JP5727017B2 - グラフェンの成長のための方法 - Google Patents
グラフェンの成長のための方法 Download PDFInfo
- Publication number
- JP5727017B2 JP5727017B2 JP2013529102A JP2013529102A JP5727017B2 JP 5727017 B2 JP5727017 B2 JP 5727017B2 JP 2013529102 A JP2013529102 A JP 2013529102A JP 2013529102 A JP2013529102 A JP 2013529102A JP 5727017 B2 JP5727017 B2 JP 5727017B2
- Authority
- JP
- Japan
- Prior art keywords
- heating
- graphene
- heating rate
- growth
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/184—Preparation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Composite Materials (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE1050966 | 2010-09-16 | ||
| SE1050966-9 | 2010-09-16 | ||
| PCT/SE2011/050328 WO2012036608A1 (en) | 2010-09-16 | 2011-03-23 | Process for growth of graphene |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013537164A JP2013537164A (ja) | 2013-09-30 |
| JP2013537164A5 JP2013537164A5 (enExample) | 2014-07-31 |
| JP5727017B2 true JP5727017B2 (ja) | 2015-06-03 |
Family
ID=45831992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013529102A Active JP5727017B2 (ja) | 2010-09-16 | 2011-03-23 | グラフェンの成長のための方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9150417B2 (enExample) |
| EP (1) | EP2616390B1 (enExample) |
| JP (1) | JP5727017B2 (enExample) |
| CN (1) | CN103097283B (enExample) |
| WO (1) | WO2012036608A1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| PL213291B1 (pl) * | 2010-06-07 | 2013-02-28 | Inst Tech Material Elekt | Sposób wytwarzania grafenu |
| US9157888B2 (en) | 2011-05-05 | 2015-10-13 | Graphensic Ab | Field effect transistor for chemical sensing using graphene, chemical sensor using the transistor and method for producing the transistor |
| FR2980786B1 (fr) * | 2011-09-30 | 2013-10-25 | Centre Nat Rech Scient | Procede de formation d'une couche de graphene a la surface d'un substrat comprenant une couche de silicium |
| JP6560594B2 (ja) * | 2015-11-06 | 2019-08-14 | 住友電気工業株式会社 | 積層体および電子素子 |
| PL417804A1 (pl) | 2016-07-02 | 2018-01-15 | Uniwersytet Jagielloński | Metoda syntezy wysokiej jakości grafenu na powierzchni węglika krzemu |
| CN106435244B (zh) * | 2016-09-20 | 2018-06-15 | 南昌大学 | 一种铝-石墨烯金属复合材料的制备方法 |
| CN109112336B (zh) * | 2018-09-27 | 2021-11-16 | 中国航空制造技术研究院 | 一种石墨烯/SiC复合颗粒增强金属基复合材料 |
| CN109652858B (zh) * | 2018-12-11 | 2020-09-08 | 北京大学 | 一种利用层间耦合与台阶耦合的协同效应制备单晶六方氮化硼的方法 |
| CN109950131B (zh) * | 2019-02-28 | 2021-09-14 | 天津大学 | 以非极性晶面SiC为衬底的单层石墨烯及可控生长方法 |
| DE102020122679A1 (de) | 2020-08-31 | 2022-03-03 | Aixtron Se | Verfahren zum Abscheiden einer zweidimensionalen Schicht |
| DE102020122677A1 (de) | 2020-08-31 | 2022-03-03 | Aixtron Se | Verfahren zum Abscheiden einer zweidimensionalen Schicht |
| CN112919456B (zh) * | 2021-02-23 | 2023-09-22 | 南京大学 | 一种具有均一层厚的平整石墨烯生长方法及单层或双层石墨烯薄膜 |
| US20250012739A1 (en) | 2021-11-23 | 2025-01-09 | Government Of The United States Of America, As Represented By The Secretary Of Commerce | Analyte probe and determining water vapor transmission rate |
| CN114197039B (zh) * | 2021-12-09 | 2023-05-09 | 山东大学 | 一种在4H-SiC衬底上外延生长六英寸以上均匀石墨烯的方法 |
| WO2024151277A1 (en) * | 2023-01-13 | 2024-07-18 | Georgia Tech Research Corporation | Semiconducting graphene platform |
| CN117303355A (zh) * | 2023-10-16 | 2023-12-29 | 浙江大学杭州国际科创中心 | 一种利用循环加热制备石墨烯的方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0383332A (ja) * | 1989-08-28 | 1991-04-09 | Sharp Corp | 炭化珪素半導体装置の製造方法 |
| JP2003171107A (ja) * | 2001-09-28 | 2003-06-17 | Japan Fine Ceramics Center | カーボンナノチューブ、カーボンナノチューブ付きSiCウィスカー、カーボンナノチューブ膜、カーボンナノチューブ膜付きSiC基板及びカーボンナノチューブ膜体 |
| JP3848584B2 (ja) * | 2002-02-22 | 2006-11-22 | 財団法人ファインセラミックスセンター | カーボンナノチューブの製造方法 |
| US7071258B1 (en) | 2002-10-21 | 2006-07-04 | Nanotek Instruments, Inc. | Nano-scaled graphene plates |
| CN100384725C (zh) * | 2005-07-21 | 2008-04-30 | 同济大学 | 一种碳化硅纳米线的制备方法 |
| JP2007284311A (ja) * | 2006-04-19 | 2007-11-01 | Matsushita Electric Ind Co Ltd | カーボンナノ材料の製造方法 |
| JP2008087087A (ja) * | 2006-09-29 | 2008-04-17 | Matsushita Electric Ind Co Ltd | カーボンナノ構造体の成長方法 |
| JP5137066B2 (ja) * | 2007-09-10 | 2013-02-06 | 国立大学法人福井大学 | グラフェンシートの製造方法 |
| KR101443219B1 (ko) * | 2007-12-17 | 2014-09-19 | 삼성전자주식회사 | 그라펜 쉘의 제조방법 및 이로부터 제조된 그라펜 쉘 |
| WO2009119641A1 (ja) | 2008-03-26 | 2009-10-01 | 学校法人早稲田大学 | 単原子膜の製造方法 |
| CN101602503B (zh) * | 2009-07-20 | 2011-04-27 | 西安电子科技大学 | 4H-SiC硅面外延生长石墨烯的方法 |
| JP2012144415A (ja) * | 2010-12-21 | 2012-08-02 | Meijo Univ | グラフェン素材の製造方法及びグラフェン素材 |
-
2011
- 2011-03-23 WO PCT/SE2011/050328 patent/WO2012036608A1/en not_active Ceased
- 2011-03-23 JP JP2013529102A patent/JP5727017B2/ja active Active
- 2011-03-23 CN CN201180043954.5A patent/CN103097283B/zh active Active
- 2011-03-23 EP EP11825522.3A patent/EP2616390B1/en active Active
- 2011-03-23 US US13/823,392 patent/US9150417B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US9150417B2 (en) | 2015-10-06 |
| CN103097283B (zh) | 2014-12-10 |
| WO2012036608A1 (en) | 2012-03-22 |
| EP2616390B1 (en) | 2019-01-23 |
| JP2013537164A (ja) | 2013-09-30 |
| EP2616390A1 (en) | 2013-07-24 |
| CN103097283A (zh) | 2013-05-08 |
| EP2616390A4 (en) | 2016-12-28 |
| US20130171347A1 (en) | 2013-07-04 |
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