JP5889791B2 - ソース・ドレイン金属エッチングのためのウェットプロセスを用いた金属酸化物又は金属酸窒化物tftの製造方法 - Google Patents
ソース・ドレイン金属エッチングのためのウェットプロセスを用いた金属酸化物又は金属酸窒化物tftの製造方法 Download PDFInfo
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- 229910052751 metal Inorganic materials 0.000 title claims description 120
- 239000002184 metal Substances 0.000 title claims description 120
- 238000000034 method Methods 0.000 title claims description 85
- 238000005530 etching Methods 0.000 title claims description 60
- 238000004519 manufacturing process Methods 0.000 title description 6
- 229910044991 metal oxide Inorganic materials 0.000 title description 2
- 150000004706 metal oxides Chemical class 0.000 title description 2
- 238000000151 deposition Methods 0.000 claims description 59
- 239000004065 semiconductor Substances 0.000 claims description 50
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 30
- 239000010409 thin film Substances 0.000 claims description 26
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 20
- 229910052760 oxygen Inorganic materials 0.000 claims description 20
- 239000001301 oxygen Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 19
- 238000000059 patterning Methods 0.000 claims description 18
- 229910052738 indium Inorganic materials 0.000 claims description 16
- 229910052718 tin Inorganic materials 0.000 claims description 16
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 15
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 15
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 15
- 229910052793 cadmium Inorganic materials 0.000 claims description 15
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims description 15
- 229910052733 gallium Inorganic materials 0.000 claims description 15
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 15
- 229910052757 nitrogen Inorganic materials 0.000 claims description 15
- 238000002161 passivation Methods 0.000 claims description 15
- 229910052725 zinc Inorganic materials 0.000 claims description 15
- 239000011701 zinc Substances 0.000 claims description 15
- 238000001020 plasma etching Methods 0.000 claims description 14
- 238000001039 wet etching Methods 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 7
- 239000011149 active material Substances 0.000 description 46
- 238000001312 dry etching Methods 0.000 description 13
- 239000007789 gas Substances 0.000 description 9
- 238000005546 reactive sputtering Methods 0.000 description 9
