FR1451345A - Source d'évaporation - Google Patents

Source d'évaporation

Info

Publication number
FR1451345A
FR1451345A FR22660A FR22660A FR1451345A FR 1451345 A FR1451345 A FR 1451345A FR 22660 A FR22660 A FR 22660A FR 22660 A FR22660 A FR 22660A FR 1451345 A FR1451345 A FR 1451345A
Authority
FR
France
Prior art keywords
evaporation source
evaporation
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR22660A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US379307A external-priority patent/US3271562A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to FR22660A priority Critical patent/FR1451345A/fr
Application granted granted Critical
Publication of FR1451345A publication Critical patent/FR1451345A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR22660A 1964-06-30 1965-06-29 Source d'évaporation Expired FR1451345A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR22660A FR1451345A (fr) 1964-06-30 1965-06-29 Source d'évaporation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US379307A US3271562A (en) 1964-06-30 1964-06-30 Evaporant source
FR22660A FR1451345A (fr) 1964-06-30 1965-06-29 Source d'évaporation

Publications (1)

Publication Number Publication Date
FR1451345A true FR1451345A (fr) 1966-01-07

Family

ID=26164417

Family Applications (1)

Application Number Title Priority Date Filing Date
FR22660A Expired FR1451345A (fr) 1964-06-30 1965-06-29 Source d'évaporation

Country Status (1)

Country Link
FR (1) FR1451345A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2534933A1 (fr) * 1982-10-26 1984-04-27 Balzers Hochvakuum Cellule d'evaporation par effusion pour des installations de metallisation sous vide

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2534933A1 (fr) * 1982-10-26 1984-04-27 Balzers Hochvakuum Cellule d'evaporation par effusion pour des installations de metallisation sous vide
US4543467A (en) * 1982-10-26 1985-09-24 Balzers Aktiengesellschaft Effusion type evaporator cell for vacuum evaporators
CH651592A5 (de) * 1982-10-26 1985-09-30 Balzers Hochvakuum Dampfquelle fuer vakuumbedampfungsanlagen.

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