JP6758112B2 - サセプタ、基板処理装置 - Google Patents
サセプタ、基板処理装置 Download PDFInfo
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- JP6758112B2 JP6758112B2 JP2016137240A JP2016137240A JP6758112B2 JP 6758112 B2 JP6758112 B2 JP 6758112B2 JP 2016137240 A JP2016137240 A JP 2016137240A JP 2016137240 A JP2016137240 A JP 2016137240A JP 6758112 B2 JP6758112 B2 JP 6758112B2
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- plate
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- 229910052782 aluminium Inorganic materials 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical group Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 3
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
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- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
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Description
図1は、本発明の実施の形態1に係る基板処理装置10の断面図である。基板処理装置10は、例えば基板に対しPEALD(Plasma Enhanced Atomic Layer Deposition)を施す成膜装置として構成されている。基板処理装置10はチャンバ(Reactor Chamber)12を備えている。チャンバ12内にはRF電力が印加されるRF電極14が設けられている。RF電極14にはスリット14aが形成されている。
図6は、実施の形態2に係るサセプタの平面図である。板状部16の一部として第3部分16cが形成されている。第3部分16cは平面視で第2部分16bを囲む。第3部分16cには、第3部分16cを加熱する第3ヒータ80が埋め込まれている。第3ヒータ80は破線で示されている。第1ヒータ50、第2ヒータ52及び第3ヒータ80は同心円状に設けられている。
図7は、実施の形態3に係る基板処理装置の平面図である。チャンバ12については内部が見えるように側壁だけを示している。チャンバ12はサセプタを収容している。図7には板状部16が表されている。チャンバ12内を真空にするとともに、チャンバ12内に供給された材料ガスを排気するために、チャンバ12の側面にガス排気部40が取り付けられている。基板をチャンバ12に出し入れするために、チャンバ12の側面にゲートバルブ102が取り付けられている。ゲートバルブ102にはウエハハンドリングチャンバ104が接続されている。
図8は、実施の形態4に係る基板処理装置の平面図である。第1部分16a、第2部分16b、断熱部16A及び外側断熱部16Bについては、実施の形態2(図6)の板状部16と同様である。本発明の実施の形態4では、実施の形態2における第3部分16cを4つに分割した。つまり、図8に示すように、板状部16の一部として4つの第3部分16h、16i、16j、16kを設けた。4つの第3部分16h、16i、16j、16kは、全体として平面視で第2部分16bを囲む。第3部分16hはガス排気部40に対向している。第3部分16jはゲートバルブ102に対向している。
図9は、実施の形態5に係るサセプタ等の断面図である。このサセプタは、実施の形態2(図6)のサセプタと類似している。しかし、断熱部16A及び外側断熱部16Bにより形成される溝16A’、16B’の幅が実施の形態2より大きい。そして、第1部分16aの上に第1閉塞部160が設けられている。第1閉塞部160は、第2部分16bと接触せず、溝部の溝16A’の一部を塞ぐ。第1閉塞部160を平面視したときの形状(平面形状)は円形である。第2部分16bの上に第2閉塞部162が設けられている。第2閉塞部162は第1部分16a及び第1閉塞部160と接触せず、溝部の溝16A’の一部、及び溝16B’の一部を塞ぐ。第2閉塞部162の平面形状は第1閉塞部160を囲む環状となっている。
