BE840007A - Installation pour le depot de matiere semi-conductrice - Google Patents
Installation pour le depot de matiere semi-conductriceInfo
- Publication number
- BE840007A BE840007A BE165537A BE165537A BE840007A BE 840007 A BE840007 A BE 840007A BE 165537 A BE165537 A BE 165537A BE 165537 A BE165537 A BE 165537A BE 840007 A BE840007 A BE 840007A
- Authority
- BE
- Belgium
- Prior art keywords
- deposit
- semi
- installation
- conductive material
- conductive
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M5/00—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
- H02M5/02—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into dc
- H02M5/04—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into dc by static converters
- H02M5/22—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into dc by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M5/25—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into dc by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a thyratron or thyristor type requiring extinguishing means
- H02M5/253—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into dc by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a thyratron or thyristor type requiring extinguishing means using discharge tubes only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
- G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
- G05F1/10—Regulating voltage or current
- G05F1/12—Regulating voltage or current wherein the variable actually regulated by the final control device is ac
- G05F1/40—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices
- G05F1/44—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices semiconductor devices only
- G05F1/45—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices semiconductor devices only being controlled rectifiers in series with the load
- G05F1/455—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices semiconductor devices only being controlled rectifiers in series with the load with phase control
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C19/00—Bearings with rolling contact, for exclusively rotary movement
- F16C19/22—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings
- F16C19/34—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load
- F16C19/36—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load with a single row of rollers
- F16C19/364—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load with a single row of rollers with tapered rollers, i.e. rollers having essentially the shape of a truncated cone
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Automation & Control Theory (AREA)
- Control Of Resistance Heating (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2528192A DE2528192C3 (de) | 1975-06-24 | 1975-06-24 | Vorrichtung zum Abscheiden von elementarem Silicium auf einen aus elementarem Silicium bestehenden stabförmigen Trägerkörper |
Publications (1)
Publication Number | Publication Date |
---|---|
BE840007A true BE840007A (fr) | 1976-07-16 |
Family
ID=5949849
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE165537A BE840007A (fr) | 1975-06-24 | 1976-03-25 | Installation pour le depot de matiere semi-conductrice |
Country Status (6)
Country | Link |
---|---|
US (1) | US4102298A (fr) |
JP (1) | JPS523382A (fr) |
BE (1) | BE840007A (fr) |
DE (1) | DE2528192C3 (fr) |
IT (1) | IT1063263B (fr) |
PL (1) | PL120081B1 (fr) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4267434A (en) * | 1979-06-14 | 1981-05-12 | Honeywell Inc. | Method of and apparatus for heat processing photosensitive material |
US4607324A (en) * | 1984-02-17 | 1986-08-19 | Gibbons William P | Reduced harmonic current rectifier including sequentially switched secondary windings |
US5408171A (en) * | 1991-10-21 | 1995-04-18 | Electric Power Research Institute, Inc. | Combined solid-state and mechanically-switched transformer tap-changer |
WO1999005728A1 (fr) | 1997-07-25 | 1999-02-04 | Nichia Chemical Industries, Ltd. | Dispositif a semi-conducteur en nitrure |
US6110322A (en) * | 1998-03-06 | 2000-08-29 | Applied Materials, Inc. | Prevention of ground fault interrupts in a semiconductor processing system |
JP3770014B2 (ja) | 1999-02-09 | 2006-04-26 | 日亜化学工業株式会社 | 窒化物半導体素子 |
ATE452445T1 (de) | 1999-03-04 | 2010-01-15 | Nichia Corp | Nitridhalbleiterlaserelement |
EP2021279A2 (fr) * | 2006-04-13 | 2009-02-11 | Cabot Corporation | Production de silicium selon un procédé en boucle fermée |
TWI362769B (en) | 2008-05-09 | 2012-04-21 | Univ Nat Chiao Tung | Light emitting device and fabrication method therefor |
US20100294751A1 (en) * | 2009-05-22 | 2010-11-25 | Innovative Engineering & Product Development, Inc. | Variable frequency heating controller |
DE102010020740A1 (de) * | 2010-05-17 | 2011-11-17 | Centrotherm Sitec Gmbh | Vorrichtung und Verfahren zum Anlegen einer Spannung an eine Vielzahl von Siliziumstäben in einem CVD-Reaktor |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL113118C (fr) * | 1954-05-18 | 1900-01-01 | ||
US3459152A (en) * | 1964-08-28 | 1969-08-05 | Westinghouse Electric Corp | Apparatus for epitaxially producing a layer on a substrate |
US3336517A (en) * | 1964-10-01 | 1967-08-15 | Hunt Electronics Company | Speed regulating control system for universal motor |
US3548155A (en) * | 1969-10-03 | 1970-12-15 | Vapor Corp | Controller for a temperature control system |
BE794139A (fr) * | 1972-01-17 | 1973-07-17 | Siemens Ag | Dispositif de chauffage electrique d'un barreau semi-conducteur |
US3980042A (en) * | 1972-03-21 | 1976-09-14 | Siemens Aktiengesellschaft | Vapor deposition apparatus with computer control |
-
1975
- 1975-06-24 DE DE2528192A patent/DE2528192C3/de not_active Expired
-
1976
- 1976-03-25 BE BE165537A patent/BE840007A/fr unknown
- 1976-06-10 US US05/694,717 patent/US4102298A/en not_active Expired - Lifetime
- 1976-06-22 IT IT24542/76A patent/IT1063263B/it active
- 1976-06-23 PL PL1976190646A patent/PL120081B1/pl unknown
- 1976-06-24 JP JP51074975A patent/JPS523382A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
DE2528192B2 (de) | 1978-06-01 |
JPS523382A (en) | 1977-01-11 |
US4102298A (en) | 1978-07-25 |
DE2528192A1 (de) | 1976-12-30 |
PL120081B1 (en) | 1982-02-27 |
IT1063263B (it) | 1985-02-11 |
DE2528192C3 (de) | 1979-02-01 |
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