KR100404536B1 - 유전 상수 κ가 낮은 무기/유기 혼성 박막 및 이를제조하는 방법 - Google Patents
유전 상수 κ가 낮은 무기/유기 혼성 박막 및 이를제조하는 방법 Download PDFInfo
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Abstract
Description
Claims (50)
- 유전 상수가 낮은 반도체 또는 집적 회로 상의 유전체 박막으로서,사실상 무기 기로 이루어진 주쇄 구조 및주쇄 구조에 결합하여 무기 물질과 유기 물질의 혼성체를 형성하므로써 유전 상수가 4.0 미만이고, 질량 손실이 질소 하에 400℃에서 시간 당 2% 미만인 박막을 제공하는 유기 사이드 기를 포함하며,주쇄 구조가 Si-O-Si 기의 가교된 매트릭스 및 Si-N-Si 기의 가교된 매트릭스 중 어느 하나로 형성되거나, 사실상 고리형 Si-O-Si 기 및 사슬로 이루어지고,유기 사이드 기가 -H, -CH3, -F, -C2H5, -CF3, -C2F5, -C6H5, -CF2CF3및 CH2CF3로 이루어진 군으로부터 선택됨을 특징으로 하는 유전체 박막.
- 제 1 항에 있어서, 유전 상수가 3.0 미만임을 특징으로 하는 유전체 박막.
- 삭제
- 청구항 4(은)는 설정등록료 납부시 포기되었습니다.제 1 항에 있어서, 주쇄 구조가 Si-O-Si 기의 3차원의 가교된 매트릭스로 형성됨을 특징으로 하는 유전체 박막.
- 청구항 5(은)는 설정등록료 납부시 포기되었습니다.제 1 항에 있어서, 주쇄 구조가 Si-N-Si 기의 3차원의 가교된 매트릭스로 형성됨을 특징으로 하는 유전체 박막.
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- 청구항 10(은)는 설정등록료 납부시 포기되었습니다.제 1 항에 있어서, 주쇄 구조가 추가로 고리형 Si-O-Si 기 및 사슬로 이루어짐을 특징으로 하는 유전체 박막.
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- 반도체 또는 집적 회로 상에 유전 상수가 낮은 유전체 박막을 제조하는 방법으로서,하나 이상의 유기규소 전구체를 제공하는 단계 및전구체가 반응하여 기판 표면상의 유전체 박막에 증착되는 화학 증착에 의해 증착시키는 단계를 포함하며, 유전체 박막이 사실상 무기 기로 이루어진 주쇄 구조 및 주쇄 구조에 결합된 유기 사이드 기를 가져 무기 물질과 유기 물질의 혼성체를 형성하므로써 유전 상수가 4.0 미만이고, 중량 손실이 질소 하에 400℃에서 시간당 2% 미만인 박막을 제공하고,주쇄 구조가 Si-O-Si 기의 가교된 매트릭스 및 Si-N-Si 기의 가교된 매트릭스 중 어느 하나로 형성되거나, 사실상 고리형 Si-O-Si 기 및 사슬로 이루어지고,유기 사이드 기가 -H, -CH3, -F, -C2H5, -CF3, -C2F5, -C6H5, -CF2CF3및 CH2CF3로 이루어진 군으로부터 선택됨을 특징으로 하는 방법.
- 제 15 항에 있어서, 증착 단계가 플라즈마 화학 증착에 의해 수행됨을 특징으로 하는 방법.
- 제 15 항에 있어서, 유전 상수가 3.0 미만임을 특징으로 하는 방법.
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- 제 15 항에 있어서, 전구체가 고리형 유기규소임을 특징으로 하는 방법.
- 제 15 항에 있어서, 전구체가 실록산, 플루오로실록산, 시클로실록산, 불소 함유 시클로실록산, 유기실라잔, 플루오로실라잔, 고리형 유기실라잔, 시클로플루오로실라잔 및 이들의 혼합물로 이루어진 군으로 부터 선택됨을 특징으로 하는 방법.
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- 제 15 항에 있어서, 전구체가 하기 화학식을 가짐을 특징으로 하는 방법:RnSi(OSi)mX(2m-n+4)상기 식에서,전구체는 선형이거나 분지형이고,n은 0 내지 (2m + 4)이고,m은 0 내지 4이고,X는 H 및 할로겐으로 이루어진 군으로부터 선택되며,R은 지방족, 올레핀계 및 방향족 탄화수소, 및 지방족, 올레핀계 및 방향족 플루오로카본으로 이루어진 군으로부터 선택된다.
- 제 15 항에 있어서, 전구체가 하기 화학식을 가짐을 특징으로 하는 방법:Rn(SiO)mX(2m-n)상기 식에서,n은 0 내지 2m이고,m은 3 내지 10이고,X는 H 및 할로겐으로 이루어진 군으로부터 선택되며,R은 지방족, 올레핀계 및 방향족 탄화수소, 및 지방족, 올레핀계 및 방향족 플루오로카본으로 이루어진 군으로부터 선택된다.
- 제 15 항에 있어서, 전구체가 하기 화학식을 가짐을 특징으로 하는 방법:RnSi(NSi)mX(3m-n+4)상기 식에서,전구체는 선형 또는 분지형이고,n은 0 내지 (3m+4)이고,m은 1 내지 4이고,X는 H 및 할로겐으로 이루어진 군으로부터 선택되며,R은 지방족, 올레핀계 및 방향족 탄화수소, 및 지방족, 올레핀계 및 방향족 플루오로카본으로 이루어진 군으로부터 선택된다.
- 제 15 항에 있어서, 전구체가 하기 화학식을 가짐을 특징으로 하는 방법:Rn(SiN)mX(3m-n)상기 식에서,n은 0 내지 3m이고,m은 3 내지 10이고,X는 H 및 할로겐으로 이루어진 군으로부터 선택되며,R은 지방족, 올레핀계 및 방향족 탄화수소, 및 지방족, 올레핀계 및 방향족 플루오로카본으로 이루어진 군으로부터 선택된다.
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- 제 15 항에 있어서, 유기규소 전구체가 옥타메틸시클로테트라실록산(OMCTS), 헥사메틸시클로트리실록산, 헥사페닐시클로트리실록산, 옥타페닐시클로테트라실록산, 1,3,5-트리메틸-1,3,5-트리스-3,3,3-트리플루오로프로필시클로트리실록산, 불소 함유 시클로실록산 및 이들의 조합물로 이루어진 군으로부터 선택된 고리형 실록산임을 특징으로 하는 방법.
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CN1302254A (zh) | 2001-07-04 |
JP2002513203A (ja) | 2002-05-08 |
US20040033373A1 (en) | 2004-02-19 |
US7153580B2 (en) | 2006-12-26 |
CN1142059C (zh) | 2004-03-17 |
TW476705B (en) | 2002-02-21 |
US6068884A (en) | 2000-05-30 |
US20070092732A1 (en) | 2007-04-26 |
WO1999055526A1 (en) | 1999-11-04 |
KR20010043126A (ko) | 2001-05-25 |
EP1089874A1 (en) | 2001-04-11 |
HK1036954A1 (en) | 2002-01-25 |
US7901783B2 (en) | 2011-03-08 |
CA2330040A1 (en) | 1999-11-04 |
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