図10は、実施の形態6に係るサセプタの断面図である。第1部分16a、第2部分16b、及び第3部分16cは別部品である。言い換えれば、第3部分16cは第2部分16bから取り外すことができ、第2部分16bは第1部分16aから取り外すことができる。第2部分16bと第3部分16cは平面視で環状の部品である。第1部分16aの側面には凸部160が設けられ、第2部分16bはこの凸部160の上にのせられている。第2部分16bの側面には凸部162が設けられ、第3部分16cはこの凸部162の上にのせられている。
図11は、実施の形態7に係るサセプタ等の断面図である。このサセプタは、板状部16に取り付けられた冷却部材200と、滑動シャフト18に取り付けられた冷却部材202を備える。冷却部材200、202は、周知の冷却方法であれば特に限定されない。冷却部材200は、板状部16の溝部(断熱部16Aと外側断熱部16B)の直下に取り付けられている。冷却部材200、202による冷却の程度は、ヒータコントローラにより制御される。
図12は、実施の形態8に係るサセプタの断面図である。実施の形態1−7では、板状部の第1部分と第2部分を断熱する断熱部として、板状部の上面側に溝部を設けた。しかし、実施の形態8における断熱部は、板状部16の中に設けられた冷却装置210である。冷却装置210による冷却の程度はヒータコントローラにより制御される。冷却装置210を稼動させるとともに、第1ヒータ50と第2ヒータ52を稼動させる。そうすると、冷却装置210の冷却により、第1部分16aと第2部分16bが断熱される。特に、板状部16の上面側において、第1部分16aと第2部分16bを断熱することが好ましい。第1部分16aと第2部分16bを断熱することで、溝を設けることなく、基板に明確な温度差をつけることができる。なお、ここまでで説明した各実施の形態は適宜に組み合わせて用いてもよい。
図13は、実施の形態9に係るサセプタの断面図である。第1部分16aと第2部分16bを断熱する断熱部として、板状部16の上面側に設けられた溝部16Aと、板状部16のうち溝部16Aの溝16’の直下の部分を冷却する冷却装置90が設けられている。冷却装置90は2系統の冷媒路91、92を有している。冷媒路91、92には別々の冷媒が流れる。冷媒の温度は特に限定されないが例えば20℃程度である。
図23は、実施の形態10に係るサセプタの断面図である。実施の形態9では、冷却装置90の第2冷媒路91c、92cを溝16A’の直下の板状部16に埋め込んだ。これに対し、実施の形態10では、冷却装置の第2冷媒路95cは、板状部16のうち、溝16A’の直下を挟む位置に埋め込まれている。垂直冷媒路95aから第1冷媒路95bに進んだ冷媒は、第2冷媒路95cにより板状部16の中を2周する。
図25は、実施の形態11に係るサセプタの断面図である。板状部16の溝16A’の下の部分を冷却する2周分設けられた第2冷媒路96cと、板状部16の溝16B’の下の部分を冷却する2周分設けられた第2冷媒路96cとが設けられている。
図26は、実施の形態12に係るサセプタの平面図である。断熱部190は、第1部分16aと第2部分16bの間に設けられている。断熱部190は、第1部分16a及び第2部分16bよりも熱伝導率の低い部分である。
Claims (16)
- 板状部と、
前記板状部の第1部分を加熱する第1ヒータと、
前記板状部の第2部分を加熱する第2ヒータと、
前記板状部の上面側において、前記第1部分と前記第2部分を断熱する、前記板状部の前記上面側に設けられた溝部である断熱部と、
前記第1部分の上に設けられ、前記第2部分と接触せず、前記溝部の溝の一部を塞ぐ、第1閉塞部と、
前記第2部分の上に設けられ、前記第1部分及び前記第1閉塞部と接触せず、前記溝部の溝の一部を塞ぐ、第2閉塞部と、を備えたことを特徴とするサセプタ。 - 板状部と、
前記板状部の第1部分を加熱する第1ヒータと、
前記板状部の第2部分を加熱する第2ヒータと、
前記板状部の上面側において、前記第1部分と前記第2部分を断熱する、前記板状部の前記上面側に設けられた溝部である断熱部と、を備え、
前記第1部分と前記第2部分は別部品であり、
前記第1部分の側面には凸部が設けられ、前記第2部分は、前記凸部の上にのせられ、
前記溝部は、前記第1部分の側面と、前記凸部の上面と、前記第2部分の側面で構成されることを特徴とするサセプタ。 - 前記第2部分は平面視で前記第1部分を囲むことを特徴とする請求項1又は2に記載のサセプタ。
- 前記板状部の一部として形成された、平面視で前記第2部分を囲む第3部分と、
前記第3部分を加熱する第3ヒータと、
