JP6560594B2 - 積層体および電子素子 - Google Patents
積層体および電子素子 Download PDFInfo
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- JP6560594B2 JP6560594B2 JP2015218773A JP2015218773A JP6560594B2 JP 6560594 B2 JP6560594 B2 JP 6560594B2 JP 2015218773 A JP2015218773 A JP 2015218773A JP 2015218773 A JP2015218773 A JP 2015218773A JP 6560594 B2 JP6560594 B2 JP 6560594B2
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 85
- 229910021389 graphene Inorganic materials 0.000 claims description 84
- 239000000758 substrate Substances 0.000 claims description 82
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 31
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 31
- 238000004519 manufacturing process Methods 0.000 claims description 22
- 238000001069 Raman spectroscopy Methods 0.000 claims description 17
- 238000004611 spectroscopical analysis Methods 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000002344 surface layer Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000010408 film Substances 0.000 description 79
- 239000007789 gas Substances 0.000 description 23
- 238000005259 measurement Methods 0.000 description 15
- 238000000034 method Methods 0.000 description 15
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 14
- 229910052786 argon Inorganic materials 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 7
- 239000010931 gold Substances 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000000004 low energy electron diffraction Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/1606—Graphene
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02378—Silicon carbide
-
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02527—Carbon, e.g. diamond-like carbon
-
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/0405—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising semiconducting carbon, e.g. diamond, diamond-like carbon
- H01L21/0425—Making electrodes
- H01L21/043—Ohmic electrodes
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/0405—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising semiconducting carbon, e.g. diamond, diamond-like carbon
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66015—Multistep manufacturing processes of devices having a semiconductor body comprising semiconducting carbon, e.g. diamond, diamond-like carbon, graphene
- H01L29/66037—Multistep manufacturing processes of devices having a semiconductor body comprising semiconducting carbon, e.g. diamond, diamond-like carbon, graphene the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66045—Field-effect transistors
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7781—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with inverted single heterostructure, i.e. with active layer formed on top of wide bandgap layer, e.g. IHEMT
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78684—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising semiconductor materials of Group IV not being silicon, or alloys including an element of the group IV, e.g. Ge, SiN alloys, SiC alloys
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- H—ELECTRICITY
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41775—Source or drain electrodes for field effect devices characterised by the proximity or the relative position of the source or drain electrode and the gate electrode, e.g. the source or drain electrode separated from the gate electrode by side-walls or spreading around or above the gate electrode
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Carbon And Carbon Compounds (AREA)
- Laminated Bodies (AREA)
- Thin Film Transistor (AREA)
Description
最初に本願発明の実施態様を列記して説明する。本願の積層体は、炭化珪素からなる基板部と、基板部の第1主面上に配置され、基板部を構成する炭化珪素の原子配列に対して配向する原子配列を有するグラフェン膜と、を備える。グラフェン膜の基板部側とは反対側の主面である露出面において、ラマン分光分析におけるG’/Gの値が1.2以上となる領域が面積率で10%以上である。
