FR2352894A1 - Source d'evaporation pour depot sous vide - Google Patents
Source d'evaporation pour depot sous videInfo
- Publication number
- FR2352894A1 FR2352894A1 FR7615684A FR7615684A FR2352894A1 FR 2352894 A1 FR2352894 A1 FR 2352894A1 FR 7615684 A FR7615684 A FR 7615684A FR 7615684 A FR7615684 A FR 7615684A FR 2352894 A1 FR2352894 A1 FR 2352894A1
- Authority
- FR
- France
- Prior art keywords
- evaporation source
- vacuum deposit
- deposit
- vacuum
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008020 evaporation Effects 0.000 title 1
- 238000001704 evaporation Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7615684A FR2352894A1 (fr) | 1976-05-24 | 1976-05-24 | Source d'evaporation pour depot sous vide |
GB20102/77A GB1535688A (en) | 1976-05-24 | 1977-05-13 | Crucible and heater assembly |
US05/797,849 US4113978A (en) | 1976-05-24 | 1977-05-17 | Evaporation source for vacuum deposition |
DE19772723212 DE2723212A1 (de) | 1976-05-24 | 1977-05-23 | Verdampfungsvorrichtung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7615684A FR2352894A1 (fr) | 1976-05-24 | 1976-05-24 | Source d'evaporation pour depot sous vide |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2352894A1 true FR2352894A1 (fr) | 1977-12-23 |
FR2352894B1 FR2352894B1 (fr) | 1980-10-24 |
Family
ID=9173562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7615684A Granted FR2352894A1 (fr) | 1976-05-24 | 1976-05-24 | Source d'evaporation pour depot sous vide |
Country Status (4)
Country | Link |
---|---|
US (1) | US4113978A (fr) |
DE (1) | DE2723212A1 (fr) |
FR (1) | FR2352894A1 (fr) |
GB (1) | GB1535688A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2592888A1 (fr) * | 1986-01-10 | 1987-07-17 | Inst Francais Du Petrole | Compositions d'additifs destinees notamment a ameliorer les proprietes de filtrabilite a froid des distillats moyens de petrole |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3544735C1 (en) * | 1985-12-18 | 1987-06-11 | Flachglas Ag | Evaporator boat, method of making it, and use thereof |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1389582A (fr) * | 1964-01-07 | 1965-02-19 | Commissariat Energie Atomique | Source d'évaporation |
US3430937A (en) * | 1966-02-17 | 1969-03-04 | Nasa | Evaporant holder |
US3514575A (en) * | 1967-08-10 | 1970-05-26 | Sylvania Electric Prod | Metal-evaporating source |
-
1976
- 1976-05-24 FR FR7615684A patent/FR2352894A1/fr active Granted
-
1977
- 1977-05-13 GB GB20102/77A patent/GB1535688A/en not_active Expired
- 1977-05-17 US US05/797,849 patent/US4113978A/en not_active Expired - Lifetime
- 1977-05-23 DE DE19772723212 patent/DE2723212A1/de not_active Withdrawn
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2592888A1 (fr) * | 1986-01-10 | 1987-07-17 | Inst Francais Du Petrole | Compositions d'additifs destinees notamment a ameliorer les proprietes de filtrabilite a froid des distillats moyens de petrole |
Also Published As
Publication number | Publication date |
---|---|
FR2352894B1 (fr) | 1980-10-24 |
US4113978A (en) | 1978-09-12 |
DE2723212A1 (de) | 1977-12-08 |
GB1535688A (en) | 1978-12-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |