JP6890029B2 - 基板搬送装置及び基板搬送方法 - Google Patents
基板搬送装置及び基板搬送方法 Download PDFInfo
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- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
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Description
次に、以上のように構成された基板処理システム1を用いたウェハ処理について説明する。
次に、上述した大気圧搬送装置20の構成について説明する。図2は、大気圧搬送装置20の構成の概略を示す縦断面図である。
次に、以上のように構成された大気圧搬送装置20における、ガスの制御について説明する。
次に、大気圧搬送装置20の他の実施形態について説明する。
20 大気圧搬送装置
100 筐体
101 ウェハ搬送機構
110 ガス供給部
120 FFU
130 ガス排出部
140 ガス循環部
141 循環配管
150 異物除去部
160 加湿部
161 気化フィルタ
170 ケミカルフィルタ
180 除湿部
181 乾燥剤
182 加熱機構
183 熱交換器
190 水貯留部
200 バイパス配管
W ウェハ
Claims (6)
- 基板の処理装置に対して当該基板を搬送する装置であって、
基板を保持して搬送する搬送機構と、
前記搬送機構を収容する筐体と、
前記筐体内に不活性ガスを供給するガス供給部と、
前記筐体から排出されたガスを当該筐体内に戻すガス循環部と、
前記筐体から排出されたガス中の異物を除去する異物除去部と、を有し、
前記異物除去部は、
前記筐体から排出されたガスに水分を付加する加湿部と、
前記加湿部で加湿されたガス中に含まれる異物を、当該ガス中の水分を用いて吸着除去するフィルタと、
前記フィルタで異物が除去されたガスから水分を除去する除湿部と、
前記加湿部と前記除湿部の間に設けられ、内部に水を貯留する水貯留部と、を有し、
前記加湿部は、前記水貯留部に貯留された水を利用し、
前記除湿部は、当該除湿部で回収された水を前記水貯留部に貯留することを特徴とする、基板搬送装置。 - 前記ガス供給部は、前記筐体の上面から不活性ガスを供給し、
前記異物除去部は、前記筐体の上面側に設けられていることを特徴とする、請求項1に記載の基板搬送装置。 - 前記ガス循環部は、前記筐体に接続して設けられ、当該筐体内のガスを循環させる循環配管をさらに有し、
前記異物除去部は循環配管に設けられていることを特徴とする、請求項1に記載の基板搬送装置。 - 前記ガス循環部は、前記筐体に接続して設けられ、当該筐体内のガスを循環させる循環配管と、前記循環配管から分岐して接続されるバイパス配管と、をさらに有し、
前記異物除去部はバイパス配管に設けられていることを特徴とする、請求項1に記載の基板搬送装置。 - 基板の処理装置に対して当該基板を搬送する装置であって、
基板を保持して搬送する搬送機構と、
前記搬送機構を収容する筐体と、
前記筐体内に不活性ガスを供給するガス供給部と、
前記筐体から排出されたガスを当該筐体内に戻すガス循環部と、
前記筐体から排出されたガス中の異物を除去する異物除去部と、を有し、
前記異物除去部は、
前記筐体から排出されたガスに水分を付加する加湿部と、
前記加湿部で加湿されたガス中に含まれる異物を、当該ガス中の水分を用いて吸着除去するフィルタと、
前記フィルタで異物が除去されたガスから水分を除去する除湿部と、を有し、
前記ガス循環部は、前記筐体に接続して設けられ、当該筐体内のガスを循環させる循環配管と、前記循環配管から分岐して接続されるバイパス配管と、をさらに有し、
前記異物除去部はバイパス配管に設けられていることを特徴とする、基板搬送装置。 - 基板の処理装置に対し、筐体内に収容された搬送機構により基板を保持して搬送する方法であって、
前記筐体内に不活性ガスを供給するガス供給工程と、
前記筐体から排出されたガスを当該筐体内に戻すガス循環工程と、
前記筐体から排出されたガス中の異物を除去する異物除去工程と、を有し、
前記異物除去工程は、
加湿部と除湿部の間に設けられた水貯留部に水を貯留する工程と、
前記加湿部により、前記筐体から排出されたガスに水分を付加する加湿工程と、
前記加湿工程で加湿されたガスをフィルタに通過させ、当該ガス中の水分を用いて異物を吸着除去する異物除去工程と、
前記除湿部により、前記異物除去工程で異物が除去されたガスから水分を除去する除湿工程と、を有することを特徴とする、基板搬送方法。
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JP2017070956A JP6890029B2 (ja) | 2017-03-31 | 2017-03-31 | 基板搬送装置及び基板搬送方法 |
KR1020180033372A KR102174449B1 (ko) | 2017-03-31 | 2018-03-22 | 기판 반송 장치 및 기판 반송 방법 |
US15/939,774 US10867820B2 (en) | 2017-03-31 | 2018-03-29 | Substrate transfer device and substrate transfer method |
CN201810291068.8A CN108695206B (zh) | 2017-03-31 | 2018-03-30 | 基板搬送装置和基板搬送方法 |
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US20190380804A1 (en) * | 2018-06-15 | 2019-12-19 | BATRIK Medical Manufacturing Inc. | Warming system for medical equipment |
KR102231831B1 (ko) * | 2018-11-28 | 2021-03-26 | (주) 예스티 | 이에프이엠 |
JP7221110B2 (ja) * | 2019-03-28 | 2023-02-13 | 株式会社Screenホールディングス | 基板処理装置 |
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JP6569063B2 (ja) * | 2015-07-01 | 2019-09-04 | シャープ株式会社 | 加湿装置、除加湿装置および加湿方法 |
JP6564642B2 (ja) | 2015-07-23 | 2019-08-21 | 東京エレクトロン株式会社 | 基板搬送室、基板処理システム、及び基板搬送室内のガス置換方法 |
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