FR2352894A1 - Source d'evaporation pour depot sous vide - Google Patents

Source d'evaporation pour depot sous vide

Info

Publication number
FR2352894A1
FR2352894A1 FR7615684A FR7615684A FR2352894A1 FR 2352894 A1 FR2352894 A1 FR 2352894A1 FR 7615684 A FR7615684 A FR 7615684A FR 7615684 A FR7615684 A FR 7615684A FR 2352894 A1 FR2352894 A1 FR 2352894A1
Authority
FR
France
Prior art keywords
evaporation source
vacuum deposit
deposit
vacuum
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7615684A
Other languages
English (en)
Other versions
FR2352894B1 (fr
Inventor
Igor Melnick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7615684A priority Critical patent/FR2352894A1/fr
Priority to GB20102/77A priority patent/GB1535688A/en
Priority to US05/797,849 priority patent/US4113978A/en
Priority to DE19772723212 priority patent/DE2723212A1/de
Publication of FR2352894A1 publication Critical patent/FR2352894A1/fr
Application granted granted Critical
Publication of FR2352894B1 publication Critical patent/FR2352894B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7615684A 1976-05-24 1976-05-24 Source d'evaporation pour depot sous vide Granted FR2352894A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR7615684A FR2352894A1 (fr) 1976-05-24 1976-05-24 Source d'evaporation pour depot sous vide
GB20102/77A GB1535688A (en) 1976-05-24 1977-05-13 Crucible and heater assembly
US05/797,849 US4113978A (en) 1976-05-24 1977-05-17 Evaporation source for vacuum deposition
DE19772723212 DE2723212A1 (de) 1976-05-24 1977-05-23 Verdampfungsvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7615684A FR2352894A1 (fr) 1976-05-24 1976-05-24 Source d'evaporation pour depot sous vide

Publications (2)

Publication Number Publication Date
FR2352894A1 true FR2352894A1 (fr) 1977-12-23
FR2352894B1 FR2352894B1 (fr) 1980-10-24

Family

ID=9173562

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7615684A Granted FR2352894A1 (fr) 1976-05-24 1976-05-24 Source d'evaporation pour depot sous vide

Country Status (4)

Country Link
US (1) US4113978A (fr)
DE (1) DE2723212A1 (fr)
FR (1) FR2352894A1 (fr)
GB (1) GB1535688A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2592888A1 (fr) * 1986-01-10 1987-07-17 Inst Francais Du Petrole Compositions d'additifs destinees notamment a ameliorer les proprietes de filtrabilite a froid des distillats moyens de petrole

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3544735C1 (en) * 1985-12-18 1987-06-11 Flachglas Ag Evaporator boat, method of making it, and use thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1389582A (fr) * 1964-01-07 1965-02-19 Commissariat Energie Atomique Source d'évaporation
US3430937A (en) * 1966-02-17 1969-03-04 Nasa Evaporant holder
US3514575A (en) * 1967-08-10 1970-05-26 Sylvania Electric Prod Metal-evaporating source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2592888A1 (fr) * 1986-01-10 1987-07-17 Inst Francais Du Petrole Compositions d'additifs destinees notamment a ameliorer les proprietes de filtrabilite a froid des distillats moyens de petrole

Also Published As

Publication number Publication date
US4113978A (en) 1978-09-12
FR2352894B1 (fr) 1980-10-24
GB1535688A (en) 1978-12-13
DE2723212A1 (de) 1977-12-08

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Legal Events

Date Code Title Description
ST Notification of lapse