ES307847A1 - Un dispositivo de evaporacion - Google Patents
Un dispositivo de evaporacionInfo
- Publication number
- ES307847A1 ES307847A1 ES0307847A ES307847A ES307847A1 ES 307847 A1 ES307847 A1 ES 307847A1 ES 0307847 A ES0307847 A ES 0307847A ES 307847 A ES307847 A ES 307847A ES 307847 A1 ES307847 A1 ES 307847A1
- Authority
- ES
- Spain
- Prior art keywords
- electrically
- evaporation source
- heated evaporation
- crucible
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D1/00—Evaporating
- B01D1/22—Evaporating by bringing a thin layer of the liquid into contact with a heated surface
- B01D1/222—In rotating vessels; vessels with movable parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D1/00—Evaporating
- B01D1/0011—Heating features
- B01D1/0017—Use of electrical or wave energy
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Thin Magnetic Films (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR959603A FR1389582A (fr) | 1964-01-07 | 1964-01-07 | Source d'évaporation |
Publications (1)
Publication Number | Publication Date |
---|---|
ES307847A1 true ES307847A1 (es) | 1965-04-16 |
Family
ID=8820428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES0307847A Expired ES307847A1 (es) | 1964-01-07 | 1965-01-05 | Un dispositivo de evaporacion |
Country Status (6)
Country | Link |
---|---|
CH (1) | CH429362A (es) |
DE (1) | DE1912316U (es) |
ES (1) | ES307847A1 (es) |
FR (1) | FR1389582A (es) |
GB (1) | GB1032901A (es) |
LU (1) | LU47629A1 (es) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2352894A1 (fr) * | 1976-05-24 | 1977-12-23 | Commissariat Energie Atomique | Source d'evaporation pour depot sous vide |
CH626407A5 (es) * | 1977-07-08 | 1981-11-13 | Balzers Hochvakuum | |
CN109594046B (zh) * | 2019-01-23 | 2023-07-07 | 湖南宇晶机器股份有限公司 | 一种镀膜用蒸发装置 |
-
1964
- 1964-01-07 FR FR959603A patent/FR1389582A/fr not_active Expired
- 1964-12-17 CH CH1627964A patent/CH429362A/fr unknown
- 1964-12-21 LU LU47629A patent/LU47629A1/xx unknown
-
1965
- 1965-01-01 GB GB11565A patent/GB1032901A/en not_active Expired
- 1965-01-05 DE DE1965C0012632 patent/DE1912316U/de not_active Expired
- 1965-01-05 ES ES0307847A patent/ES307847A1/es not_active Expired
Also Published As
Publication number | Publication date |
---|---|
LU47629A1 (es) | 1965-02-22 |
CH429362A (fr) | 1967-01-31 |
GB1032901A (en) | 1966-06-15 |
DE1912316U (de) | 1965-03-18 |
FR1389582A (fr) | 1965-02-19 |
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