KR100810796B1 - 대기 반송실, 피처리체의 처리 후 반송 방법, 프로그램 및기억 매체 - Google Patents
대기 반송실, 피처리체의 처리 후 반송 방법, 프로그램 및기억 매체 Download PDFInfo
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Abstract
Description
Claims (23)
- 할로겐계 가스의 플라즈마에 의해서 피처리체에 처리를 실시하는 피처리체 처리실에 접속되어, 내부에서 상기 피처리체를 반송하는 대기 반송실에서,외부로부터 해당 대기 반송실 내부로 도입되는 대기를 제습하는 제습 장치를 구비하되,상기 피처리체에 부착한 할로겐계 가스의 반응 생성물을 제거하는 반응 생성물 제거실에 접속되고,해당 반응 생성물 제거실은, 상기 피처리체에 부착한 반응 생성물 중의 할로겐을 환원하는 대기 반송실.
- 제 1 항에 있어서,상기 제습 장치는 데시캔트(desiccant) 필터를 구비하는 대기 반송실.
- 제 1 항에 있어서,상기 제습 장치는 상기 대기 반송실의 내부로 도입되는 대기를 냉각하는 냉각 장치를 구비하는 대기 반송실.
- 제 3 항에 있어서,상기 냉각 장치는 펠티에 소자를 가지는 대기 반송실.
- 제 1 항에 있어서,상기 제습 장치는 에어컨디셔너를 구비하는 대기 반송실.
- 삭제
- 제 1 항에 있어서,상기 반응 생성물 제거실은, 해당 실내에 고온 수증기를 공급하는 고온 수증기 공급 장치를 구비하는 대기 반송실.
- 제 7 항에 있어서,상기 고온 수증기 공급 장치는, 상기 반응 생성물 제거실에 반입된 상기 피처리체를 향해서 상기 고온 수증기를 분출하고, 혹은, 상기 반응 생성물 제거실에 반입된 상기 피처리체를 상기 공급된 고온 수증기로 폭로하는 대기 반송실.
- 제 1 항에 있어서,상기 반응 생성물 제거실은, 해당 실내에 초임계 상태의 물질을 공급하는 초임계 물질 공급 장치를 구비하고, 상기 초임계 상태의 물질은 물질을 녹이기 위해 사용되는 액체로서 반응 생성물 중의 할로겐을 환원하는 환원제를 포함하는 대기 반송실.
- 제 9 항에 있어서,상기 초임계 상태의 물질은, 이산화탄소, 희 가스 및 물 중 어느 하나로 이루어지는 대기 반송실.
- 제 10 항에 있어서,상기 환원제는 물 또는 과산화수소수로 이루어지는 대기 반송실.
- 제 1 항 내지 제 5 항 중 어느 한 항에 있어서,상기 피처리체를 수용하는 용기가 접속되는 용기 접속구와,상기 용기 접속로를 향하여 제습된 대기를 분출하는 제습 대기 분출 장치를 구비하는 대기 반송실.
- 제 1 항 내지 제 5 항 중 어느 한 항에 있어서,상기 대기 반송실의 내부에 이온을 공급하는 이온 공급 장치를 구비하는 대기 반송실.
- 제 1 항 내지 제 5 항 중 어느 한 항에 있어서,상기 대기 반송실의 내부로 공급되는 대기를 가열하는 대기 가열 장치를 구비하는 대기 반송실.
- 제 1 항 내지 제 5 항 중 어느 한 항에 있어서,상기 피처리체를 수용하는 용기를 탑재하는 용기 탑재대를 구비하고,상기 용기 탑재대는 상기 용기를 가열하는 용기 가열 장치를 가지는 대기 반송실.
- 삭제
- 할로겐계 가스의 플라즈마에 의해서 처리가 실시된 피처리체의 처리 후 반송 방법에 있어서,제습된 대기 반송실의 내부를 통하여, 피처리체를 처리실로부터, 할로겐계 가스의 반응 생성물을 제거하는 반응 생성물 제거실로 반송하는 반송 단계를 구비하는 피처리체의 처리 후 반송 방법.
- 삭제
- 할로겐계 가스의 플라즈마에 의해서 처리가 실시된 피처리체의 처리 후 반송 방법을 컴퓨터에 실행시키는 프로그램을 저장하는 컴퓨터가 판독 가능한 기억 매체에 있어서,상기 프로그램은, 제습된 대기 반송실의 내부에서 상기 피처리체를 반송하는 반송 모듈을 가지는 기억 매체.
- 제 19 항에 있어서,상기 프로그램은, 상기 피처리체를 해당 피처리체에 부착한 할로겐계 가스의 반응 생성물을 제거하는 반응 생성물 제거실에 반입하는 반입 모듈과, 상기 반입된 피처리체에 부착한 반응 생성물 중의 할로겐을 환원하는 환원 모듈을 가지는 기억 매체.
- 제 20 항에 있어서,상기 프로그램은, 상기 반응 생성물 제거실의 실내에 고온 수증기를 공급하는 고온 수증기 공급 모듈을 가지는 기억 매체.
- 제 20 항에 있어서,상기 프로그램은, 상기 반응 생성물 제거실의 실내에 초임계 상태의 물질을 공급하는 초임계 물질 공급 모듈을 가지고,상기 초임계 상태의 물질은, 물질을 녹이기 위해 사용되는 액체로서 반응 생성물 중의 할로겐을 환원하는 환원제를 포함하는 기억 매체.
- 제 19 항 내지 제 22 항 중 어느 한 항에 있어서,상기 프로그램은, 상기 대기 반송실의 습도에 따라 상기 대기 반송실의 내부에서 상기 피처리체의 반송 여부를 판정하는 판정 모듈을 가지는 기억 매체.
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JP2005078092A JP4518986B2 (ja) | 2005-03-17 | 2005-03-17 | 大気搬送室、被処理体の処理後搬送方法、プログラム及び記憶媒体 |
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Also Published As
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JP4518986B2 (ja) | 2010-08-04 |
CN1835193A (zh) | 2006-09-20 |
CN100477103C (zh) | 2009-04-08 |
KR20060101303A (ko) | 2006-09-22 |
US20060207971A1 (en) | 2006-09-21 |
JP2006261456A (ja) | 2006-09-28 |
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