LU47629A1 - - Google Patents
Info
- Publication number
- LU47629A1 LU47629A1 LU47629A LU47629A LU47629A1 LU 47629 A1 LU47629 A1 LU 47629A1 LU 47629 A LU47629 A LU 47629A LU 47629 A LU47629 A LU 47629A LU 47629 A1 LU47629 A1 LU 47629A1
- Authority
- LU
- Luxembourg
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D1/00—Evaporating
- B01D1/22—Evaporating by bringing a thin layer of the liquid into contact with a heated surface
- B01D1/222—In rotating vessels; vessels with movable parts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D1/00—Evaporating
- B01D1/0011—Heating features
- B01D1/0017—Use of electrical or wave energy
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Thin Magnetic Films (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR959603A FR1389582A (en) | 1964-01-07 | 1964-01-07 | Evaporation source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| LU47629A1 true LU47629A1 (en) | 1965-02-22 |
Family
ID=8820428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| LU47629A LU47629A1 (en) | 1964-01-07 | 1964-12-21 |
Country Status (6)
| Country | Link |
|---|---|
| CH (1) | CH429362A (en) |
| DE (1) | DE1912316U (en) |
| ES (1) | ES307847A1 (en) |
| FR (1) | FR1389582A (en) |
| GB (1) | GB1032901A (en) |
| LU (1) | LU47629A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2352894A1 (en) * | 1976-05-24 | 1977-12-23 | Commissariat Energie Atomique | EVAPORATION SOURCE FOR VACUUM DEPOSIT |
| CH626407A5 (en) * | 1977-07-08 | 1981-11-13 | Balzers Hochvakuum | |
| CN109594046B (en) * | 2019-01-23 | 2023-07-07 | 湖南宇晶机器股份有限公司 | Evaporation device for coating film |
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1964
- 1964-01-07 FR FR959603A patent/FR1389582A/en not_active Expired
- 1964-12-17 CH CH1627964A patent/CH429362A/en unknown
- 1964-12-21 LU LU47629A patent/LU47629A1/xx unknown
-
1965
- 1965-01-01 GB GB11565A patent/GB1032901A/en not_active Expired
- 1965-01-05 ES ES0307847A patent/ES307847A1/en not_active Expired
- 1965-01-05 DE DE1965C0012632 patent/DE1912316U/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1912316U (en) | 1965-03-18 |
| GB1032901A (en) | 1966-06-15 |
| ES307847A1 (en) | 1965-04-16 |
| FR1389582A (en) | 1965-02-19 |
| CH429362A (en) | 1967-01-31 |