JP6611943B2 - 炭化珪素半導体装置およびその製造方法 - Google Patents
炭化珪素半導体装置およびその製造方法 Download PDFInfo
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- JP6611943B2 JP6611943B2 JP2018528417A JP2018528417A JP6611943B2 JP 6611943 B2 JP6611943 B2 JP 6611943B2 JP 2018528417 A JP2018528417 A JP 2018528417A JP 2018528417 A JP2018528417 A JP 2018528417A JP 6611943 B2 JP6611943 B2 JP 6611943B2
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- halogen
- limiting ring
- region
- insulating film
- silicon carbide
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- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 1
- 229910021334 nickel silicide Inorganic materials 0.000 description 1
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Description
図3は、本実施の形態におけるSBD(炭化珪素半導体装置)101の構成を概略的に示す部分断面図である。SBD101は、ドリフト層(半導体層)2と、複数のFLR領域(フィールドリミッティングリング領域)5と、フィールド絶縁膜7とを有している。
上述した実施の形態1においては、ハロゲン族原子のイオン注入(図13:ステップS30)が活性化アニール(図13:ステップS20)の後に行われるが、この順番は変更されてもよい。その場合においても、固定電荷層61(図3)を形成し、それによる効果を得ることができる。具体的には、図14を参照して、ハロゲン族原子のイオン注入(ステップS30)が、導電型不純物の注入(ステップS10)の後、活性化アニール(ステップS20)の前に行われてもよい。あるいは、図15を参照して、ハロゲン族原子のイオン注入(ステップS30)が、導電型不純物の注入(ステップS10)および活性化アニール(ステップS20)の後に行われてもよい。
図16は、本実施の形態におけるSBD(炭化珪素半導体装置)102の構成を概略的に示す部分断面図である。SBD102においては、フィールド絶縁膜7は熱酸化膜7aとCVD膜7b(堆積膜)とを有している。熱酸化膜7aは、終端領域RT上に設けられており、FLR領域5およびドリフト層2に接している。CVD膜7bは熱酸化膜7a上に設けられている。
図18は、本実施の形態におけるSBD(炭化珪素半導体装置)103の構成を概略的に示す部分断面図である。SBD102(図16:実施の形態3)と同様に、SBD103においてもフィールド絶縁膜7は熱酸化膜7aを有している。本実施の形態においては、実施の形態3と異なり、熱酸化膜7aはハロゲン含有フィールド絶縁部7ahを有している。ハロゲン含有フィールド絶縁部7ahは、ハロゲン族原子を含有しており、ハロゲン含有フィールドリミッティングリング部5h上に位置している。よってSBD103においては、ハロゲン族原子による負の固定電荷層62は、ハロゲン含有フィールドリミッティングリング部5hによって形成されている部分と、ハロゲン含有フィールドリミッティングリング部5h上のハロゲン含有フィールド絶縁部7ahによって形成されている部分とを有している。
図20は、本実施の形態におけるSBD(炭化珪素半導体装置)104の構成を概略的に示す部分断面図である。SBD104においては、ドリフト層2はハロゲン含有半導体部2hを有している。ハロゲン含有半導体部2hは、ハロゲン族原子を含有しており、FLR領域5間でフィールド絶縁膜7に接している。よってSBD104においては、ハロゲン族原子による負の固定電荷層63は、ハロゲン含有フィールドリミッティングリング部5hによって形成されている部分と、ハロゲン含有フィールドリミッティングリング部5hに隣接したハロゲン含有半導体部2hによって形成されている部分とを有している。
図22は、本実施の形態におけるSBD(炭化珪素半導体装置)106の構成を概略的に示す部分断面図である。SBD106においては、ハロゲン含有半導体部2hは、ハロゲン含有フィールドリミッティングリング部5hが有する負の固定電荷密度に比して、より大きな負の固定電荷密度を有している。よってSBD106においては、ハロゲン族原子による負の固定電荷層65は、ハロゲン含有フィールドリミッティングリング部5hによって形成されている部分と、ハロゲン含有フィールドリミッティングリング部5hに隣接したハロゲン含有半導体部2hによって形成されている部分とを有しており、後者の部分が、より高い負の固定電荷密度を有している。なお固定電荷層65のいずれの部分の固定電荷密度も1×1012cm−2以上1×1013cm−2以下の範囲にあることが好ましい。
図24は、本実施の形態におけるMOSFET(炭化珪素半導体装置)201の構成を概略的に示す部分断面図である。MOSFET201は、SBD101(図3:実施の形態1)とほぼ同様に、半導体基板1と、ドリフト層2と、裏面オーミック電極3と、複数のFLR領域5と、フィールド絶縁膜7と、保護絶縁膜10とを有している。MOSFET201においても、SBD101と同様に、FLR領域5中のハロゲン含有フィールドリミッティングリング部5hによって負の固定電荷層71が形成されている。これにより、実施の形態1とほぼ同様に、耐電圧性能のロバスト性を向上させることができる。
