JP6039198B2 - 樹脂封止電子部品の製造方法及び樹脂封止電子部品の製造装置 - Google Patents
樹脂封止電子部品の製造方法及び樹脂封止電子部品の製造装置 Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/433—Auxiliary members in containers characterised by their shape, e.g. pistons
- H01L23/4334—Auxiliary members in encapsulations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/04—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles using movable moulds
- B29C2043/046—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles using movable moulds travelling between different stations, e.g. feeding, moulding, curing stations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
- B29C2043/181—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles encapsulated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/50—Removing moulded articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
- B29K2995/0012—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds having particular thermal properties
- B29K2995/0013—Conductive
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
- B29L2031/3481—Housings or casings incorporating or embedding electric or electronic elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/561—Batch processing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/552—Protection against radiation, e.g. light or electromagnetic waves
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/14—Layer or component removable to expose adhesive
- Y10T428/1476—Release layer
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
Description
電子部品を樹脂封止した樹脂封止電子部品の製造方法であって、
前記樹脂封止電子部品が、板状部材を有する樹脂封止電子部品であり、
前記製造方法は、
前記板状部材上に前記樹脂を載置する樹脂載置工程と、
前記樹脂を、前記板状部材上に載置された状態で、成形型の型キャビティの位置まで搬送する搬送工程と、
前記型キャビティ内において、前記板状部材上に載置された前記樹脂に前記電子部品を浸漬させた状態で、前記樹脂を前記板状部材及び前記電子部品とともに圧縮成形することにより、前記電子部品を樹脂封止する樹脂封止工程とを含むことを特徴とする。
電子部品を樹脂封止した樹脂封止電子部品の製造装置であって、
前記樹脂封止電子部品が、板状部材を有する樹脂封止電子部品であり、
前記製造装置は、
樹脂載置手段と、型キャビティを有する成形型と、搬送手段と、樹脂封止手段とを有し、
前記樹脂載置手段は、前記板状部材上に前記樹脂を載置し、
前記搬送手段は、前記樹脂を、前記板状部材上に載置された状態で、前記型キャビティの位置まで搬送し、
前記樹脂封止手段は、前記型キャビティ内において、前記板状部材上に載置された前記樹脂に前記電子部品を浸漬させた状態で、前記樹脂を前記板状部材及び前記電子部品とともに圧縮成形することにより、前記電子部品を樹脂封止することを特徴とする。
12 離型フィルム
13 放熱板(板状部材)
14 トレーカバー
14c クリーナ
15 樹脂
16 レジンハンドラー
17 下型
17a 下型キャビティ(型キャビティ)
17b 空隙
18 基板
19 電子部品
20 上型
21 下型外周先押え
22 フィルム押え
21s、22s スプリング
23 FMカバー
23a Oリング
24、25 減圧による吸着
26、30 スプリングに加えられる力の向き
27 FMカバーに加えられる力の向き
28 チェイスホルダ内の減圧
29 減圧の解除
31 放熱板13の移動方向
Claims (11)
- 電子部品を樹脂封止した樹脂封止電子部品の製造方法であって、
前記樹脂封止電子部品が、板状部材を有する樹脂封止電子部品であり、
前記製造方法は、
トレーカバーが前記板状部材の周縁部を覆う状態で、前記板状部材上に前記樹脂を載置する樹脂載置工程と、
前記トレーカバーが前記板状部材の周縁部を覆う状態で、前記板状部材上に載置された前記樹脂を成形型の型キャビティ上の位置まで搬送する搬送工程と、
前記板状部材上に載置された前記樹脂を前記型キャビティ内に供給する工程と、
前記型キャビティ内において、前記板状部材上に載置された前記樹脂に前記電子部品を浸漬させた状態で、前記樹脂を前記板状部材及び前記電子部品とともに圧縮成形することにより、前記電子部品を樹脂封止する樹脂封止工程とを含むことを特徴とする製造方法。 - 前記板状部材が、放熱板又はシールド板である請求項1記載の製造方法。
- 前記搬送工程において、前記樹脂を載置した前記板状部材が離型フィルム上に載置された状態で、前記樹脂を前記成形型の型キャビティ上の位置まで搬送する請求項1又は2記載の製造方法。
- 前記板状部材が、粘着剤により前記離型フィルム上に固定されている請求項3記載の製造方法。
- 前記板状部材が、樹脂収容部を有し、
前記樹脂載置工程において、前記樹脂収容部内に前記樹脂を載置し、
前記搬送工程及び前記圧縮成形工程を、前記樹脂収容部内に前記樹脂が載置された状態で行う請求項1から4のいずれか一項に記載の製造方法。 - 前記樹脂が、熱可塑性樹脂又は熱硬化性樹脂である請求項1から5のいずれか一項に記載の製造方法。