次に、本発明にかかる積層体の一実施の形態を、以下に図面を参照しつつ説明する。なお、以下の図面において同一または相当する部分には同一の参照番号を付しその説明は繰返さない。
2 基板部
2A 第1主面
3 グラフェン膜
3A 露出面
4 ソース電極
5 ドレイン電極
6 ゲート絶縁膜
7 ゲート電極
9 FET
10 基板
11 測定領域
90 積層体の製造装置
91 本体部
91A 底壁部
91B 側壁部
91C 上壁部
92 サセプタ
92A 基板保持面
93 カバー部材
93A 内壁面
93C 閉塞空間
95 気体導入管
96 気体排出管
Claims (7)
- 炭化珪素からなる基板部と、
前記基板部の第1主面上に配置され、前記基板部を構成する炭化珪素の原子配列に対して配向する原子配列を有するグラフェン膜と、を備え、
前記グラフェン膜の前記基板部側とは反対側の主面である露出面において、ラマン分光分析におけるG’/Gの値が1.2以上となる領域が面積率で10%以上である、積層体。 - 前記グラフェン膜は、前記基板部の前記第1主面の95%以上を覆う、請求項1に記載の積層体。
- 前記グラフェン膜のキャリア移動度は、5000cm2/Vs以上である、請求項1または2に記載の積層体。
- 前記基板部は円盤状の形状を有し、
前記基板部の直径は50mm以上である、請求項1〜3のいずれか1項に記載の積層体。 - 請求項1〜4のいずれか1項に記載の積層体と、
前記積層体の前記露出面に接触して形成される第1電極と、
前記積層体の前記露出面に接触し、前記第1電極と離れて形成される第2電極と、を備える、電子素子。 - 炭化珪素からなる基板を準備する工程と、
前記基板を加熱することにより、前記基板から珪素原子を離脱させて前記基板の表層部をグラフェンに変換して、炭化珪素からなる基板部と、前記基板部の第1主面上に配置され、前記基板部を構成する炭化珪素の原子配列に対して配向する原子配列を有するグラフェン膜と、を含む積層体を得る工程と、を備え、
前記積層体を得る工程は、
本体部と、
前記本体部の内部に配置されたサセプタと、
前記本体部の内部に配置され、前記サセプタを覆うカバー部材と、を含む積層体の製造装置を用いて実施され、
前記積層体を得る工程では、前記基板が、前記サセプタ上に配置され、前記本体部および前記カバー部材により取り囲まれる閉塞空間内において加熱される、積層体の製造方法。 - 請求項6に記載の積層体の製造方法により前記積層体を準備する工程と、
前記グラフェン膜に接触するように電極を形成する工程と、を備える電子素子の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2015218773A JP6560594B2 (ja) | 2015-11-06 | 2015-11-06 | 積層体および電子素子 |
US15/343,679 US9806156B2 (en) | 2015-11-06 | 2016-11-04 | Laminated body and electronic device |
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JP2015218773A JP6560594B2 (ja) | 2015-11-06 | 2015-11-06 | 積層体および電子素子 |
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JP2017087513A JP2017087513A (ja) | 2017-05-25 |
JP6560594B2 true JP6560594B2 (ja) | 2019-08-14 |
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JP (1) | JP6560594B2 (ja) |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2008130465A2 (en) * | 2007-03-02 | 2008-10-30 | Brookhaven Science Associates | Nanodevices for spintronics methods of using same |
JP5137066B2 (ja) * | 2007-09-10 | 2013-02-06 | 国立大学法人福井大学 | グラフェンシートの製造方法 |
US9281385B2 (en) * | 2010-06-18 | 2016-03-08 | Samsung Electronics Co., Ltd. | Semiconducting graphene composition, and electrical device including the same |
JP2012025004A (ja) * | 2010-07-22 | 2012-02-09 | Seiko Epson Corp | グラフェンシート付き基材及びグラフェンシートの製造方法 |
US9150417B2 (en) * | 2010-09-16 | 2015-10-06 | Graphensic Ab | Process for growth of graphene |
US8901536B2 (en) * | 2010-09-21 | 2014-12-02 | The United States Of America, As Represented By The Secretary Of The Navy | Transistor having graphene base |
JP2015110485A (ja) * | 2012-02-24 | 2015-06-18 | 国立大学法人徳島大学 | グラフェンおよびその製造方法 |
US9096050B2 (en) * | 2013-04-02 | 2015-08-04 | International Business Machines Corporation | Wafer scale epitaxial graphene transfer |
JP6163024B2 (ja) * | 2013-06-12 | 2017-07-12 | 住友電気工業株式会社 | 基板の製造方法 |
JP2014240340A (ja) * | 2013-06-12 | 2014-12-25 | 住友電気工業株式会社 | 基板、基板の製造方法、及び電子装置 |
JP2014241387A (ja) * | 2013-06-12 | 2014-12-25 | 住友電気工業株式会社 | 基板、基板の製造方法、及び電子装置 |
JP5990145B2 (ja) * | 2013-08-30 | 2016-09-07 | 日本電信電話株式会社 | グラフェン製造方法 |
JP5960666B2 (ja) * | 2013-09-30 | 2016-08-02 | 日本電信電話株式会社 | 炭化ケイ素導波路素子 |
JP2016155712A (ja) * | 2015-02-25 | 2016-09-01 | 国立大学法人名古屋大学 | グラフェン/SiC複合材料の製造方法 |
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2015
- 2015-11-06 JP JP2015218773A patent/JP6560594B2/ja active Active
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- 2016-11-04 US US15/343,679 patent/US9806156B2/en active Active
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Publication number | Publication date |
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US9806156B2 (en) | 2017-10-31 |
JP2017087513A (ja) | 2017-05-25 |
US20170148880A1 (en) | 2017-05-25 |
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