JP7310184B2 - 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 - Google Patents
炭化珪素半導体装置および炭化珪素半導体装置の製造方法 Download PDFInfo
- Publication number
- JP7310184B2 JP7310184B2 JP2019049467A JP2019049467A JP7310184B2 JP 7310184 B2 JP7310184 B2 JP 7310184B2 JP 2019049467 A JP2019049467 A JP 2019049467A JP 2019049467 A JP2019049467 A JP 2019049467A JP 7310184 B2 JP7310184 B2 JP 7310184B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- silicon carbide
- semiconductor
- type
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 260
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 198
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 195
- 238000004519 manufacturing process Methods 0.000 title claims description 27
- 238000000034 method Methods 0.000 title claims description 14
- 239000010410 layer Substances 0.000 claims description 153
- 239000000758 substrate Substances 0.000 claims description 66
- 230000007547 defect Effects 0.000 claims description 60
- 239000012535 impurity Substances 0.000 claims description 45
- 238000005468 ion implantation Methods 0.000 claims description 27
- 239000002344 surface layer Substances 0.000 claims description 21
- 239000011229 interlayer Substances 0.000 claims description 19
- 238000009826 distribution Methods 0.000 claims description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- 150000002500 ions Chemical class 0.000 claims description 13
- 230000001133 acceleration Effects 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052698 phosphorus Inorganic materials 0.000 claims description 5
- 239000011574 phosphorus Substances 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000005684 electric field Effects 0.000 description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 238000001228 spectrum Methods 0.000 description 10
- 238000000206 photolithography Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000010936 titanium Substances 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 5
- 230000015556 catabolic process Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000007943 implant Substances 0.000 description 2
- 125000004433 nitrogen atom Chemical group N* 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 238000001994 activation Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 125000004437 phosphorous atom Chemical group 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
- H01L29/0623—Buried supplementary region, e.g. buried guard ring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
- H01L29/0852—Source or drain regions of field-effect devices of field-effect transistors with insulated gate of DMOS transistors
- H01L29/0873—Drain regions
- H01L29/0878—Impurity concentration or distribution
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/1608—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/167—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System further characterised by the doping material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/30—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface
- H01L29/32—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface the imperfections being within the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7803—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device
- H01L29/7806—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device the other device being a Schottky barrier diode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/0455—Making n or p doped regions or layers, e.g. using diffusion
- H01L21/046—Making n or p doped regions or layers, e.g. using diffusion using ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