- 239000010949 copper Substances 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 150000002739 metals Chemical class 0.000 description 6
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 238000005477 sputtering target Methods 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000007704 wet chemistry method Methods 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- -1 copper Chemical class 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66969—Multistep manufacturing processes of devices having semiconductor bodies not comprising group 14 or group 13/15 materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Plasma & Fusion (AREA)
- Thin Film Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
Description
本発明の実施形態は、概して薄膜トランジスタ(TFT)の製造方法に関する。
TFTアレイは、これらのデバイスが、しばしばコンピュータやテレビのフラットパネル用に採用される種類の液晶アクティブマトリックスディスプレイ(LCD)に使用可能であるので、現在特に関心が高い。LCDはまた、バックライト用に発光ダイオード(LED)を含むことができる。更に、有機発光ダイオード(OLED)が、アクティブマトリクスディスプレイ用に使用され、これらのOLEDは、ディスプレイの動作をアドレッシングするためにTFTを利用している。
Claims (12)
- 薄膜トランジスタの形成方法であって、
第1マスクを使用して基板上にゲート電極を堆積しパターニングする工程と、
前記ゲート電極上にゲート誘電体層を堆積させる工程と、
前記ゲート誘電体層上に半導体活性層を堆積させる工程であって、前記半導体活性層は、酸素、窒素、及び、亜鉛、インジウム、カドミウム、ガリウム、及びスズからなる群から選択される1以上の元素を含む工程と、
前記活性層上にエッチストップ層を堆積させる工程と、
前記エッチストップ層上に第2マスクを形成する工程と、
前記エッチストップ層をエッチングし、これによって前記薄膜トランジスタのデバイス部のパターニングされたエッチストップ層を形成し、前記薄膜トランジスタのゲートコンタクト部から前記エッチストップ層を除去し、これによって前記半導体活性層を露出させる工程と、
前記第2マスクを除去して、これによって前記パターニングされたエッチストップ層を露出させる工程と、
前記パターニングされたエッチストップ層及び前記半導体活性層の上に金属層を堆積させる工程と、
前記薄膜トランジスタの前記デバイス部で前記金属層上に第3マスクを形成する工程と、
前記金属層をエッチングして、これによって前記デバイス部にソース電極及びドレイン電極を画定し、前記ゲートコンタクト部から前記金属層を除去する工程と、
前記第3マスクを除去する工程と、
前記第3マスクを除去後、前記ソース電極及び前記ドレイン電極をマスクとして用いて前記半導体活性層をエッチングし、これによって前記ゲートコンタクト部から前記半導体活性層を除去し、前記ゲートコンタクト部内で前記ゲート誘電体層を露出させる工程と、
第4マスクを使用して前記ゲート誘電体層をエッチングし、これによって前記ゲートコンタクト部内で前記ゲート電極を露出させる工程を含む方法。 - 前記金属層及び前記半導体活性層は、プラズマエッチングプロセスを用いてエッチングされる請求項1記載の方法。
- 前記活性層をエッチングする工程は、第5マスクを堆積・除去することなく、前記ソース電極、前記ドレイン電極、及び前記パターニングされたエッチストップ層をまとめてマスクとして使用する工程を含む請求項2記載の方法。
- 前記半導体活性層は、ウェットエッチングプロセスを用いてエッチングされ、前記金属層は、プラズマエッチングプロセスを用いてエッチングされる請求項1記載の方法。
- 前記半導体活性層及び前記金属層は、ウェットエッチングプロセスを用いてエッチングされる請求項1記載の方法。
- 薄膜トランジスタの形成方法であって、
第1マスクを使用して基板上にゲート電極を堆積しパターニングする工程と、
前記ゲート電極上にゲート誘電体層を堆積させる工程と、
前記ゲート誘電体層上に半導体活性層を堆積させる工程であって、前記半導体活性層は、酸素、窒素、及び、亜鉛、インジウム、カドミウム、ガリウム、及びスズからなる群から選択される1以上の元素を含む工程と、
第2マスクを使用して前記半導体活性層をパターニングし、これによって前記薄膜トランジスタのデバイス部内にアクティブチャネルを形成し、前記薄膜トランジスタのゲートコンタクト部から前記半導体活性層を除去し、前記ゲートコンタクト部内の前記ゲート誘電体層を露出させる工程と、
前記デバイス部内の前記アクティブチャネル上と、前記ゲートコンタクト部内の前記ゲート誘電体層上に、エッチストップ層を堆積させる工程と、
