JP6871253B2 - 表示装置の作製方法 - Google Patents
表示装置の作製方法 Download PDFInfo
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- JP6871253B2 JP6871253B2 JP2018532846A JP2018532846A JP6871253B2 JP 6871253 B2 JP6871253 B2 JP 6871253B2 JP 2018532846 A JP2018532846 A JP 2018532846A JP 2018532846 A JP2018532846 A JP 2018532846A JP 6871253 B2 JP6871253 B2 JP 6871253B2
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- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
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- 229910052756 noble gas Inorganic materials 0.000 description 1
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- 229910052698 phosphorus Inorganic materials 0.000 description 1
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- 230000036211 photosensitivity Effects 0.000 description 1
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Images
Classifications
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133382—Heating or cooling of liquid crystal cells other than for activation, e.g. circuits or arrangements for temperature control, stabilisation or uniform distribution over the cell
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/1333—Constructional arrangements; Manufacturing methods
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- G02F1/133553—Reflecting elements
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- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/1333—Constructional arrangements; Manufacturing methods
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
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- G02F1/136286—Wiring, e.g. gate line, drain line
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
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- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/46—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character is selected from a number of characters arranged one behind the other
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1251—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs comprising TFTs having a different architecture, e.g. top- and bottom gate TFTs
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/02—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/1336—Illuminating devices
- G02F1/133602—Direct backlight
- G02F1/133603—Direct backlight with LEDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/1336—Illuminating devices
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- G02F1/133612—Electrical details
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/44—Arrangements combining different electro-active layers, e.g. electrochromic, liquid crystal or electroluminescent layers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/09—Function characteristic transflective