Description
本発明にかかる半導体装置は、ワイドバンドギャップ半導体を用いて構成される。実施の形態においては、ワイドバンドギャップ半導体として例えば炭化珪素(SiC)を用いて作製された炭化珪素半導体装置について、MOSFETを例に説明する。図1は、実施の形態にかかる炭化珪素半導体装置の構造を模式的に示す断面図である。図1は、トレンチ型MOSFET50の例を示す。
次に、実施の形態にかかる炭化珪素半導体装置の製造方法について説明する。図4~図9は、実施の形態にかかる炭化珪素半導体装置の製造途中の状態を模式的に示す断面図である。
2、102 n-型炭化珪素エピタキシャル層
2a 第1n-型炭化珪素エピタキシャル層
2b 第2n-型炭化珪素エピタキシャル層
3 第1p+型ベース領域
3a 下部第1p+型ベース領域
3b 上部第1p+型ベース領域
4 第2p+型ベース領域
5 n型高濃度領域
5a 下部n型高濃度領域
5b 上部n型高濃度領域
6、106 p型ベース層
7、107 n+型ソース領域
8、108 p+型コンタクト領域
9、109 ゲート絶縁膜
10、110 ゲート電極
11、111 層間絶縁膜
12、112 ソース電極
13、113 裏面電極
14 バリアメタル
16、116 トレンチ
17 n+型領域
118 p型ボディ層
50、150 トレンチ型MOSFET
Claims (17)
- 第1導電型の炭化珪素半導体基板と、
前記炭化珪素半導体基板のおもて面に設けられた、前記炭化珪素半導体基板より低不純物濃度の炭化珪素からなる第1導電型の第1半導体層と、
前記第1半導体層の内部に選択的に設けられた第2導電型の第1ベース領域と、
前記第1半導体層の、前記炭化珪素半導体基板のおもて面と反対側の表面に設けられた炭化珪素からなる第2導電型の第2半導体層と、
前記第2半導体層の表面層に選択的に設けられた第1導電型の第1半導体領域と、
前記第2半導体層の表面層に選択的に設けられた、前記第1半導体領域と接する第2導電型の第2半導体領域と、
前記第1半導体領域および前記第2半導体領域に接触する第1電極と、
前記炭化珪素半導体基板の裏面に設けられた第2電極と、
を備え、
前記第1ベース領域は、前記第2半導体領域と深さ方向に対向する位置に設けられ、
前記第2半導体領域の、前記炭化珪素半導体基板のおもて面と反対側の表面から深さ方向への点欠陥の分布について、前記第1半導体層と前記第1ベース領域との界面より深い位置に2つのピークを有し、
前記2つのピークの中でより深い位置にある第1ピークには、前記2つのピークの中でより浅い位置にある第2ピークより、前記点欠陥の数が多いことを特徴とする炭化珪素半導体装置。 - 前記第2半導体層の表面層の前記第2半導体領域が設けられていない領域の、前記炭化珪素半導体基板のおもて面と反対側の表面から深さ方向への点欠陥の分布について、前記第1半導体層と前記第2半導体層との界面より深い位置に1つの第3ピークを有し、
前記第3ピークは、前記第1ピークより前記点欠陥の数が少ないことを特徴とする請求項1に記載の炭化珪素半導体装置。 - 前記第2半導体層の表面層の前記第2半導体領域が設けられていない領域は、第1導電型の領域であることを特徴とする請求項2に記載の炭化珪素半導体装置。
- 前記第2半導体層の表面層の前記第2半導体領域が設けられていない領域は、SBD構造、JBS構造、PiN構造またはMPS構造の領域であることを特徴とする請求項2に記載の炭化珪素半導体装置。
- 前記第2半導体層の表面層の前記第2半導体領域が設けられていない領域は、JFET領域であることを特徴とする請求項2に記載の炭化珪素半導体装置。
- 前記第2半導体層の表面層の前記第2半導体領域が設けられていない領域は、前記第1半導体領域であることを特徴とする請求項2に記載の炭化珪素半導体装置。
- 前記第2半導体層および前記第1半導体領域を貫通して前記第1半導体層に達するトレンチと、
前記第1半導体層の内部に前記トレンチの底部と接するように選択的に設けられた第2導電型の第2ベース領域と、
前記トレンチ内部にゲート絶縁膜を介して設けられたゲート電極と、
前記ゲート電極上に設けられた層間絶縁膜と、
を備え、
前記第2半導体層の表面層の前記第2半導体領域が設けられていない領域は、前記トレンチの底部と前記炭化珪素半導体基板との間の領域であることを特徴とする請求項2に記載の炭化珪素半導体装置。 - 前記第1ベース領域は、不純物としてアルミニウムを含んでいることを特徴とする請求項1~7のいずれか一つに記載の炭化珪素半導体装置。
- 前記第1半導体層および前記第1半導体領域は、不純物として窒素またはリンを含んでいることを特徴とする請求項1~8のいずれか一つに記載の炭化珪素半導体装置。
- 前記第1ベース領域に含まれる不純物は、前記第1半導体層および前記第1半導体領域に含まれる不純物よりも原子番号が大きいことを特徴とする請求項1~8のいずれか一つ
に記載の炭化珪素半導体装置。 - 前記第1ベース領域の不純物濃度は、前記第2半導体領域の不純物濃度より高いことを特徴とする請求項1~10のいずれか一つに記載の炭化珪素半導体装置。
- 前記第2ピークの、前記第1半導体層と前記第1ベース領域との界面からの深さは、前記第2半導体層の厚さ以上で、前記第2半導体層の前記炭化珪素半導体基板のおもて面と反対側の表面から、前記第2ベース領域の前記炭化珪素半導体基板のおもて面側の表面までの距離以下であることを特徴とする請求項7に記載の炭化珪素半導体装置。
- 第1導電型の炭化珪素半導体基板のおもて面に、前記炭化珪素半導体基板より低不純物濃度の炭化珪素からなる第1導電型の第1半導体層を形成する第1工程と、
前記第1半導体層の内部に選択的に第2導電型の第1ベース領域を形成する第2工程と、
前記第1半導体層の、前記炭化珪素半導体基板のおもて面と反対側の表面に炭化珪素からなる第2導電型の第2半導体層を形成する第3工程と、
前記第2半導体層の表面層に選択的に第1導電型の第1半導体領域を形成する第4工程と、
前記第2半導体層の表面層に選択的に、前記第1半導体領域と接する第2導電型の第2半導体領域を形成する第5工程と、
前記第1半導体領域および前記第2半導体領域に接触する第1電極を形成する第6工程と、
前記炭化珪素半導体基板の裏面に第2電極を形成する第7工程と、
を含み、
前記第2工程では、前記第1ベース領域を、前記第2半導体領域と深さ方向に対向する位置に形成し、
前記第2工程および前記第5工程では、前記第2半導体領域の前記炭化珪素半導体基板のおもて面と反対側の表面から深さ方向への点欠陥の分布について、前記第1半導体層と前記第1ベース領域との界面より深い位置に2つのピークを有するように形成し、前記2つのピークの中でより深い位置にある第1ピークを、前記2つのピークの中でより浅い位置にある第2ピークより、前記点欠陥の数が多くなるように形成することを特徴とする炭化珪素半導体装置の製造方法。 - 前記第2工程では、前記第1ベース領域をイオン注入で形成し、
前記第5工程では、前記第2半導体領域をイオン注入で形成することを特徴とする請求項13に記載の炭化珪素半導体装置の製造方法。 - 前記第2工程でのイオン注入の加速エネルギーは、前記第5工程でのイオン注入の加速エネルギーより大きいことを特徴とする請求項14に記載の炭化珪素半導体装置の製造方法。
- 前記第2工程では、2価または3価のイオンを注入することを特徴とする請求項14または15に記載の炭化珪素半導体装置の製造方法。
- 前記第3工程では、前記第2半導体層をエピタキシャル成長により形成することを特徴とする請求項13~16のいずれか一つに記載の炭化珪素半導体装置の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019049467A JP7310184B2 (ja) | 2019-03-18 | 2019-03-18 | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 |
