JP6655531B2 - 室温および高温の両方におけるホルダー内のプレートのセンタリング - Google Patents

室温および高温の両方におけるホルダー内のプレートのセンタリング Download PDF

Info

Publication number
JP6655531B2
JP6655531B2 JP2016506806A JP2016506806A JP6655531B2 JP 6655531 B2 JP6655531 B2 JP 6655531B2 JP 2016506806 A JP2016506806 A JP 2016506806A JP 2016506806 A JP2016506806 A JP 2016506806A JP 6655531 B2 JP6655531 B2 JP 6655531B2
Authority
JP
Japan
Prior art keywords
plate
holder
recess
edge
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016506806A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016514771A (ja
JP2016514771A5 (enExample
Inventor
イェルク ケルシュバウマー
イェルク ケルシュバウマー
Original Assignee
エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン
エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン, エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン filed Critical エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン
Publication of JP2016514771A publication Critical patent/JP2016514771A/ja
Publication of JP2016514771A5 publication Critical patent/JP2016514771A5/ja
Application granted granted Critical
Publication of JP6655531B2 publication Critical patent/JP6655531B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3417—Arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3423—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3438—Electrodes other than cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3464—Operating strategies
    • H01J37/3467—Pulsed operation, e.g. HIPIMS
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3488—Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus
    • H01J37/3497—Temperature of target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Telescopes (AREA)
  • Magnetic Resonance Imaging Apparatus (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Packaging For Recording Disks (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Nozzles (AREA)
JP2016506806A 2013-04-08 2014-04-07 室温および高温の両方におけるホルダー内のプレートのセンタリング Active JP6655531B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361809524P 2013-04-08 2013-04-08
US61/809,524 2013-04-08
PCT/EP2014/000928 WO2014166621A1 (de) 2013-04-08 2014-04-07 Zentrierung einer platte in einer halterung sowohl bei raum- als auch bei höheren temperaturen

Publications (3)

Publication Number Publication Date
JP2016514771A JP2016514771A (ja) 2016-05-23
JP2016514771A5 JP2016514771A5 (enExample) 2018-05-31
JP6655531B2 true JP6655531B2 (ja) 2020-02-26

Family

ID=50486885

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2016506806A Active JP6655531B2 (ja) 2013-04-08 2014-04-07 室温および高温の両方におけるホルダー内のプレートのセンタリング
JP2016506805A Active JP6360884B2 (ja) 2013-04-08 2014-04-07 増加した電力適合性を有するスパッタリングターゲット

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2016506805A Active JP6360884B2 (ja) 2013-04-08 2014-04-07 増加した電力適合性を有するスパッタリングターゲット

Country Status (21)

Country Link
US (2) US9564300B2 (enExample)
EP (2) EP2984673B1 (enExample)
JP (2) JP6655531B2 (enExample)
KR (2) KR102234454B1 (enExample)
CN (2) CN105210169B (enExample)
AR (2) AR096021A1 (enExample)
BR (2) BR112015025747A2 (enExample)
CA (2) CA2908892C (enExample)
ES (1) ES2675332T3 (enExample)
HK (1) HK1214403A1 (enExample)
HU (1) HUE038784T2 (enExample)
IL (2) IL241979B (enExample)
MX (2) MX350171B (enExample)
MY (2) MY178843A (enExample)
PH (2) PH12015502328B1 (enExample)
PL (1) PL2984674T3 (enExample)
RU (2) RU2665058C2 (enExample)
SG (3) SG11201508324VA (enExample)
TR (1) TR201809526T4 (enExample)
TW (2) TW201443258A (enExample)
WO (2) WO2014166621A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10435784B2 (en) 2016-08-10 2019-10-08 Applied Materials, Inc. Thermally optimized rings
US11158491B2 (en) 2017-06-01 2021-10-26 Oerlikon Surface Solutions Ag, Pfäffikon Target assembly for safe and economic evaporation of brittle materials
CN108130516A (zh) * 2018-01-03 2018-06-08 梧州三和新材料科技有限公司 一种使用泡沫金属增强冷却的真空镀阴极靶
US11600517B2 (en) * 2018-08-17 2023-03-07 Taiwan Semiconductor Manufacturing Co., Ltd. Screwless semiconductor processing chambers
CN110838458B (zh) 2018-08-17 2022-08-09 台湾积体电路制造股份有限公司 半导体制程系统以及方法
MX2021007531A (es) * 2018-12-20 2021-08-05 Oerlikon Surface Solutions Ag Pfaeffikon Dispositivo de ignicion de arco catodico.
CN110066980A (zh) * 2019-05-31 2019-07-30 德淮半导体有限公司 环状靶材部件、半导体工艺设备及其工作方法
KR20220116492A (ko) * 2019-12-13 2022-08-23 에바텍 아크티엔게젤샤프트 Pvd-소스용 가스 링