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Theoretical Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Electroluminescent Light Sources (AREA)
- Liquid Crystal (AREA)
Description
本実施の形態では、本発明の一態様の表示装置について図1〜図23を用いて説明する。
図2は、表示装置300の斜視概略図である。表示装置300は、基板351と基板361とが貼り合わされた構成を有する。図2では、基板361を破線で明示している。
図4に示す表示装置300Aは、トランジスタ201、トランジスタ203、トランジスタ205、及びトランジスタ206を有さず、トランジスタ281、トランジスタ284、トランジスタ285、及びトランジスタ286を有する点で、主に表示装置300と異なる。
図5(A)に表示装置300Bの表示部の断面図を示す。
図5(B)に示す表示装置300Cは、EL層192が塗り分けられており、かつ着色層134を有さない点で、表示装置300Bと異なる。その他の構成については、表示装置300Bと同様のため、詳細な説明を省略する。
以下では、図3に示す表示装置300の作製方法の一例について説明する。図7〜図23では特に表示装置300の表示部362及び外部接続部に着目して、作製方法を説明する。
本実施の形態では、本発明の一態様により作製することができる表示装置について図24〜図27を用いて説明する。
本実施の形態では、実施の形態1で説明した表示装置の、より具体的な構成例について図28〜図30を用いて説明する。
本実施の形態では、本発明の一態様で開示されるトランジスタに用いることができるCAC(Cloud−Aligned Composite)−OSの構成について説明する。
本実施の形態では、本発明の一態様の表示モジュール及び電子機器について説明する。
C1 容量素子
C2 容量素子
CSCOM 配線
G1 配線
G2 配線
G3 配線
GD 回路
S1 配線
S2 配線
S3 配線
SD 回路
SW1 スイッチ
SW2 スイッチ
VCOM1 配線
VCOM2 配線
10 表示装置
14 表示部
21 発光
22 反射光
30 画素ユニット
31B 第1の表示素子
31G 第1の表示素子
31p 画素
31R 第1の表示素子
31W 第1の表示素子
32B 第2の表示素子
32G 第2の表示素子
32p 画素
32R 第2の表示素子
32W 第2の表示素子
32Y 第2の表示素子
35r 光
35t 光
35tr 光
41 トランジスタ
42 トランジスタ
61 作製基板
62 樹脂層
62a 樹脂層
62b 樹脂層
62n 樹脂層
62m 樹脂層
62p 樹脂層
63 絶縁層
110a トランジスタ
110b トランジスタ
110c トランジスタ
110d トランジスタ
110e トランジスタ
110f トランジスタ
110g トランジスタ
110h トランジスタ
112 液晶
113 電極
117 絶縁層
121 絶縁層
131 着色層
132 遮光層
133a 配向膜
133b 配向膜
134 着色層
135 偏光板
141 接着層
142 接着層
151 絶縁層
170 発光素子
180 液晶素子
191 電極
192 EL層
193 電極
194 絶縁層
201 トランジスタ
203 トランジスタ
204 接続部
205 トランジスタ
206 トランジスタ
207 接続部
211 絶縁層
212 絶縁層
213 絶縁層
214 絶縁層
216 絶縁層
217 絶縁層
218 絶縁層
220 絶縁層
221 導電層
221a 導電層
221b 導電層
221c 導電層
221d 導電層
222a 導電層
222b 導電層
223 導電層
231 半導体層
235 導電層
242 接続層
243 接続体
252 接続部
261 半導体層
263a 導電層
263b 導電層
281 トランジスタ
284 トランジスタ
285 トランジスタ
286 トランジスタ
300 表示装置
300A 表示装置
300B 表示装置
300C 表示装置
311 電極
311a 電極
311b 電極
311c 導電層
311d 導電層
311e 導電層
311f 導電層
340 液晶素子
351 基板
360 発光素子
360b 発光素子
360g 発光素子
360r 発光素子
360w 発光素子
361 基板
362 表示部
364 回路
365 配線
372 FPC
373 IC
400 表示装置
410 画素
451 開口
800 携帯情報端末
801 筐体
802 筐体
803 表示部
804 表示部
805 ヒンジ部
810 携帯情報端末
811 筐体
812 表示部
813 操作ボタン
814 外部接続ポート
815 スピーカ
816 マイク
817 カメラ
820 カメラ
821 筐体
822 表示部
823 操作ボタン
824 シャッターボタン
826 レンズ
8000 表示モジュール
8001 上部カバー
8002 下部カバー
8003 FPC
8004 タッチパネル
8005 FPC
8006 表示パネル
8009 フレーム
8010 プリント基板
8011 バッテリ
9000 筐体
9001 表示部
9003 スピーカ
9005 操作キー
9006 接続端子
9007 センサ
9008 マイクロフォン
9055 ヒンジ
9200 携帯情報端末
9201 携帯情報端末
9202 携帯情報端末
Claims (5)
- 基板上に樹脂または樹脂前駆体を含む材料を用いて第1の層を形成する工程と、
前記第1の層に対して酸素を含むガスを流しながら第1の加熱処理を行う工程と、
前記第1の加熱処理を行った第1の層に、第1の領域と、前記第1の領域よりも厚さの薄い第2の領域を形成し、第1の領域と、前記第1の領域よりも厚さの薄い第2の領域を有する第1の樹脂層を形成する工程と、
前記第1の樹脂層上に表示素子を含む被剥離層を形成する工程と、
前記被剥離層と前記基板とを分離する工程とを有し、
