LU51760A1 - - Google Patents

Info

Publication number
LU51760A1
LU51760A1 LU51760A LU51760A LU51760A1 LU 51760 A1 LU51760 A1 LU 51760A1 LU 51760 A LU51760 A LU 51760A LU 51760 A LU51760 A LU 51760A LU 51760 A1 LU51760 A1 LU 51760A1
Authority
LU
Luxembourg
Application number
LU51760A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of LU51760A1 publication Critical patent/LU51760A1/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
LU51760A 1965-08-20 1966-08-12 LU51760A1 (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR29045A FR1454051A (fr) 1965-08-20 1965-08-20 Source d'ions

Publications (1)

Publication Number Publication Date
LU51760A1 true LU51760A1 (xx) 1966-10-12

Family

ID=8587015

Family Applications (1)

Application Number Title Priority Date Filing Date
LU51760A LU51760A1 (xx) 1965-08-20 1966-08-12

Country Status (9)

Country Link
US (1) US3408519A (xx)
BE (1) BE685529A (xx)
CH (1) CH460970A (xx)
DE (1) DE1291026B (xx)
ES (1) ES330374A1 (xx)
FR (1) FR1454051A (xx)
GB (1) GB1114634A (xx)
LU (1) LU51760A1 (xx)
NL (1) NL6611721A (xx)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3514666A (en) * 1967-06-16 1970-05-26 Avco Corp Charged particle generator yielding a mono-energetic ion beam
GB1503517A (en) * 1974-09-10 1978-03-15 Science Res Council Electrostatic accelerators
FR2416545A1 (fr) * 1978-02-03 1979-08-31 Thomson Csf Source d'ions produisant un flux dense d'ions de basse energie, et dispositif de traitement de surface comportant une telle source
CZ2015455A3 (cs) * 2015-07-01 2016-10-05 České Vysoké Učení Technické V Praze, Fakulta Elektrotechnická Stabilizovaný a homogenizovaný zdroj netermálního plazmatu
US9691584B1 (en) * 2016-06-30 2017-06-27 Varian Semiconductor Equipment Associates, Inc. Ion source for enhanced ionization

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE553596A (xx) * 1956-01-27
GB892344A (en) * 1959-03-18 1962-03-28 Nat Res Dev Ion source
DE1498845A1 (de) * 1962-01-31 1969-05-14 Leybold Heraeus Gmbh & Co Kg Ionisierungsvorrichtung fuer in grossen Totaldruckbereichen verwendbare Massenspektrometer

Also Published As

Publication number Publication date
FR1454051A (fr) 1966-07-22
US3408519A (en) 1968-10-29
DE1291026B (de) 1969-03-20
ES330374A1 (es) 1968-03-16
NL6611721A (xx) 1967-02-21
GB1114634A (en) 1968-05-22
BE685529A (xx) 1967-02-01
CH460970A (fr) 1968-08-15

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