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724890Y2 (enExample) * 1979-10-31 1982-05-29
EP0393344A1 (de) * 1989-04-20 1990-10-24 Balzers Aktiengesellschaft Haltevorrichtung für Targets von Zerstäubungsquellen und Verfahren zum Festhalten eines Targets in einer Halterung
DE4015388C2 (de) * 1990-05-14 1997-07-17 Leybold Ag Kathodenzerstäubungsvorrichtung
CA2098725A1 (en) * 1991-01-28 1992-07-29 Daniel R. Marx Target for cathode sputtering
DE9102052U1 (de) * 1991-02-21 1991-06-13 Hauzer Holding B.V., Venlo Indirekt gekühlter Verdampfer mit Schnellwechselsystem
JP3030921B2 (ja) * 1991-05-01 2000-04-10 日新電機株式会社 イオン源の引出し電極装置
US5269894A (en) * 1991-05-08 1993-12-14 Balzers Aktiengesellschaft Method of mounting a target plate to be cooled into a vacuum process chamber, an arrangement of a target plate, a target plate and a vacuum chamber
DE4133564C2 (de) * 1991-10-10 1999-11-18 Leybold Ag Vorrichtung zur lösbaren Befestigung eines Targets oder Targetgrundkörpers auf der Kathodenhalterung
RU2037559C1 (ru) * 1992-08-10 1995-06-19 Волин Эрнст Михайлович Способ нанесения покрытий на изделия методом ионного распыления и устройство для его осуществления
GB2318590B (en) * 1995-07-10 1999-04-14 Cvc Products Inc Magnetron cathode apparatus and method for sputtering
DE19535894A1 (de) * 1995-09-27 1997-04-03 Leybold Materials Gmbh Target für die Sputterkathode einer Vakuumbeschichtungsanlage und Verfahren zu seiner Herstellung
US6217832B1 (en) * 1998-04-30 2001-04-17 Catalytica, Inc. Support structures for a catalyst
JP4251713B2 (ja) * 1999-05-21 2009-04-08 株式会社アルバック スパッタ装置
US6589352B1 (en) * 1999-12-10 2003-07-08 Applied Materials, Inc. Self aligning non contact shadow ring process kit
JP4101524B2 (ja) * 2002-02-05 2008-06-18 芝浦メカトロニクス株式会社 成膜装置
JP2010116605A (ja) 2008-11-13 2010-05-27 Fujikura Ltd ターゲット保持装置、ならびにこれを用いた成膜装置および成膜方法
JP2011165964A (ja) * 2010-02-10 2011-08-25 Hitachi Kokusai Electric Inc 半導体装置の製造方法
DE102012006717A1 (de) 2012-04-04 2013-10-10 Oerlikon Trading Ag, Trübbach An eine indirekte Kühlvorrichtung angepasstes Target

