KR100374074B1 - 판독전용메모리셀장치와그의제조방법 - Google Patents

판독전용메모리셀장치와그의제조방법 Download PDF

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Publication number
KR100374074B1
KR100374074B1 KR1019970706662A KR19970706662A KR100374074B1 KR 100374074 B1 KR100374074 B1 KR 100374074B1 KR 1019970706662 A KR1019970706662 A KR 1019970706662A KR 19970706662 A KR19970706662 A KR 19970706662A KR 100374074 B1 KR100374074 B1 KR 100374074B1
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South Korea
Prior art keywords
trench
isolation
mask
memory cell
doped
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Expired - Fee Related
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KR1019970706662A
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English (en)
Korean (ko)
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KR19980703258A (ko
Inventor
프란츠 호프만
로타르 리슈
볼프강 크라우트슈나이더
볼프강 뢰스너
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지멘스 악티엔게젤샤프트
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices
    • H10B20/27—ROM only
    • H10B20/40—ROM only having the source region and drain region on different levels, e.g. vertical channel
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices

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  • Semiconductor Memories (AREA)
  • Element Separation (AREA)
  • Semiconductor Integrated Circuits (AREA)
KR1019970706662A 1995-04-21 1996-04-09 판독전용메모리셀장치와그의제조방법 Expired - Fee Related KR100374074B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19514834A DE19514834C1 (de) 1995-04-21 1995-04-21 Festwertspeicherzellenanordnung und Verfahren zu deren Herstellung
DE19514834.7 1995-04-21

Publications (2)

Publication Number Publication Date
KR19980703258A KR19980703258A (ko) 1998-10-15
KR100374074B1 true KR100374074B1 (ko) 2003-07-16

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Family Applications (1)

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KR1019970706662A Expired - Fee Related KR100374074B1 (ko) 1995-04-21 1996-04-09 판독전용메모리셀장치와그의제조방법

Country Status (9)

Country Link
US (1) US5920778A (enExample)
EP (1) EP0823131B1 (enExample)
JP (1) JPH11503876A (enExample)
KR (1) KR100374074B1 (enExample)
CN (1) CN1083621C (enExample)
AR (1) AR001660A1 (enExample)
DE (2) DE19514834C1 (enExample)
IN (1) IN187267B (enExample)
WO (1) WO1996033513A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101205118B1 (ko) * 2011-03-11 2012-11-26 에스케이하이닉스 주식회사 반도체 소자 및 그 제조 방법
US8576613B2 (en) 2010-06-08 2013-11-05 Samsung Electronics Co., Ltd. SRAM devices and methods of manufacturing the same
KR101474100B1 (ko) 2012-07-11 2014-12-17 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 수직형 파워 ｍｏｓ 트랜지스터를 갖는 집적 회로
US9620635B2 (en) 2012-07-11 2017-04-11 Taiwan Semiconductor Manufacturing Company, Ltd. Apparatus and method for power MOS transistor