第3マスクを使用して前記エッチストップ層をエッチングし、これによって前記デバイス部内にパターニングされたエッチストップ層を形成し、前記ゲートコンタクト部内で前記エッチストップ層及び前記ゲート誘電体層を通してエッチングし、これによって前記ゲートコンタクト部内の前記ゲート電極を露出させる工程と、
前記パターニングされたエッチストップ層、前記半導体活性層、及び前記ゲートコンタクト部の上に金属層を堆積させる工程と、
第4マスクを使用して前記金属層をエッチングして、これによって前記デバイス部にソース電極及びドレイン電極を画定し、前記ゲートコンタクト部に金属コンタクトを形成する工程を含む方法。 - 前記金属層及び前記半導体活性層は、プラズマエッチングプロセスを用いてエッチングされる請求項6記載の方法。
- 前記半導体活性層は、ウェットエッチングプロセスを用いてエッチングされ、前記金属層は、プラズマエッチングプロセスを用いてエッチングされる請求項6記載の方法。
- 前記半導体活性層及び前記金属層は、ウェットエッチングプロセスを用いてエッチングされる請求項6記載の方法。
- 薄膜トランジスタの形成方法であって、
第1マスクを使用して基板上にゲート電極を堆積しパターニングする工程と、
前記ゲート電極上にゲート誘電体層を堆積させる工程と、
前記ゲート誘電体層上に半導体活性層を堆積させる工程であって、前記半導体活性層は、酸素、窒素、及び、亜鉛、インジウム、カドミウム、ガリウム、及びスズからなる群から選択される1以上の元素を含む工程と、
前記活性層上にエッチストップ層を堆積させる工程と、
第2マスクを使用して前記エッチストップ層をエッチングし、これによって前記薄膜トランジスタのデバイス部のパターニングされたエッチストップ層を形成し、前記薄膜トランジスタのゲートコンタクト部から前記エッチストップ層を除去し、これによって前記半導体活性層を露出させる工程と、
前記パターニングされたエッチストップ層をマスクとして使用して、前記半導体活性層をエッチングし、これによって前記ゲートコンタクト部内で前記ゲート誘電体層を露出させ、アクティブチャネルを形成する工程と、
前記デバイス部及び前記ゲートコンタクト部の上にパッシベーション層を堆積させる工程と、
第3マスクを使用して前記パッシベーション層及び前記パターニングされたエッチストップ層を通してエッチングし、これによって前記デバイス部内で前記アクティブチャネルを露出させる工程と、前記ゲートコンタクト部内で前記パッシベーション層及び前記ゲート誘電体層を通してエッチングし、これによって前記ゲート電極を露出させる工程と、
前記パターニングされたエッチストップ層及び前記半導体活性層の上に金属層を堆積させる工程と、
第4マスクを使用して前記金属層をエッチングし、これによって前記デバイス部にソース電極及びドレイン電極を、前記ゲートコンタクト部内に金属コンタクトを画定する工程を含み、前記金属層及び前記半導体活性層は、プラズマエッチングプロセスを用いてエッチングされる方法。 - 薄膜トランジスタの形成方法であって、
第1マスクを使用して基板上にゲート電極を堆積しパターニングする工程と、
前記ゲート電極上にゲート誘電体層を堆積させる工程と、
前記ゲート誘電体層上に半導体活性層を堆積させる工程であって、前記半導体活性層は、酸素、窒素、及び、亜鉛、インジウム、カドミウム、ガリウム、及びスズからなる群から選択される1以上の元素を含む工程と、
前記活性層上に第1組成を有する第1金属層を堆積する工程と、
前記第1金属層上に前記第1組成とは異なる第2組成を有する第2金属層を堆積させる工程と、
第2マスクを使用して前記第2金属層をエッチングし、これによって前記薄膜トランジスタのデバイス部上に1以上のエッチストップを形成すると共に、前記薄膜トランジスタのゲートコンタクト部から前記第2金属層を除去する工程と、
前記エッチングされた第2金属層上に第3マスクを形成する工程と、
前記第1金属層をエッチングし、これによって前記ゲートコンタクト部から前記第1金属層を除去し、前記デバイス部上にエッチングされた第1金属層を形成する工程と、
前記半導体活性層をエッチングし、これによって前記デバイス部内にアクティブチャネルを形成し、前記ゲートコンタクト部から前記半導体活性層を除去する工程と、
前記エッチングされた第1金属層をエッチングし、これによってソース・ドレイン電極を形成する工程を含む方法。 - 前記第2金属層をエッチングする工程は、ウェットエッチングを含む請求項11記載の方法。
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TW201133643A (en) | 2011-10-01 |
TWI529810B (zh) | 2016-04-11 |
CN102640294A (zh) | 2012-08-15 |
US20110070691A1 (en) | 2011-03-24 |
US20110266537A1 (en) | 2011-11-03 |
WO2011037829A3 (en) | 2011-06-23 |
US7988470B2 (en) | 2011-08-02 |
JP2013506294A (ja) | 2013-02-21 |
KR20120081165A (ko) | 2012-07-18 |
US8298879B2 (en) | 2012-10-30 |
WO2011037829A2 (en) | 2011-03-31 |
KR101733718B1 (ko) | 2017-05-10 |
CN102640294B (zh) | 2014-12-17 |
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