AR096021A1 - Placa de forma de disco con soporte que forman un sistema de placa-soporte - Google Patents

Placa de forma de disco con soporte que forman un sistema de placa-soporte

Info

Publication number
AR096021A1
AR096021A1 ARP140101500A ARP140101500A AR096021A1 AR 096021 A1 AR096021 A1 AR 096021A1 AR P140101500 A ARP140101500 A AR P140101500A AR P140101500 A ARP140101500 A AR P140101500A AR 096021 A1 AR096021 A1 AR 096021A1
Authority
AR
Argentina
Prior art keywords
support
plate
thermal expansion
disc shape
forming
Prior art date
Application number
ARP140101500A
Other languages
English (en)
Spanish (es)
Inventor
Kerschbaumer Joerg
Original Assignee
Oerlikon Surface Solutions Ag Trubbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions Ag Trubbach filed Critical Oerlikon Surface Solutions Ag Trubbach
Publication of AR096021A1 publication Critical patent/AR096021A1/es

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3417—Arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3423—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3438—Electrodes other than cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3464—Operating strategies
    • H01J37/3467—Pulsed operation, e.g. HIPIMS
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3488—Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus
    • H01J37/3497—Temperature of target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Telescopes (AREA)
  • Magnetic Resonance Imaging Apparatus (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Nozzles (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Packaging For Recording Disks (AREA)
ARP140101500A 2013-04-08 2014-04-07 Placa de forma de disco con soporte que forman un sistema de placa-soporte AR096021A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201361809524P 2013-04-08 2013-04-08

Publications (1)

Publication Number Publication Date
AR096021A1 true AR096021A1 (es) 2015-12-02

Family

ID=50486885

Family Applications (2)

Application Number Title Priority Date Filing Date
ARP140101500A AR096021A1 (es) 2013-04-08 2014-04-07 Placa de forma de disco con soporte que forman un sistema de placa-soporte
ARP140101499A AR099253A1 (es) 2013-04-08 2014-04-07 Fuente de recubrimiento o blanco para proveer material para recubrimiento por deposición física de vapor (pvd)

Family Applications After (1)

Application Number Title Priority Date Filing Date
ARP140101499A AR099253A1 (es) 2013-04-08 2014-04-07 Fuente de recubrimiento o blanco para proveer material para recubrimiento por deposición física de vapor (pvd)

Country Status (21)

Country Link
US (2) US9564300B2 (enExample)
EP (2) EP2984673B1 (enExample)
JP (2) JP6655531B2 (enExample)
KR (2) KR102190319B1 (enExample)
CN (2) CN105210169B (enExample)
AR (2) AR096021A1 (enExample)
BR (2) BR112015025749A2 (enExample)
CA (2) CA2908897C (enExample)
ES (1) ES2675332T3 (enExample)
HK (1) HK1214403A1 (enExample)
HU (1) HUE038784T2 (enExample)
IL (2) IL241979B (enExample)
MX (2) MX350171B (enExample)
MY (2) MY185549A (enExample)
PH (2) PH12015502328B1 (enExample)
PL (1) PL2984674T3 (enExample)
RU (2) RU2665059C2 (enExample)
SG (3) SG11201508311VA (enExample)
TR (1) TR201809526T4 (enExample)
TW (2) TW201443263A (enExample)
WO (2) WO2014166620A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10435784B2 (en) * 2016-08-10 2019-10-08 Applied Materials, Inc. Thermally optimized rings
EP3631837B1 (en) 2017-06-01 2021-01-27 Oerlikon Surface Solutions AG, Pfäffikon Target assembly for safe and economic evaporation of brittle materials
CN108130516A (zh) * 2018-01-03 2018-06-08 梧州三和新材料科技有限公司 一种使用泡沫金属增强冷却的真空镀阴极靶
CN110838458B (zh) 2018-08-17 2022-08-09 台湾积体电路制造股份有限公司 半导体制程系统以及方法
US11600517B2 (en) * 2018-08-17 2023-03-07 Taiwan Semiconductor Manufacturing Co., Ltd. Screwless semiconductor processing chambers
WO2020128011A1 (en) * 2018-12-20 2020-06-25 Oerlikon Surface Solutions Ag, Pfäffikon Cathodic arc ignition device
CN110066980A (zh) * 2019-05-31 2019-07-30 德淮半导体有限公司 环状靶材部件、半导体工艺设备及其工作方法
US20230002879A1 (en) * 2019-12-13 2023-01-05 Evatec Ag Gas ring for a pvd source

