NL168886C - Ronddraaiende substraatdrager voor vacuuembekledingsinstallaties. - Google Patents

Ronddraaiende substraatdrager voor vacuuembekledingsinstallaties.

Info

Publication number
NL168886C
NL168886C NLAANVRAGE7511898,A NL7511898A NL168886C NL 168886 C NL168886 C NL 168886C NL 7511898 A NL7511898 A NL 7511898A NL 168886 C NL168886 C NL 168886C
Authority
NL
Netherlands
Prior art keywords
substrate carrier
vacuum coating
rotating substrate
coating installations
installations
Prior art date
Application number
NLAANVRAGE7511898,A
Other languages
English (en)
Other versions
NL7511898A (nl
NL168886B (nl
Original Assignee
Balzers Hochvakuum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum
Publication of NL7511898A publication Critical patent/NL7511898A/nl
Publication of NL168886B publication Critical patent/NL168886B/nl
Application granted granted Critical
Publication of NL168886C publication Critical patent/NL168886C/nl

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S106/00—Compositions: coating or plastic
    • Y10S106/02—Perlite

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NLAANVRAGE7511898,A 1975-09-02 1975-10-09 Ronddraaiende substraatdrager voor vacuuembekledingsinstallaties. NL168886C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1135575A CH599982A5 (nl) 1975-09-02 1975-09-02

Publications (3)

Publication Number Publication Date
NL7511898A NL7511898A (nl) 1977-03-04
NL168886B NL168886B (nl) 1981-12-16
NL168886C true NL168886C (nl) 1982-05-17

Family

ID=4372692

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7511898,A NL168886C (nl) 1975-09-02 1975-10-09 Ronddraaiende substraatdrager voor vacuuembekledingsinstallaties.

Country Status (6)