Also Published As

Publication number Publication date
RU2665058C2 (ru) 2018-08-28
MY178843A (en) 2020-10-20
AR096021A1 (es) 2015-12-02
CN105210169B (zh) 2017-04-19
US9536714B2 (en) 2017-01-03
KR20150139556A (ko) 2015-12-11
MX350172B (es) 2017-08-28
SG10201708186QA (en) 2017-11-29
MX350171B (es) 2017-08-28
CN105324830B (zh) 2017-08-01
PL2984674T3 (pl) 2018-10-31
TR201809526T4 (tr) 2018-07-23
BR112015025749A2 (pt) 2017-07-18
EP2984674A1 (de) 2016-02-17
RU2015147497A (ru) 2017-05-16
CA2908897A1 (en) 2014-10-16
CA2908897C (en) 2023-03-14
JP2016514771A (ja) 2016-05-23
JP2016519719A (ja) 2016-07-07
KR102190319B1 (ko) 2020-12-14
CA2908892C (en) 2021-08-24
US20160071706A1 (en) 2016-03-10
HUE038784T2 (hu) 2018-11-28
HK1214403A1 (zh) 2016-07-22
WO2014166621A1 (de) 2014-10-16
CN105210169A (zh) 2015-12-30
PH12015502338B1 (en) 2016-02-22
TW201443263A (zh) 2014-11-16
CA2908892A1 (en) 2014-10-16
IL241979B (en) 2020-07-30
ES2675332T3 (es) 2018-07-10
SG11201508311VA (en) 2015-11-27
EP2984673B1 (de) 2020-03-11
AR099253A1 (es) 2016-07-13
KR20150139555A (ko) 2015-12-11
MX2015014210A (es) 2016-05-05
SG11201508324VA (en) 2015-11-27
EP2984673A1 (de) 2016-02-17
WO2014166620A1 (de) 2014-10-16
MY185549A (en) 2021-05-19
KR102234454B1 (ko) 2021-04-01
RU2015147496A (ru) 2017-05-16
PH12015502338A1 (en) 2016-02-22
MX2015014209A (es) 2016-05-10
US9564300B2 (en) 2017-02-07
TW201443258A (zh) 2014-11-16
CN105324830A (zh) 2016-02-10
BR112015025747A2 (pt) 2017-07-18
HK1219562A1 (zh) 2017-04-07
EP2984674B1 (de) 2018-06-06
PH12015502328A1 (en) 2016-02-22
RU2665059C2 (ru) 2018-08-28
US20160064201A1 (en) 2016-03-03
JP6360884B2 (ja) 2018-07-18
IL241980B (en) 2020-08-31
PH12015502328B1 (en) 2018-09-26

Similar Documents

Publication Publication Date Title
JP6655531B2 (ja) 室温および高温の両方におけるホルダー内のプレートのセンタリング
JP2016514771A5 (enExample)
US9484232B2 (en) Zone temperature control structure
KR20140111597A (ko) 정전 척 장치
JP2003243492A5 (enExample)
JP2014150186A (ja) プラズマ処理装置
JP5895603B2 (ja) プラズマ処理装置用電極板
JP2020536209A (ja) 摩擦部材
US20200126824A1 (en) Super thin heating disk
JP6320321B2 (ja) 断熱ローラ
HK1219562B (en) Centering of a plate in a holder both at room temperatures and at higher temperatures
KR102406644B1 (ko) 통합 플레이트 및 이를 포함하는 기판 처리 장치
JP2016110698A (ja) 高周波入力結合器
JP6473042B2 (ja) 電磁石装置
JP7791817B2 (ja) 端部／中央部の不均一性を軽減するためにウエハの外周近傍に凹部を備えた半導体処理チャック
JPH0773998A (ja) 高周波加速空洞
TW202018206A (zh) 單片型碟盤
KR101888057B1 (ko) 고토크 저속형 회전 파지장치 및 이를 이용한 초전도 직류 유도가열 장치
JP2011204754A (ja) プラズマ処理装置用電極板及びプラズマ処理装置
KR20070094038A (ko) 전극 손상을 최소로하는 벌집 구조의 대면적란타늄헥사보라이드 직류 플라즈마 원
JP2007173237A (ja) ターゲット構成、デバイスを製造する方法、およびマグネトロンスパッタ供給源
TWM502694U (zh) 真空鍍膜系統的陰極裝置
JPH03229866A (ja) スパッタ装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20170208

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20171113

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20171219

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20180316

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20180409

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20181002

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20181228

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20190301

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190402

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20191001

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20191218

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20200107

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20200203

R150 Certificate of patent or registration of utility model

Ref document number: 6655531

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250