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DE19604260C2 (de) * 1996-02-06 1998-04-30 Siemens Ag Festwert-Speicherzellenvorrichtung und ein Verfahren zu deren Herstellung
DE19617646C2 (de) * 1996-05-02 1998-07-09 Siemens Ag Speicherzellenanordnung und ein Verfahren zu deren Herstellung
DE19630050B4 (de) * 1996-07-25 2005-03-10 Infineon Technologies Ag Herstellverfahren für eine Lackmaske auf einem Substrat mit einem Graben
DE19640235C2 (de) 1996-09-30 2001-10-25 Infineon Technologies Ag Halbleiter-Festwertspeicher mit in Grabenseitenwänden vertikal verlaufenden Transistoren und Verfahren zu seiner Herstellung
DE19653107C2 (de) * 1996-12-19 1998-10-08 Siemens Ag Verfahren zur Herstellung einer Speicherzellenanordnung
DE19732871C2 (de) * 1997-07-30 1999-05-27 Siemens Ag Festwert-Speicherzellenanordnung, Ätzmaske für deren Programmierung und Verfahren zu deren Herstellung
DE19742403A1 (de) * 1997-09-25 1999-04-08 Siemens Ag Verfahren zur Herstellung einer Halbleiterstruktur
DE19742397C2 (de) * 1997-09-25 2000-07-06 Siemens Ag Verfahren zur Herstellung einer Halbleiterstruktur mit einer Mehrzahl von Gräben
DE19805712A1 (de) * 1998-02-12 1999-08-26 Siemens Ag Speicherzellenanordnung und entsprechendes Herstellungsverfahren
DE19807776A1 (de) * 1998-02-24 1999-09-02 Siemens Ag Halbleitervorrichtung und entsprechendes Herstellungsverfahren
DE19807920A1 (de) * 1998-02-25 1999-09-02 Siemens Ag Speicherzellenanordnung und entsprechendes Herstellungsverfahren
JP2002508594A (ja) * 1998-03-24 2002-03-19 インフィニオン テクノロジーズ アクチエンゲゼルシャフト メモリセル装置及びその製造方法
DE19843979C1 (de) * 1998-09-24 2000-03-02 Siemens Ag Speicherzellenanordnung mit ferroelektrischem oder dynamischen Speicherzellen und entsprechendes Herstellungsverfahren
TW456002B (en) * 1999-04-03 2001-09-21 Taiwan Semiconductor Mfg Manufacturing method of mask ROM
US6774439B2 (en) * 2000-02-17 2004-08-10 Kabushiki Kaisha Toshiba Semiconductor device using fuse/anti-fuse system
DE10009346B4 (de) * 2000-02-28 2011-06-16 Qimonda Ag Integrierte Schreib-/Leseschaltung zur Auswertung von zumindest einer Bitline in einem DRAM Speicher
JP4236848B2 (ja) * 2001-03-28 2009-03-11 セイコーインスツル株式会社 半導体集積回路装置の製造方法
DE10240916A1 (de) * 2002-09-04 2004-03-25 Infineon Technologies Ag Verfahren zur Herstellung eines Speicherzellenfeldes mit in Gräben angeordneten Speichertransistoren
FR2880191B1 (fr) * 2004-12-23 2007-03-16 St Microelectronics Sa Realisation de tranchees ou puits ayant des destinations differentes dans un substrat semiconducteur
KR100657823B1 (ko) * 2004-12-28 2006-12-14 주식회사 하이닉스반도체 리세스드 게이트를 구비한 반도체 소자 및 그의 제조 방법
KR101095772B1 (ko) * 2007-10-17 2011-12-21 주식회사 하이닉스반도체 반도체 소자의 제조방법
CN102683290A (zh) * 2011-03-08 2012-09-19 无锡华润上华半导体有限公司 Rom器件及其制造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2909197A1 (de) * 1978-03-20 1979-10-04 Texas Instruments Inc Verfahren zur herstellung eines festspeichers und festspeichermatrix
JPS5911671A (ja) * 1982-07-12 1984-01-21 Toshiba Corp 半導体記憶装置とその製造方法
JPS60136378A (ja) * 1983-12-26 1985-07-19 Hitachi Ltd 半導体装置およびその製造方法
JPS6135554A (ja) * 1984-07-28 1986-02-20 Nippon Telegr & Teleph Corp <Ntt> 読出し専用メモリ−およびその製造方法
US4954854A (en) * 1989-05-22 1990-09-04 International Business Machines Corporation Cross-point lightly-doped drain-source trench transistor and fabrication process therefor
JPH04354159A (ja) * 1991-05-31 1992-12-08 Mitsubishi Electric Corp 半導体装置およびその製造方法
DE4300806C1 (de) * 1993-01-14 1993-12-23 Siemens Ag Verfahren zur Herstellung von vertikalen MOS-Transistoren
DE4437581C2 (de) * 1994-10-20 1996-08-08 Siemens Ag Verfahren zur Herstellung einer Festwertspeicherzellenanordnung mit vertikalen MOS-Transistoren

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8576613B2 (en) 2010-06-08 2013-11-05 Samsung Electronics Co., Ltd. SRAM devices and methods of manufacturing the same
US8750027B2 (en) 2010-06-08 2014-06-10 Samsung Electronics Co., Ltd. SRAM devices and methods of manufacturing the same
KR101205118B1 (ko) * 2011-03-11 2012-11-26 에스케이하이닉스 주식회사 반도체 소자 및 그 제조 방법
US8445350B2 (en) 2011-03-11 2013-05-21 Hynix Semiconductor, Inc. Semiconductor device and method of manufacturing the same
US9553029B2 (en) 2012-07-11 2017-01-24 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuit having a vertical power MOS transistor
US9130060B2 (en) 2012-07-11 2015-09-08 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuit having a vertical power MOS transistor
KR101474100B1 (ko) 2012-07-11 2014-12-17 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 수직형 파워 ｍｏｓ 트랜지스터를 갖는 집적 회로
US9620635B2 (en) 2012-07-11 2017-04-11 Taiwan Semiconductor Manufacturing Company, Ltd. Apparatus and method for power MOS transistor
US9825035B2 (en) 2012-07-11 2017-11-21 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuit having a vertical power MOS transistor
US10164085B2 (en) 2012-07-11 2018-12-25 Taiwan Semiconductor Manufacturing Company, Ltd. Apparatus and method for power MOS transistor
US10304829B2 (en) 2012-07-11 2019-05-28 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuit having a vertical power MOS transistor
US10686065B2 (en) 2012-07-11 2020-06-16 Taiwan Semiconductor Manufacturing Company, Ltd. Apparatus and method for power MOS transistor
US10840246B2 (en) 2012-07-11 2020-11-17 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuit having a vertical power MOS transistor
US11031495B2 (en) 2012-07-11 2021-06-08 Taiwan Semiconductor Manufacturing Company, Ltd. Apparatus and method for power MOS transistor
US11424244B2 (en) 2012-07-11 2022-08-23 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuit having a vertical power MOS transistor

Also Published As

Publication number Publication date
CN1083621C (zh) 2002-04-24
DE59602880D1 (de) 1999-09-30
EP0823131A1 (de) 1998-02-11
WO1996033513A1 (de) 1996-10-24
KR19980703258A (ko) 1998-10-15
US5920778A (en) 1999-07-06
IN187267B (enExample) 2002-03-16
EP0823131B1 (de) 1999-08-25
CN1182500A (zh) 1998-05-20
AR001660A1 (es) 1997-11-26
DE19514834C1 (de) 1997-01-09
JPH11503876A (ja) 1999-03-30

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