前記板状部の前記上面側において、前記第2部分と前記第3部分を断熱する外側断熱部と、を備えたことを特徴とする請求項3に記載のサセプタ。 - 前記板状部の一部として形成された、全体として平面視で前記第2部分を囲む複数の第3部分と、
前記複数の第3部分に1つずつ設けられた複数の第3ヒータと、
前記板状部の前記上面側において、前記第2部分と前記複数の第3部分を断熱する外側断熱部と、
前記板状部の前記上面側において、前記複数の第3部分間を断熱する外縁側断熱部と、を備えたことを特徴とする請求項3に記載のサセプタ。 - 前記板状部に取り付けられた冷却部材を備えたことを特徴とする請求項1〜5のいずれか1項に記載のサセプタ。
- 前記板状部に取り付けられた冷却部材を備え、
前記冷却部材は、前記板状部の前記溝部の直下に取り付けられたことを特徴とする請求項1又は2に記載のサセプタ。 - 静電チャックを備えたことを特徴とする請求項1〜7のいずれか1項に記載のサセプタ。
- 板状部と、
前記板状部の第1部分を加熱する第1ヒータと、
前記板状部の第2部分を加熱する第2ヒータと、
前記板状部の上面側において、前記第1部分と前記第2部分を断熱する断熱部と、を備え、
前記断熱部は、前記板状部の中に設けられた冷却装置であることを特徴とするサセプタ。 - 板状部と、
前記板状部の第1部分を加熱する第1ヒータと、
前記板状部の第2部分を加熱する第2ヒータと、
前記板状部の上面側において、前記第1部分と前記第2部分を断熱する断熱部と、を備え
前記断熱部は、前記板状部の前記上面側に設けられた溝部と、前記板状部のうち前記溝部の溝の直下の部分を冷却する冷却装置と、を備えたことを特徴とするサセプタ。 - 前記冷却装置は、前記溝の直下の前記板状部に埋め込まれたことを特徴とする請求項10に記載のサセプタ。
- 前記冷却装置は、前記板状部のうち、前記溝の直下を挟む位置に埋め込まれたことを特徴とする請求項10に記載のサセプタ。
- 前記冷却装置は冷媒が流れる冷媒路を有し、
前記冷媒路は、前記第1部分を通る第1冷媒路と、前記第1冷媒路につながり前記板状部のうち前記溝の直下部分を通る第2冷媒路と、を有し、
前記第1冷媒路には、前記冷媒と前記板状部の間の熱伝達を妨げる熱伝達抑制部が設けられ、
前記第2冷媒路では、前記冷媒と前記板状部が接することを特徴とする請求項10に記載のサセプタ。 - 前記溝部は平面視で環状に設けられ、
前記第1冷媒路と前記第2冷媒路を少なくとも2組有し、
前記第1冷媒路から前記第2冷媒路に冷媒が入り込む位置は、前記溝部に沿って略等間隔に設けられたことを特徴とする請求項13に記載のサセプタ。 - 板状部と、前記板状部の第1部分を加熱する第1ヒータと、前記板状部の第2部分を加熱する第2ヒータと、前記板状部の上面側において、前記第1部分と前記第2部分を断熱する断熱部と、を有したサセプタと、
前記サセプタを収容するチャンバと、
前記チャンバの側面に取り付けられたガス排気部と、を備え、
前記第1部分は、前記板状部の外縁を含む部分であり、
前記第2部分は、前記板状部の外縁を含む部分であり、
平面視で、前記サセプタのうち前記第1部分だけが前記ガス排気部と対向することを特徴とする基板処理装置。 - 板状部と、前記板状部の第1部分を加熱する第1ヒータと、前記板状部の第2部分を加熱する第2ヒータと、前記板状部の上面側において、前記第1部分と前記第2部分を断熱する断熱部と、を有したサセプタと、
前記サセプタを収容するチャンバと、
前記チャンバの側面に取り付けられたゲートバルブと、を備え、
前記第1部分は、前記板状部の外縁を含む部分であり、
前記第2部分は、前記板状部の外縁を含む部分であり、
平面視で、前記サセプタのうち前記第2部分だけが前記ゲートバルブと対向することを特徴とする基板処理装置。
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US20170051406A1 (en) | 2017-02-23 |
JP2017041628A (ja) | 2017-02-23 |
TW201718928A (zh) | 2017-06-01 |
KR102617065B1 (ko) | 2023-12-26 |
CN106469666B (zh) | 2021-08-13 |
CN113555270A (zh) | 2021-10-26 |
US20210087680A1 (en) | 2021-03-25 |
TWI725979B (zh) | 2021-05-01 |
US20170051402A1 (en) | 2017-02-23 |
CN106469666A (zh) | 2017-03-01 |
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