FR1389582A - Source d'évaporation - Google Patents

Source d'évaporation

Info

Publication number
FR1389582A
FR1389582A FR959603A FR959603A FR1389582A FR 1389582 A FR1389582 A FR 1389582A FR 959603 A FR959603 A FR 959603A FR 959603 A FR959603 A FR 959603A FR 1389582 A FR1389582 A FR 1389582A
Authority
FR
France
Prior art keywords
evaporation source
evaporation
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR959603A
Other languages
English (en)
Inventor
Igor Melnick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR959603A priority Critical patent/FR1389582A/fr
Priority to CH1627964A priority patent/CH429362A/fr
Priority to LU47629A priority patent/LU47629A1/xx
Priority to GB11565A priority patent/GB1032901A/en
Priority to DE1965C0012632 priority patent/DE1912316U/de
Priority to ES0307847A priority patent/ES307847A1/es
Application granted granted Critical
Publication of FR1389582A publication Critical patent/FR1389582A/fr
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/22—Evaporating by bringing a thin layer of the liquid into contact with a heated surface
    • B01D1/222—In rotating vessels; vessels with movable parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/0011—Heating features
    • B01D1/0017—Use of electrical or wave energy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Thin Magnetic Films (AREA)
  • Physical Vapour Deposition (AREA)
FR959603A 1964-01-07 1964-01-07 Source d'évaporation Expired FR1389582A (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR959603A FR1389582A (fr) 1964-01-07 1964-01-07 Source d'évaporation
CH1627964A CH429362A (fr) 1964-01-07 1964-12-17 Source d'évaporation à chauffage par effet Joule
LU47629A LU47629A1 (fr) 1964-01-07 1964-12-21
GB11565A GB1032901A (en) 1964-01-07 1965-01-01 An electrically-heated evaporation source
DE1965C0012632 DE1912316U (de) 1964-01-07 1965-01-05 Verdampfungsvorrichtung.
ES0307847A ES307847A1 (es) 1964-01-07 1965-01-05 Un dispositivo de evaporacion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR959603A FR1389582A (fr) 1964-01-07 1964-01-07 Source d'évaporation

Publications (1)

Publication Number Publication Date
FR1389582A true FR1389582A (fr) 1965-02-19

Family

ID=8820428

Family Applications (1)

Application Number Title Priority Date Filing Date
FR959603A Expired FR1389582A (fr) 1964-01-07 1964-01-07 Source d'évaporation

Country Status (6)

Country Link
CH (1) CH429362A (fr)
DE (1) DE1912316U (fr)
ES (1) ES307847A1 (fr)
FR (1) FR1389582A (fr)
GB (1) GB1032901A (fr)
LU (1) LU47629A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4113978A (en) * 1976-05-24 1978-09-12 Commissariat A L'energie Atomique Evaporation source for vacuum deposition
FR2396807A1 (fr) * 1977-07-08 1979-02-02 Balzers Hochvakuum Installation de depot par evaporation sous vide

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109594046B (zh) * 2019-01-23 2023-07-07 湖南宇晶机器股份有限公司 一种镀膜用蒸发装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4113978A (en) * 1976-05-24 1978-09-12 Commissariat A L'energie Atomique Evaporation source for vacuum deposition
FR2396807A1 (fr) * 1977-07-08 1979-02-02 Balzers Hochvakuum Installation de depot par evaporation sous vide

Also Published As

Publication number Publication date
GB1032901A (en) 1966-06-15
ES307847A1 (es) 1965-04-16
CH429362A (fr) 1967-01-31
LU47629A1 (fr) 1965-02-22
DE1912316U (de) 1965-03-18

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