FR2322936A1 - Porte-substrat pour installation de depot sous vide - Google Patents
Porte-substrat pour installation de depot sous videInfo
- Publication number
- FR2322936A1 FR2322936A1 FR7626331A FR7626331A FR2322936A1 FR 2322936 A1 FR2322936 A1 FR 2322936A1 FR 7626331 A FR7626331 A FR 7626331A FR 7626331 A FR7626331 A FR 7626331A FR 2322936 A1 FR2322936 A1 FR 2322936A1
- Authority
- FR
- France
- Prior art keywords
- substrate carrier
- vacuum deposit
- deposit installation
- installation
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S106/00—Compositions: coating or plastic
- Y10S106/02—Perlite
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH1135575A CH599982A5 (fr) | 1975-09-02 | 1975-09-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2322936A1 true FR2322936A1 (fr) | 1977-04-01 |
FR2322936B1 FR2322936B1 (fr) | 1980-04-04 |
Family
ID=4372692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7626331A Granted FR2322936A1 (fr) | 1975-09-02 | 1976-09-01 | Porte-substrat pour installation de depot sous vide |
Country Status (6)
Country | Link |
---|---|
US (1) | US4034704A (fr) |
CH (1) | CH599982A5 (fr) |
DE (1) | DE2635008C3 (fr) |
FR (1) | FR2322936A1 (fr) |
GB (1) | GB1562822A (fr) |
NL (1) | NL168886C (fr) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4108107A (en) * | 1976-04-01 | 1978-08-22 | Airco, Inc. | Rotatable substrate holder for use in vacuum |
DE2813180C2 (de) * | 1978-03-25 | 1985-12-19 | Leybold-Heraeus GmbH, 5000 Köln | Vakuumbeschichtungsanlage zum allseitigen Beschichten von Substraten durch Rotation der Substrate im Materialstrom |
US4276855A (en) * | 1979-05-02 | 1981-07-07 | Optical Coating Laboratory, Inc. | Coating apparatus |
DE2951465C2 (de) * | 1979-12-20 | 1982-10-21 | Siemens AG, 1000 Berlin und 8000 München | Halterung für Substrate in Bedampfungsanlagen |
JPH0639358B2 (ja) * | 1984-11-27 | 1994-05-25 | ソニー株式会社 | 有機金属気相成長装置 |
US4662310A (en) * | 1986-07-09 | 1987-05-05 | Deco Tools, Inc. | Robotic paint masking machine |
US4816133A (en) * | 1987-05-14 | 1989-03-28 | Northrop Corporation | Apparatus for preparing thin film optical coatings on substrates |
CH681308A5 (fr) * | 1990-05-22 | 1993-02-26 | Satis Vacuum Ag | |
DE4025659A1 (de) * | 1990-08-14 | 1992-02-20 | Leybold Ag | Umlaufraedergetriebe mit einem raedersatz, insbesondere fuer vorrichtungen zum beschichten von substraten |
US5558909A (en) * | 1996-01-17 | 1996-09-24 | Textron Automotive Interiors, Inc. | Apparatus and method for vacuum-metallizing articles with significant deposition onto three-dimensional surfaces |
DE19643702B4 (de) * | 1996-10-23 | 2007-11-29 | Ald Vacuum Technologies Ag | Vakuumbeschichtungsvorrichtung zum allseitigen Beschichten eines Substrats durch Rotation des Substrats im Materialstrom |
DE19743904C2 (de) * | 1997-10-04 | 2001-12-13 | Deutsch Zentr Luft & Raumfahrt | Wärmedämmschichten auf einkristallinen und polykristallinen Metallsubstraten mit einer verbesserten kristallographischen Beziehung zwischen Schicht und Substrat |
WO2003083162A1 (fr) * | 2002-03-28 | 2003-10-09 | Satis Vacuum Industries S.P.A. | Dispositif de depot sous vide et procede de depot de couches minces optiques sur des substrats presentant une courbure importante |
DE102004018435A1 (de) * | 2004-04-06 | 2005-10-27 | Carl Zeiss | Vorrichtung zum beidseitigen Beschichten von Substraten mit einer hydrophoben Schicht |
US7785456B2 (en) * | 2004-10-19 | 2010-08-31 | Jds Uniphase Corporation | Magnetic latch for a vapour deposition system |
ATE516390T1 (de) * | 2004-08-20 | 2011-07-15 | Jds Uniphase Inc | Magnetverschluss für eine dampfabscheidungsvorrichtung |
US7954219B2 (en) * | 2004-08-20 | 2011-06-07 | Jds Uniphase Corporation | Substrate holder assembly device |
DE202005008165U1 (de) * | 2005-05-20 | 2005-10-06 | Leybold Optics Gmbh | Vorrichtung zum beidseitigen Beschichten von Substraten |
US8101055B2 (en) * | 2007-12-19 | 2012-01-24 | Kojima Press Industry Co., Ltd. | Sputtering apparatus and method for forming coating film by sputtering |
US7985296B2 (en) * | 2008-11-06 | 2011-07-26 | Ching-Ching Chen | Sample fixing device of evaporation machine |
CN102021522B (zh) * | 2009-09-11 | 2013-06-05 | 鸿富锦精密工业(深圳)有限公司 | 溅镀式镀膜装置 |
TW201134969A (en) * | 2010-04-09 | 2011-10-16 | Hon Hai Prec Ind Co Ltd | Coating bracket and coating device using same |
US8647437B2 (en) * | 2010-05-31 | 2014-02-11 | Ci Systems (Israel) Ltd. | Apparatus, tool and methods for depositing annular or circular wedge coatings |