US16/806,669 US11114560B2 (en) | 2019-03-18 | 2020-03-02 | Silicon carbide semiconductor device and method of manufacturing silicon carbide semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019049467A JP7310184B2 (ja) | 2019-03-18 | 2019-03-18 | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020155438A JP2020155438A (ja) | 2020-09-24 |
JP7310184B2 true JP7310184B2 (ja) | 2023-07-19 |
Family
ID=72514710
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019049467A Active JP7310184B2 (ja) | 2019-03-18 | 2019-03-18 | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US11114560B2 (ja) |
JP (1) | JP7310184B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11139394B2 (en) * | 2019-08-30 | 2021-10-05 | Semiconductor Components Industries, Llc | Silicon carbide field-effect transistors |
DE102020004758A1 (de) * | 2019-08-30 | 2021-03-04 | Semiconductor Components Industries, Llc | Siliciumcarbid-feldeffekttransistoren |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013214660A (ja) | 2012-04-03 | 2013-10-17 | Denso Corp | 炭化珪素半導体装置およびその製造方法 |
JP2018082057A (ja) | 2016-11-16 | 2018-05-24 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6822088B2 (ja) * | 2016-11-15 | 2021-01-27 | 富士電機株式会社 | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 |
CN109075213B (zh) * | 2016-11-16 | 2021-10-15 | 富士电机株式会社 | 半导体装置 |
-
2019
- 2019-03-18 JP JP2019049467A patent/JP7310184B2/ja active Active
-
2020
- 2020-03-02 US US16/806,669 patent/US11114560B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013214660A (ja) | 2012-04-03 | 2013-10-17 | Denso Corp | 炭化珪素半導体装置およびその製造方法 |
JP2018082057A (ja) | 2016-11-16 | 2018-05-24 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2020155438A (ja) | 2020-09-24 |
US11114560B2 (en) | 2021-09-07 |
US20200303541A1 (en) | 2020-09-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10217858B2 (en) | Semiconductor device and method of manufacturing semiconductor device | |
JP6996082B2 (ja) | 半導体装置および半導体装置の製造方法 | |
US9793392B2 (en) | Semiconductor device | |
JP7087280B2 (ja) | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 | |
JP7176239B2 (ja) | 半導体装置 | |
US10096703B2 (en) | Semiconductor device and method of manufacturing semiconductor device | |
JP6802454B2 (ja) | 半導体装置およびその製造方法 | |
WO2018016208A1 (ja) | 半導体装置及びその製造方法 | |
JP7310184B2 (ja) | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 | |
US10453954B2 (en) | Semiconductor device having trenches in termination structure region thereof and method for manufacturing the same | |
US10269952B2 (en) | Semiconductor device having steps in a termination region and manufacturing method thereof | |
JP5607947B2 (ja) | 半導体装置およびその製造方法 | |
JP7243173B2 (ja) | 半導体装置および半導体装置の製造方法 | |
JP2023101772A (ja) | 半導体装置および半導体装置の製造方法 | |
US20220285489A1 (en) | Super junction silicon carbide semiconductor device and manufacturing method thereof | |
JP5059989B1 (ja) | 半導体装置とその製造方法 | |
JP7074173B2 (ja) | 半導体装置および半導体装置の製造方法 | |
JP7106882B2 (ja) | 半導体装置および半導体装置の製造方法 | |
JP2017092364A (ja) | 半導体装置および半導体装置の製造方法 | |
JP7379880B2 (ja) | 半導体装置 | |
JP7439417B2 (ja) | 超接合半導体装置および超接合半導体装置の製造方法 | |
JP7371426B2 (ja) | 半導体装置 | |
JP2023114929A (ja) | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 | |
JP2021002652A (ja) | 半導体装置および半導体装置の製造方法 | |
JP2022120263A (ja) | 炭化珪素半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220214 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20230216 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230221 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230404 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230606 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230619 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7310184 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |