CH429362A - Joule heating evaporation source - Google Patents

Joule heating evaporation source

Info

Publication number
CH429362A
CH429362A CH1627964A CH1627964A CH429362A CH 429362 A CH429362 A CH 429362A CH 1627964 A CH1627964 A CH 1627964A CH 1627964 A CH1627964 A CH 1627964A CH 429362 A CH429362 A CH 429362A
Authority
CH
Switzerland
Prior art keywords
evaporation source
joule heating
heating evaporation
joule
source
Prior art date
Application number
CH1627964A
Other languages
French (fr)
Inventor
Melnick Igor
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Publication of CH429362A publication Critical patent/CH429362A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/22—Evaporating by bringing a thin layer of the liquid into contact with a heated surface
    • B01D1/222—In rotating vessels; vessels with movable parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/0011—Heating features
    • B01D1/0017—Use of electrical or wave energy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Thin Magnetic Films (AREA)
  • Physical Vapour Deposition (AREA)
CH1627964A 1964-01-07 1964-12-17 Joule heating evaporation source CH429362A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR959603A FR1389582A (en) 1964-01-07 1964-01-07 Evaporation source

Publications (1)

Publication Number Publication Date
CH429362A true CH429362A (en) 1967-01-31

Family

ID=8820428

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1627964A CH429362A (en) 1964-01-07 1964-12-17 Joule heating evaporation source

Country Status (6)

Country Link
CH (1) CH429362A (en)
DE (1) DE1912316U (en)
ES (1) ES307847A1 (en)
FR (1) FR1389582A (en)
GB (1) GB1032901A (en)
LU (1) LU47629A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2352894A1 (en) * 1976-05-24 1977-12-23 Commissariat Energie Atomique EVAPORATION SOURCE FOR VACUUM DEPOSIT
CH626407A5 (en) * 1977-07-08 1981-11-13 Balzers Hochvakuum
CN109594046B (en) * 2019-01-23 2023-07-07 湖南宇晶机器股份有限公司 Evaporation device for coating film

Also Published As

Publication number Publication date
DE1912316U (en) 1965-03-18
GB1032901A (en) 1966-06-15
ES307847A1 (en) 1965-04-16
LU47629A1 (en) 1965-02-22
FR1389582A (en) 1965-02-19

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