GB1032901A - An electrically-heated evaporation source - Google Patents
An electrically-heated evaporation sourceInfo
- Publication number
- GB1032901A GB1032901A GB11565A GB11565A GB1032901A GB 1032901 A GB1032901 A GB 1032901A GB 11565 A GB11565 A GB 11565A GB 11565 A GB11565 A GB 11565A GB 1032901 A GB1032901 A GB 1032901A
- Authority
- GB
- United Kingdom
- Prior art keywords
- electrically
- evaporation source
- heated evaporation
- crucible
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D1/00—Evaporating
- B01D1/22—Evaporating by bringing a thin layer of the liquid into contact with a heated surface
- B01D1/222—In rotating vessels; vessels with movable parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D1/00—Evaporating
- B01D1/0011—Heating features
- B01D1/0017—Use of electrical or wave energy
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Thin Magnetic Films (AREA)
- Physical Vapour Deposition (AREA)
Abstract
<PICT:1032901/C6-C7/1> An electrically-heated evaporation source for depositing a thin coating on a support, e.g. permalloy coating on thin glass strips, comprises a ceramic conical crucible 1 supported by two complementary metal resistance strips 2 whose centre portions are shaped to closely match the profile of the crucible to ensure uniform heating of the latter. Current is supplied to the strip ends through terminals, Fig. 2 (not shown) rigidly connected to a cylindrical copper vessel 5 secured to a copper support 10 cooled by water-filled tubes 11.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR959603A FR1389582A (en) | 1964-01-07 | 1964-01-07 | Evaporation source |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1032901A true GB1032901A (en) | 1966-06-15 |
Family
ID=8820428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB11565A Expired GB1032901A (en) | 1964-01-07 | 1965-01-01 | An electrically-heated evaporation source |
Country Status (6)
Country | Link |
---|---|
CH (1) | CH429362A (en) |
DE (1) | DE1912316U (en) |
ES (1) | ES307847A1 (en) |
FR (1) | FR1389582A (en) |
GB (1) | GB1032901A (en) |
LU (1) | LU47629A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109594046A (en) * | 2019-01-23 | 2019-04-09 | 湖南宇诚精密科技有限公司 | A kind of plated film vaporising device |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2352894A1 (en) * | 1976-05-24 | 1977-12-23 | Commissariat Energie Atomique | EVAPORATION SOURCE FOR VACUUM DEPOSIT |
CH626407A5 (en) * | 1977-07-08 | 1981-11-13 | Balzers Hochvakuum |
-
1964
- 1964-01-07 FR FR959603A patent/FR1389582A/en not_active Expired
- 1964-12-17 CH CH1627964A patent/CH429362A/en unknown
- 1964-12-21 LU LU47629A patent/LU47629A1/xx unknown
-
1965
- 1965-01-01 GB GB11565A patent/GB1032901A/en not_active Expired
- 1965-01-05 ES ES0307847A patent/ES307847A1/en not_active Expired
- 1965-01-05 DE DE1965C0012632 patent/DE1912316U/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109594046A (en) * | 2019-01-23 | 2019-04-09 | 湖南宇诚精密科技有限公司 | A kind of plated film vaporising device |
CN109594046B (en) * | 2019-01-23 | 2023-07-07 | 湖南宇晶机器股份有限公司 | Evaporation device for coating film |
Also Published As
Publication number | Publication date |
---|---|
ES307847A1 (en) | 1965-04-16 |
DE1912316U (en) | 1965-03-18 |
LU47629A1 (en) | 1965-02-22 |
CH429362A (en) | 1967-01-31 |
FR1389582A (en) | 1965-02-19 |
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