- 前記樹脂が、顆粒状樹脂、粉末状樹脂、液状樹脂、板状樹脂、シート状樹脂、フィルム状樹脂及びペースト状樹脂からなる群から選択される少なくとも一つである請求項1から6のいずれか一項に記載の製造方法。
- 前記樹脂が、透明樹脂、半透明樹脂、及び不透明樹脂からなる群から選択される少なくとも一つである請求項1から7のいずれか一項に記載の製造方法。
- 電子部品を樹脂封止した樹脂封止電子部品の製造装置であって、
前記樹脂封止電子部品が、板状部材を有する樹脂封止電子部品であり、
前記製造装置は、
樹脂載置手段と、型キャビティを有する成形型と、搬送手段と、樹脂封止手段と、トレーカバーと、吸着部材とを有し、
前記樹脂載置手段は、前記トレーカバーが前記板状部材の周縁部を覆う状態で、前記板状部材上に前記樹脂を載置し、
前記搬送手段は、前記トレーカバーが前記板状部材の周縁部を覆う状態で、前記板状部材上に載置された前記樹脂を前記型キャビティ上の位置まで搬送し、
前記吸着部材を用いて、前記板状部材上に載置された前記樹脂を前記型キャビティ内に供給し、
前記樹脂封止手段は、前記型キャビティ内において、前記板状部材上に載置された前記樹脂に前記電子部品を浸漬させた状態で、前記樹脂を前記板状部材及び前記電子部品とともに圧縮成形することにより、前記電子部品を樹脂封止することを特徴とする製造装置。 - 前記搬送手段は、前記樹脂を載置した前記板状部材が離型フィルム上に載置された状態で、前記樹脂を前記成形型の型キャビティ上の位置まで搬送する請求項9記載の製造装置。
- 前記吸着部材を用いて、前記離型フィルムを前記型キャビティ面上に吸着させることで、前記板状部材上に載置された前記樹脂を前記型キャビティ内に供給する請求項10記載の製造装置。
Priority Applications (10)
Application Number | Priority Date | Filing Date | Title |
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JP2012051057A JP6039198B2 (ja) | 2012-03-07 | 2012-03-07 | 樹脂封止電子部品の製造方法及び樹脂封止電子部品の製造装置 |
KR1020167002419A KR101897880B1 (ko) | 2012-03-07 | 2012-11-08 | 수지 밀봉 전자 부품의 제조 방법 및 수지 밀봉 전자 부품의 제조 장치 |
KR1020137034312A KR101591065B1 (ko) | 2012-03-07 | 2012-11-08 | 수지 밀봉 전자 부품의 제조 방법 및 수지 밀봉 전자 부품의 제조 장치 |
PCT/JP2012/078996 WO2013132693A1 (ja) | 2012-03-07 | 2012-11-08 | 樹脂封止電子部品の製造方法及び樹脂封止電子部品の製造装置 |
CN201810146769.2A CN108346589A (zh) | 2012-03-07 | 2012-11-08 | 树脂封装电子元件的制造方法及制造装置 |
CN201280030884.4A CN103620752B (zh) | 2012-03-07 | 2012-11-08 | 树脂封装电子元件的制造方法及树脂封装电子元件的制造装置 |
CN201810146770.5A CN108346590A (zh) | 2012-03-07 | 2012-11-08 | 树脂封装电子元件的制造方法及制造装置 |
US14/381,887 US20150017372A1 (en) | 2012-03-07 | 2012-11-08 | Method of manufacturing resin-encapsulated electronic component and apparatus for manufacturing resin-encapsulated electronic component |
TW102101680A TWI529820B (zh) | 2012-03-07 | 2013-01-16 | 樹脂封裝電子零件之製造方法及樹脂封裝電子零件之製造裝置 |
TW105100968A TWI613739B (zh) | 2012-03-07 | 2013-01-16 | 樹脂封裝電子零件之製造方法及樹脂封裝電子零件之製造裝置 |
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US (1) | US20150017372A1 (ja) |
JP (1) | JP6039198B2 (ja) |
KR (2) | KR101591065B1 (ja) |
CN (3) | CN108346589A (ja) |
TW (2) | TWI529820B (ja) |
WO (1) | WO2013132693A1 (ja) |
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KR20190081311A (ko) * | 2017-12-29 | 2019-07-09 | (주)인천측기 | 길이 측정 장치 및 시스템 |
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KR102006757B1 (ko) * | 2017-12-29 | 2019-08-02 | (주)인천측기 | 길이 측정 장치 및 시스템 |
US11359902B2 (en) | 2017-12-29 | 2022-06-14 | Inchon Survey Instrument. Co. Ltd. | Length measurement device and system |
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JP2013187340A (ja) | 2013-09-19 |
TWI529820B (zh) | 2016-04-11 |
KR20140016395A (ko) | 2014-02-07 |
CN103620752A (zh) | 2014-03-05 |
CN108346590A (zh) | 2018-07-31 |
TW201643972A (zh) | 2016-12-16 |
US20150017372A1 (en) | 2015-01-15 |
KR101591065B1 (ko) | 2016-02-02 |
TWI613739B (zh) | 2018-02-01 |
KR101897880B1 (ko) | 2018-09-12 |
CN108346589A (zh) | 2018-07-31 |
WO2013132693A1 (ja) | 2013-09-12 |
KR20160015407A (ko) | 2016-02-12 |
TW201338063A (zh) | 2013-09-16 |
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