図37は、本実施の形態におけるMOSFET(炭化珪素半導体装置)202の構成を概略的に示す部分断面図である。MOSFET202においては、MOSET201(図24:実施の形態7)と異なり、フィールド絶縁膜7はハロゲン含有フィールド絶縁部7hを有している。ハロゲン含有フィールド絶縁部7hは、ハロゲン族原子を含有しており、ハロゲン含有フィールドリミッティングリング部5hおよびハロゲン含有終端ウェル部12h上に位置している。よってMOSFET202においては、ハロゲン族原子による負の固定電荷層72は、ハロゲン含有フィールドリミッティングリング部5hによって形成されている部分と、ハロゲン含有フィールドリミッティングリング部5h上のハロゲン含有フィールド絶縁部7hによって形成されている部分とを有している。
図39は、本実施の形態におけるMOSFET(炭化珪素半導体装置)203の構成を概略的に示す部分断面図である。MOSFET203においては、SBD104(図20:実施の形態5)と同様に、ドリフト層2はハロゲン含有半導体部2hを有している。よってMOSFET203においては、ハロゲン族原子による負の固定電荷層73は、ハロゲン含有フィールドリミッティングリング部5hに隣接したハロゲン含有半導体部2hによって形成されている部分を含む。この構成により、実施の形態5とほぼ同様の効果が、MOSFETにおいて得られる。
図41は、本実施の形態におけるMOSFET(炭化珪素半導体装置)205の構成を概略的に示す部分断面図である。MOSFET204においては、SBD106(図22:実施の形態6)と同様に、ハロゲン含有半導体部2hは、ハロゲン含有フィールドリミッティングリング部5hが有する負の固定電荷密度に比して、より大きな負の固定電荷密度を有している。よってMOSFET205においては、ハロゲン族原子による負の固定電荷層75は、ハロゲン含有フィールドリミッティングリング部5hによって形成されている部分と、ハロゲン含有フィールドリミッティングリング部5hに隣接したハロゲン含有半導体部2hによって形成されている部分とを有しており、後者の部分が、より高い負の固定電荷密度を有している。この構成により、実施の形態6とほぼ同様の効果が、MOSFETにおいて得られる。
Claims (9)
- 半導体基板(1)と、
前記半導体基板(1)上に設けられ、炭化珪素から作られ、素子領域(RE)と前記素子領域(RE)の外側の終端領域(RT)とを有し、n型を有する半導体層(2)と、
前記半導体層(2)の前記終端領域(RT)に設けられ、p型を有し、互いに離れて配置された複数のフィールドリミッティングリング領域(5)と、
前記半導体層(2)の前記終端領域(RT)上に設けられ、前記フィールドリミッティングリング領域(5)および前記半導体層(2)に接するフィールド絶縁膜(7)と、
を備え、
前記フィールドリミッティングリング領域(5)の各々は、前記フィールド絶縁膜(7)に接しかつハロゲン族原子を含有するハロゲン含有フィールドリミッティングリング部(5h)を含む、炭化珪素半導体装置。 - 前記フィールド絶縁膜(7)は、前記ハロゲン含有フィールドリミッティングリング部(5h)上に位置しかつハロゲン族原子を含有するハロゲン含有フィールド絶縁部(7h,7ah,7hn,7hp,7ahn,7ahp)を含む、請求項1に記載の炭化珪素半導体装置。
- 前記半導体層(2)は、前記フィールドリミッティングリング領域(5)間で前記フィールド絶縁膜(7)に接しかつハロゲン族原子を含有するハロゲン含有半導体部(2h)を含む、請求項1または2に記載の炭化珪素半導体装置。
- 前記ハロゲン含有半導体部(2h)は、前記ハロゲン含有フィールドリミッティングリング部(5h)が有する負の固定電荷密度に比して、より大きな負の固定電荷密度を有している、請求項3に記載の炭化珪素半導体装置。
- 半導体基板(1)上に、炭化珪素から作られ、素子領域(RE)と前記素子領域(RE)の外側の終端領域(RT)とを有し、n型を有する半導体層(2)を形成する工程と、
前記半導体層(2)の前記終端領域(RT)に、p型を有し、互いに離れて配置された複数のフィールドリミッティングリング領域(5)を、アクセプタイオンを注入することによって形成する工程と、
前記アクセプタイオンを電気的に活性化する活性化アニールを行う工程と、
前記フィールドリミッティングリング領域(5)の各々の一部にハロゲン族原子を注入することによってハロゲン含有フィールドリミッティングリング部(5h)を形成する工程と、
前記半導体層(2)の前記終端領域(RT)上にフィールド絶縁膜(7)を形成する工程と、
を備えた、炭化珪素半導体装置の製造方法。 - 前記アクセプタイオンを電気的に活性化する活性化アニールを行う工程は、前記ハロゲン含有フィールドリミッティングリング部(5h)を形成する工程の前に行われる、請求項5に記載の炭化珪素半導体装置の製造方法。
- 前記アクセプタイオンを電気的に活性化する活性化アニールを行う工程は、前記ハロゲン含有フィールドリミッティングリング部(5h)を形成する工程の後に行われる、請求項5に記載の炭化珪素半導体装置の製造方法。
- 前記フィールド絶縁膜(7)は熱酸化膜(7a)である、請求項5から7のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記ハロゲン含有フィールドリミッティングリング部(5h)を形成する工程の前に前記フィールド絶縁膜(7)の少なくとも一部が形成され、前記ハロゲン含有フィールドリミッティングリング部(5h)を形成する工程において、前記ハロゲン族原子は前記フィールド絶縁膜(7)の少なくとも一部を介して注入される、請求項5から8のいずれか1項に記載の炭化珪素半導体装置の製造方法。
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