前記被剥離層を形成する工程に、前記第1の樹脂層上の前記第2の領域に重なる位置に導電層を形成する工程を含み、
前記被剥離層と前記基板とを分離する工程の後、前記第1の樹脂層を除去して前記導電層を露出させる工程を有する表示装置の作製方法。 - 基板上に樹脂または樹脂前駆体を含む材料を用いて第1の層を形成する工程と、
前記第1の層に対して酸素を含むガスを流しながら第1の加熱処理を行う工程と、
前記第1の加熱処理を行った第1の層に、第1の領域と、前記第1の領域よりも厚さの薄い第2の領域を形成し、第1の領域と、前記第1の領域よりも厚さの薄い第2の領域を有する第1の樹脂層を形成する工程と、
前記基板上及び前記第1の樹脂層上に、前記第1の樹脂層の端部を覆う絶縁層を形成する工程と、
前記絶縁層上に表示素子を含む被剥離層を形成する工程と、
前記第1の樹脂層の少なくとも一部を前記基板から分離することで、分離の起点を形成し、前記被剥離層と前記基板とを分離する工程とを有し、
前記被剥離層を形成する工程に、前記第1の樹脂層上の前記第2の領域に重なる位置に導電層を形成する工程を含み、
前記被剥離層と前記基板とを分離する工程の後、前記第1の樹脂層を除去して前記導電層を露出させる工程を有する表示装置の作製方法。 - 基板上に樹脂または樹脂前駆体を含む材料を用いて第1の層を形成する工程と、
前記第1の層に対して酸素を含むガスを流しながら第1の加熱処理を行う工程と、
前記第1の加熱処理を行った第1の層に、第1の領域と、前記第1の領域よりも厚さの薄い第2の領域を形成し、第1の領域と、前記第1の領域よりも厚さの薄い第2の領域を有する第1の樹脂層を形成する工程と、
前記基板上及び前記第1の樹脂層上に、前記第1の樹脂層の端部を覆う第2の層を形成する工程と、
前記第2の層に対して、前記第1の加熱処理の雰囲気よりも酸素の少ない雰囲気下で第2の加熱処理を行うことで、前記第1の樹脂層の端部を覆う第2の樹脂層を形成する工程と、
前記第2の樹脂層上に表示素子を含む被剥離層を形成する工程と、
前記第1の樹脂層の少なくとも一部を前記基板から分離することで、分離の起点を形成し、前記被剥離層と前記基板とを分離する工程とを有し、
前記被剥離層を形成する工程に、前記第1の樹脂層上の前記第2の領域に重なる位置に導電層を形成する工程を含み、
前記被剥離層と前記基板とを分離する工程の後、前記第1の樹脂層を除去して前記導電層を露出させる工程を有する表示装置の作製方法。 - 第1の表示素子、第2の表示素子、第1の絶縁層および導電層を有する表示装置の作製方法であり、
前記第1の表示素子は、可視光を反射する機能を有する第1の画素電極、液晶、及び可視光を透過する機能を有する第1の共通電極を有し、
前記第2の表示素子は、可視光を透過する機能を有する第2の画素電極、発光層、及び可視光を反射する機能を有する第2の共通電極を有し、
第1の基板上に、前記第1の共通電極を形成する工程と、
作製基板上に樹脂または樹脂前駆体を含む材料を用いて、第1の領域と、前記第1の領域よりも厚さの薄い第2の領域を有する樹脂層を形成する工程と、
前記樹脂層上に前記第1の画素電極を形成する工程と、
前記第1の画素電極を形成する工程と同時に、前記第2の領域を覆って前記導電層を形成する工程と、
前記第1の画素電極上に、前記第1の絶縁層を形成する工程と、
前記第1の絶縁層上に、前記第2の画素電極、前記発光層、及び前記第2の共通電極をこの順で形成することで、前記第2の表示素子を形成する工程と、
前記作製基板と第2の基板とを接着層を用いて貼り合わせる工程と、
前記作製基板と前記第1の画素電極とを分離する工程と、
前記第1の共通電極と前記第1の画素電極との間に前記液晶を配置し、接着層を用いて、前記第1の基板と前記第2の基板とを貼り合わせることで、前記第1の表示素子を形成する工程と、と有し、
前記樹脂層は酸素を含む雰囲気での第1の加熱処理工程を経て形成された層である表示装置の作製方法。 - 第1の表示素子、第2の表示素子、第1の絶縁層および導電層を有する表示装置の作製方法であり、
前記第1の表示素子は、可視光を反射する機能を有する第1の画素電極、液晶、及び可視光を透過する機能を有する第1の共通電極を有し、
前記第2の表示素子は、可視光を透過する機能を有する第2の画素電極、発光層、及び可視光を反射する機能を有する第2の共通電極を有し、
第1の基板上に、前記第1の共通電極を形成する工程と、
作製基板上に樹脂または樹脂前駆体を含む材料を用いて、第1の領域と、前記第1の領域よりも厚さの薄い第2の領域を有する樹脂層を形成する工程と、
前記樹脂層の端部を覆って第2の絶縁層を形成する工程と、
前記第2の絶縁層上に前記第1の画素電極を形成する工程と、
前記第1の画素電極を形成する工程と同時に、前記第2の領域を覆って前記導電層を形成する工程と、
前記第1の画素電極上に、前記第1の絶縁層を形成する工程と、
前記第1の絶縁層上に、前記第2の画素電極、前記発光層、及び前記第2の共通電極をこの順で形成することで、前記第2の表示素子を形成する工程と、
前記作製基板と第2の基板とを接着層を用いて貼り合わせる工程と、
前記樹脂層の少なくとも一部を前記作製基板から分離することで分離の起点を形成し、前記作製基板と前記第1の画素電極とを分離する工程と、
前記第1の共通電極と前記第1の画素電極との間に前記液晶を配置し、接着層を用いて、前記第1の基板と前記第2の基板とを貼り合わせることで、前記第1の表示素子を形成する工程と、と有し、
前記樹脂層は酸素を含む雰囲気での第1の加熱処理工程を経て形成された層である表示装置の作製方法。
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KR20190032589A (ko) | 2019-03-27 |
TWI730017B (zh) | 2021-06-11 |
JP2018025801A (ja) | 2018-02-15 |
US20210026188A1 (en) | 2021-01-28 |
US11054687B2 (en) | 2021-07-06 |
KR102332962B1 (ko) | 2021-11-29 |
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