JP6019310B1 (ja) * | 2015-04-16 | 2016-11-02 | ナルックス株式会社 | 蒸着装置及び蒸着装置による成膜工程を含む製造方法 |
CN110331375B (zh) * | 2019-07-29 | 2022-07-01 | 光驰科技(上海)有限公司 | 一种镀膜室用基板装载装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2522272A (en) * | 1946-11-02 | 1950-09-12 | Polytechnic Inst Brooklyn | Apparatus for forming metallic films on tubular carriers |
US3777703A (en) * | 1972-06-02 | 1973-12-11 | Western Electric Co | Apparatus for supporting and rotating a workpiece |
DE2337204A1 (de) * | 1973-06-13 | 1975-01-09 | Satis Vacuum Ag | Verfahren und einrichtung zum aufdampfen mindestens einer oberflaechenschicht auf optische traeger, insbesondere glaeser |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3128205A (en) * | 1961-09-11 | 1964-04-07 | Optical Coating Laboratory Inc | Apparatus for vacuum coating |
US3442572A (en) * | 1964-08-25 | 1969-05-06 | Optical Coating Laboratory Inc | Circular variable filter |
US3598083A (en) * | 1969-10-27 | 1971-08-10 | Varian Associates | Complex motion mechanism for thin film coating apparatuses |
US3783821A (en) * | 1971-03-02 | 1974-01-08 | K Willmott | Planetary workholders |
US3749058A (en) * | 1971-07-26 | 1973-07-31 | Ion Equipment Corp | Rotary substrate holder assembly |
NL7205670A (fr) * | 1972-03-16 | 1973-09-18 | ||
US3858547A (en) * | 1973-12-14 | 1975-01-07 | Nils H Bergfelt | Coating machine having an adjustable rotation system |
-
1975
- 1975-09-02 CH CH1135575A patent/CH599982A5/xx not_active IP Right Cessation
- 1975-10-09 NL NLAANVRAGE7511898,A patent/NL168886C/xx not_active IP Right Cessation
-
1976
- 1976-08-04 DE DE2635008A patent/DE2635008C3/de not_active Expired
- 1976-08-23 GB GB35002/76A patent/GB1562822A/en not_active Expired
- 1976-09-01 FR FR7626331A patent/FR2322936A1/fr active Granted
- 1976-09-02 US US05/719,707 patent/US4034704A/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2522272A (en) * | 1946-11-02 | 1950-09-12 | Polytechnic Inst Brooklyn | Apparatus for forming metallic films on tubular carriers |
US3777703A (en) * | 1972-06-02 | 1973-12-11 | Western Electric Co | Apparatus for supporting and rotating a workpiece |
DE2337204A1 (de) * | 1973-06-13 | 1975-01-09 | Satis Vacuum Ag | Verfahren und einrichtung zum aufdampfen mindestens einer oberflaechenschicht auf optische traeger, insbesondere glaeser |
Also Published As
Publication number | Publication date |
---|---|
CH599982A5 (fr) | 1978-06-15 |
NL168886C (nl) | 1982-05-17 |
FR2322936B1 (fr) | 1980-04-04 |
NL168886B (nl) | 1981-12-16 |
US4034704A (en) | 1977-07-12 |
DE2635008C3 (de) | 1982-05-13 |
NL7511898A (nl) | 1977-03-04 |
DE2635008A1 (de) | 1977-02-24 |
GB1562822A (en) | 1980-03-19 |
DE2635008B2 (de) | 1980-04-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
FR2322936A1 (fr) | Porte-substrat pour installation de depot sous vide | |
BE853188A (fr) | Support de substrat tournant utilisable sous vide | |
BE813152A (fr) | Revetement pour substrats metalliques | |
FR2295568A1 (fr) | Procede de depot heteroepitaxique pour la realisation de diodes gap/si | |
IT1009427B (it) | Procedimento per il rivestimento di substrati con polimer | |
GB1543443A (en) | Two layer coating system for metallic substrates | |
FR2308584A1 (fr) | Depot de materiaux | |
BE841241A (fr) | Enceinte de reaction pour le depot de silicium elementaire | |
JPS5289539A (en) | Coated ferrous substrate | |
FR2317199A1 (fr) | Suceuse pour installation de dechargement de navires | |
AU481742B2 (en) | Organic coating of metallic substrates | |
NL7609685A (nl) | Beschermingslaag voor metalen substraten. | |
JPS51127135A (en) | Surface coating method | |
BE840007A (fr) | Installation pour le depot de matiere semi-conductrice | |
CA1027024A (fr) | Methode pour le depot de vapeurs chimiques sur substrats semi-conducteurs | |
FR2333024A1 (fr) | Substrats polymeres pour le depot de metaux par voie chimique | |
BE834557A (fr) | Creuset vaporisateur pour installations de metallisation sous vide | |
FR2311859A1 (fr) | Depot de ruthenium | |
FR2332802A1 (fr) | Procede pour deposer du nitrure de silicium sous vide | |
JPS529015A (en) | Substrate | |
BE839949A (fr) | Composition pour revetement de surface | |
JPS5249266A (en) | Method of coating polyolefin on metallic substrate | |
JPS5265861A (en) | Substrate holder | |
FR2352894A1 (fr) | Source d'evaporation pour depot sous vide | |
JPS5216517A (en) | Process for coating metal surface |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TP | Transmission of property | ||
ST | Notification of lapse |