FR2332802A1 - Procede pour deposer du nitrure de silicium sous vide - Google Patents
Procede pour deposer du nitrure de silicium sous videInfo
- Publication number
- FR2332802A1 FR2332802A1 FR7635591A FR7635591A FR2332802A1 FR 2332802 A1 FR2332802 A1 FR 2332802A1 FR 7635591 A FR7635591 A FR 7635591A FR 7635591 A FR7635591 A FR 7635591A FR 2332802 A1 FR2332802 A1 FR 2332802A1
- Authority
- FR
- France
- Prior art keywords
- silicon nitride
- under vacuum
- depositing silicon
- nitride under
- depositing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US63501275A | 1975-11-25 | 1975-11-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2332802A1 true FR2332802A1 (fr) | 1977-06-24 |
FR2332802B1 FR2332802B1 (fr) | 1981-12-24 |
Family
ID=24546063
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7635591A Granted FR2332802A1 (fr) | 1975-11-25 | 1976-11-25 | Procede pour deposer du nitrure de silicium sous vide |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS6010108B2 (fr) |
DE (1) | DE2652449C2 (fr) |
FR (1) | FR2332802A1 (fr) |
GB (1) | GB1518564A (fr) |
HK (1) | HK881A (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3118848C2 (de) * | 1980-05-12 | 1983-05-19 | Mitsubishi Denki K.K., Tokyo | Niederdruck-Beschichtungsvorrichtung |
GB2213836B (en) * | 1987-12-18 | 1992-08-26 | Gen Electric Co Plc | Vacuum deposition process |
JPH0248706U (fr) * | 1988-09-27 | 1990-04-04 | ||
FR2759362B1 (fr) * | 1997-02-10 | 1999-03-12 | Saint Gobain Vitrage | Substrat transparent muni d'au moins une couche mince a base de nitrure ou d'oxynitrure de silicium et son procede d'obtention |
JP2004071970A (ja) * | 2002-08-08 | 2004-03-04 | Shin Etsu Chem Co Ltd | 太陽電池用シリコン基板の製造方法およびその製造システム |
CN115142048B (zh) * | 2022-06-30 | 2023-07-07 | 北海惠科半导体科技有限公司 | 晶圆载具及氮化硅介质膜的制备方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1521174A (fr) * | 1966-05-02 | 1968-04-12 | Siemens Ag | Procédé pour réaliser une couche protectrice, notamment sur la surface d'un cristal semi-conducteur |
US3652324A (en) * | 1968-08-15 | 1972-03-28 | Westinghouse Electric Corp | A METHOD OF VAPOR DEPOSITING A LAYER OF Si{11 N{11 {0 ON A SILICON BASE |
US3856587A (en) * | 1971-03-26 | 1974-12-24 | Co Yamazaki Kogyo Kk | Method of fabricating semiconductor memory device gate |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1251287C2 (de) * | 1962-09-10 | 1975-10-09 | United Aircraft Corporation, East Hartford, Conn. (V.St.A.) | Verfahren zur herstellung von nichtporoesem siliciumnitrid |
US3549411A (en) * | 1967-06-27 | 1970-12-22 | Texas Instruments Inc | Method of preparing silicon nitride films |
US3900597A (en) * | 1973-12-19 | 1975-08-19 | Motorola Inc | System and process for deposition of polycrystalline silicon with silane in vacuum |
-
1976
- 1976-10-28 GB GB4484876A patent/GB1518564A/en not_active Expired
- 1976-11-17 DE DE19762652449 patent/DE2652449C2/de not_active Expired
- 1976-11-19 JP JP51139391A patent/JPS6010108B2/ja not_active Expired
- 1976-11-25 FR FR7635591A patent/FR2332802A1/fr active Granted
-
1981
- 1981-01-15 HK HK881A patent/HK881A/xx unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1521174A (fr) * | 1966-05-02 | 1968-04-12 | Siemens Ag | Procédé pour réaliser une couche protectrice, notamment sur la surface d'un cristal semi-conducteur |
US3652324A (en) * | 1968-08-15 | 1972-03-28 | Westinghouse Electric Corp | A METHOD OF VAPOR DEPOSITING A LAYER OF Si{11 N{11 {0 ON A SILICON BASE |
US3856587A (en) * | 1971-03-26 | 1974-12-24 | Co Yamazaki Kogyo Kk | Method of fabricating semiconductor memory device gate |
Also Published As
Publication number | Publication date |
---|---|
JPS5265199A (en) | 1977-05-30 |
GB1518564A (en) | 1978-07-19 |
HK881A (en) | 1981-01-23 |
DE2652449C2 (de) | 1982-06-09 |
DE2652449A1 (de) | 1977-05-26 |
JPS6010108B2 (ja) | 1985-03-15 |
FR2332802B1 (fr) | 1981-12-24 |
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