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724890Y2 (enExample) * 1979-10-31 1982-05-29
EP0393344A1 (de) * 1989-04-20 1990-10-24 Balzers Aktiengesellschaft Haltevorrichtung für Targets von Zerstäubungsquellen und Verfahren zum Festhalten eines Targets in einer Halterung
DE4015388C2 (de) * 1990-05-14 1997-07-17 Leybold Ag Kathodenzerstäubungsvorrichtung
CA2098725A1 (en) * 1991-01-28 1992-07-29 Daniel R. Marx Target for cathode sputtering
DE9102052U1 (de) * 1991-02-21 1991-06-13 Hauzer Holding B.V., Venlo Indirekt gekühlter Verdampfer mit Schnellwechselsystem
JP3030921B2 (ja) * 1991-05-01 2000-04-10 日新電機株式会社 イオン源の引出し電極装置
US5269894A (en) * 1991-05-08 1993-12-14 Balzers Aktiengesellschaft Method of mounting a target plate to be cooled into a vacuum process chamber, an arrangement of a target plate, a target plate and a vacuum chamber
DE4133564C2 (de) * 1991-10-10 1999-11-18 Leybold Ag Vorrichtung zur lösbaren Befestigung eines Targets oder Targetgrundkörpers auf der Kathodenhalterung
RU2037559C1 (ru) * 1992-08-10 1995-06-19 Волин Эрнст Михайлович Способ нанесения покрытий на изделия методом ионного распыления и устройство для его осуществления
WO1997003221A1 (en) * 1995-07-10 1997-01-30 Cvc Products, Inc. Magnetron cathode apparatus and method for sputtering
DE19535894A1 (de) * 1995-09-27 1997-04-03 Leybold Materials Gmbh Target für die Sputterkathode einer Vakuumbeschichtungsanlage und Verfahren zu seiner Herstellung
US6217832B1 (en) * 1998-04-30 2001-04-17 Catalytica, Inc. Support structures for a catalyst
JP4251713B2 (ja) * 1999-05-21 2009-04-08 株式会社アルバック スパッタ装置
US6589352B1 (en) * 1999-12-10 2003-07-08 Applied Materials, Inc. Self aligning non contact shadow ring process kit
JP4101524B2 (ja) * 2002-02-05 2008-06-18 芝浦メカトロニクス株式会社 成膜装置
JP2010116605A (ja) * 2008-11-13 2010-05-27 Fujikura Ltd ターゲット保持装置、ならびにこれを用いた成膜装置および成膜方法
JP2011165964A (ja) * 2010-02-10 2011-08-25 Hitachi Kokusai Electric Inc 半導体装置の製造方法
DE102012006717A1 (de) 2012-04-04 2013-10-10 Oerlikon Trading Ag, Trübbach An eine indirekte Kühlvorrichtung angepasstes Target

Also Published As

Publication number Publication date
HUE038784T2 (hu) 2018-11-28
BR112015025747A2 (pt) 2017-07-18
AR099253A1 (es) 2016-07-13
JP2016514771A (ja) 2016-05-23
PH12015502328A1 (en) 2016-02-22
ES2675332T3 (es) 2018-07-10
PH12015502338B1 (en) 2016-02-22
BR112015025749A2 (pt) 2017-07-18
EP2984674A1 (de) 2016-02-17
CN105210169A (zh) 2015-12-30
MX2015014210A (es) 2016-05-05
IL241979B (en) 2020-07-30
MX2015014209A (es) 2016-05-10
US20160064201A1 (en) 2016-03-03
CN105324830A (zh) 2016-02-10
RU2665058C2 (ru) 2018-08-28
TR201809526T4 (tr) 2018-07-23
WO2014166621A1 (de) 2014-10-16
RU2015147496A (ru) 2017-05-16
JP2016519719A (ja) 2016-07-07
US9564300B2 (en) 2017-02-07
EP2984673A1 (de) 2016-02-17
TW201443263A (zh) 2014-11-16
KR102190319B1 (ko) 2020-12-14
EP2984674B1 (de) 2018-06-06
CA2908892C (en) 2021-08-24
WO2014166620A1 (de) 2014-10-16
EP2984673B1 (de) 2020-03-11
CN105210169B (zh) 2017-04-19
RU2665059C2 (ru) 2018-08-28
HK1214403A1 (zh) 2016-07-22
MX350171B (es) 2017-08-28
KR102234454B1 (ko) 2021-04-01
KR20150139556A (ko) 2015-12-11
CN105324830B (zh) 2017-08-01
SG11201508311VA (en) 2015-11-27
SG10201708186QA (en) 2017-11-29
MY178843A (en) 2020-10-20
MX350172B (es) 2017-08-28
KR20150139555A (ko) 2015-12-11
US20160071706A1 (en) 2016-03-10
PH12015502328B1 (en) 2018-09-26
SG11201508324VA (en) 2015-11-27
MY185549A (en) 2021-05-19
PL2984674T3 (pl) 2018-10-31
IL241980B (en) 2020-08-31
JP6655531B2 (ja) 2020-02-26
JP6360884B2 (ja) 2018-07-18
CA2908892A1 (en) 2014-10-16
TW201443258A (zh) 2014-11-16
PH12015502338A1 (en) 2016-02-22
RU2015147497A (ru) 2017-05-16
HK1219562A1 (zh) 2017-04-07
US9536714B2 (en) 2017-01-03
CA2908897A1 (en) 2014-10-16
CA2908897C (en) 2023-03-14

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Legal Events

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