06-27 Varian Semiconductor Equipment Associates, Inc. Ion source for enhanced ionization

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE553596A (xx) * 1956-01-27
GB892344A (en) * 1959-03-18 1962-03-28 Nat Res Dev Ion source
DE1498845A1 (de) * 1962-01-31 1969-05-14 Leybold Heraeus Gmbh & Co Kg Ionisierungsvorrichtung fuer in grossen Totaldruckbereichen verwendbare Massenspektrometer

Also Published As

Publication number Publication date
FR1454051A (fr) 1966-07-22
US3408519A (en) 1968-10-29
LU51760A1 (xx) 1966-10-12
DE1291026B (de) 1969-03-20
ES330374A1 (es) 1968-03-16
NL6611721A (xx) 1967-02-21
GB1114634A (en) 1968-05-22
CH460970A (fr) 1968-08-15

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