Country Link
US (1) US4034704A (nl)
CH (1) CH599982A5 (nl)
DE (1) DE2635008C3 (nl)
FR (1) FR2322936A1 (nl)
GB (1) GB1562822A (nl)
NL (1) NL168886C (nl)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4108107A (en) * 1976-04-01 1978-08-22 Airco, Inc. Rotatable substrate holder for use in vacuum
DE2813180C2 (de) * 1978-03-25 1985-12-19 Leybold-Heraeus GmbH, 5000 Köln Vakuumbeschichtungsanlage zum allseitigen Beschichten von Substraten durch Rotation der Substrate im Materialstrom
US4276855A (en) * 1979-05-02 1981-07-07 Optical Coating Laboratory, Inc. Coating apparatus
DE2951465C2 (de) * 1979-12-20 1982-10-21 Siemens AG, 1000 Berlin und 8000 München Halterung für Substrate in Bedampfungsanlagen
JPH0639358B2 (ja) * 1984-11-27 1994-05-25 ソニー株式会社 有機金属気相成長装置
US4662310A (en) * 1986-07-09 1987-05-05 Deco Tools, Inc. Robotic paint masking machine
US4816133A (en) * 1987-05-14 1989-03-28 Northrop Corporation Apparatus for preparing thin film optical coatings on substrates
CH681308A5 (nl) * 1990-05-22 1993-02-26 Satis Vacuum Ag
DE4025659A1 (de) * 1990-08-14 1992-02-20 Leybold Ag Umlaufraedergetriebe mit einem raedersatz, insbesondere fuer vorrichtungen zum beschichten von substraten
US5558909A (en) * 1996-01-17 1996-09-24 Textron Automotive Interiors, Inc. Apparatus and method for vacuum-metallizing articles with significant deposition onto three-dimensional surfaces
DE19643702B4 (de) * 1996-10-23 2007-11-29 Ald Vacuum Technologies Ag Vakuumbeschichtungsvorrichtung zum allseitigen Beschichten eines Substrats durch Rotation des Substrats im Materialstrom
DE19743904C2 (de) * 1997-10-04 2001-12-13 Deutsch Zentr Luft & Raumfahrt Wärmedämmschichten auf einkristallinen und polykristallinen Metallsubstraten mit einer verbesserten kristallographischen Beziehung zwischen Schicht und Substrat
WO2003083162A1 (en) * 2002-03-28 2003-10-09 Satis Vacuum Industries S.P.A. Vacuum deposition apparatus and method for depositing thin optical films on high curvature substrates
DE102004018435A1 (de) * 2004-04-06 2005-10-27 Carl Zeiss Vorrichtung zum beidseitigen Beschichten von Substraten mit einer hydrophoben Schicht
US7785456B2 (en) * 2004-10-19 2010-08-31 Jds Uniphase Corporation Magnetic latch for a vapour deposition system
US7954219B2 (en) * 2004-08-20 2011-06-07 Jds Uniphase Corporation Substrate holder assembly device
DK1630260T3 (da) * 2004-08-20 2011-10-31 Jds Uniphase Inc Magnetisk holdemekanisme til et dampudfældningssystem
DE202005008165U1 (de) * 2005-05-20 2005-10-06 Leybold Optics Gmbh Vorrichtung zum beidseitigen Beschichten von Substraten
US8101055B2 (en) * 2007-12-19 2012-01-24 Kojima Press Industry Co., Ltd. Sputtering apparatus and method for forming coating film by sputtering
US7985296B2 (en) * 2008-11-06 2011-07-26 Ching-Ching Chen Sample fixing device of evaporation machine
CN102021522B (zh) * 2009-09-11 2013-06-05 鸿富锦精密工业（深圳）有限公司 溅镀式镀膜装置
TW201134969A (en) * 2010-04-09 2011-10-16 Hon Hai Prec Ind Co Ltd Coating bracket and coating device using same
US8647437B2 (en) * 2010-05-31 2014-02-11 Ci Systems (Israel) Ltd. Apparatus, tool and methods for depositing annular or circular wedge coatings
JP6019310B1 (ja) * 2015-04-16 2016-11-02 ナルックス株式会社 蒸着装置及び蒸着装置による成膜工程を含む製造方法
CN110331375B (zh) * 2019-07-29 2022-07-01 光驰科技(上海)有限公司 一种镀膜室用基板装载装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2522272A (en) * 1946-11-02 1950-09-12 Polytechnic Inst Brooklyn Apparatus for forming metallic films on tubular carriers
US3128205A (en) * 1961-09-11 1964-04-07 Optical Coating Laboratory Inc Apparatus for vacuum coating
US3442572A (en) * 1964-08-25 1969-05-06 Optical Coating Laboratory Inc Circular variable filter
US3598083A (en) * 1969-10-27 1971-08-10 Varian Associates Complex motion mechanism for thin film coating apparatuses
US3783821A (en) * 1971-03-02 1974-01-08 K Willmott Planetary workholders
US3749058A (en) * 1971-07-26 1973-07-31 Ion Equipment Corp Rotary substrate holder assembly
NL7205670A (nl) * 1972-03-16 1973-09-18
US3777703A (en) * 1972-06-02 1973-12-11 Western Electric Co Apparatus for supporting and rotating a workpiece
CH585675A5 (nl) * 1973-06-13 1977-03-15 Satis Vacuum Ag
US3858547A (en) * 1973-12-14 1975-01-07 Nils H Bergfelt Coating machine having an adjustable rotation system

Also Published As

Publication number Publication date
CH599982A5 (nl) 1978-06-15
FR2322936A1 (fr) 1977-04-01
US4034704A (en) 1977-07-12
GB1562822A (en) 1980-03-19
DE2635008B2 (de) 1980-04-03
NL7511898A (nl) 1977-03-04
DE2635008A1 (de) 1977-02-24
FR2322936B1 (nl) 1980-04-04
NL168886B (nl) 1981-12-16
DE2635008C3 (de) 1982-05-13

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Legal Events

Date Code Title Description
V1 Lapsed because of non-payment of the annual fee