DE1912316U - Verdampfungsvorrichtung. - Google Patents

Verdampfungsvorrichtung.

Info

Publication number
DE1912316U
DE1912316U DE1965C0012632 DEC0012632U DE1912316U DE 1912316 U DE1912316 U DE 1912316U DE 1965C0012632 DE1965C0012632 DE 1965C0012632 DE C0012632 U DEC0012632 U DE C0012632U DE 1912316 U DE1912316 U DE 1912316U
Authority
DE
Germany
Prior art keywords
crucible
evaporation device
evaporation
terminals
electrical current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE1965C0012632
Other languages
German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE1912316U publication Critical patent/DE1912316U/de
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D1/00Evaporating
    • B01D1/22Evaporating by bringing a thin layer of the liquid into contact with a heated surface
    • B01D1/222In rotating vessels; vessels with movable parts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D1/00Evaporating
    • B01D1/0011Heating features
    • B01D1/0017Use of electrical or wave energy
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/26Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Thin Magnetic Films (AREA)
  • Physical Vapour Deposition (AREA)
DE1965C0012632 1964-01-07 1965-01-05 Verdampfungsvorrichtung. Expired DE1912316U (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR959603A FR1389582A (fr) 1964-01-07 1964-01-07 Source d'évaporation

Publications (1)

Publication Number Publication Date
DE1912316U true DE1912316U (de) 1965-03-18

Family

ID=8820428

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1965C0012632 Expired DE1912316U (de) 1964-01-07 1965-01-05 Verdampfungsvorrichtung.

Country Status (6)

Country Link
CH (1) CH429362A (es)
DE (1) DE1912316U (es)
ES (1) ES307847A1 (es)
FR (1) FR1389582A (es)
GB (1) GB1032901A (es)
LU (1) LU47629A1 (es)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2352894A1 (fr) * 1976-05-24 1977-12-23 Commissariat Energie Atomique Source d'evaporation pour depot sous vide
CH626407A5 (es) * 1977-07-08 1981-11-13 Balzers Hochvakuum
CN109594046B (zh) * 2019-01-23 2023-07-07 湖南宇晶机器股份有限公司 一种镀膜用蒸发装置

Also Published As

Publication number Publication date
GB1032901A (en) 1966-06-15
ES307847A1 (es) 1965-04-16
LU47629A1 (es) 1965-02-22
FR1389582A (fr) 1965-02-19
CH429362A (fr) 1967-01-31

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