JP5472888B2 - 抵抗体を利用した不揮発性メモリ素子の製造方法 - Google Patents
抵抗体を利用した不揮発性メモリ素子の製造方法 Download PDFInfo
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- JP5472888B2 JP5472888B2 JP2005337858A JP2005337858A JP5472888B2 JP 5472888 B2 JP5472888 B2 JP 5472888B2 JP 2005337858 A JP2005337858 A JP 2005337858A JP 2005337858 A JP2005337858 A JP 2005337858A JP 5472888 B2 JP5472888 B2 JP 5472888B2
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- 238000000034 method Methods 0.000 title claims description 33
- 238000004519 manufacturing process Methods 0.000 title claims description 22
- 230000015654 memory Effects 0.000 title claims description 17
- 239000010410 layer Substances 0.000 claims description 115
- 238000013500 data storage Methods 0.000 claims description 93
- 229910000314 transition metal oxide Inorganic materials 0.000 claims description 20
- 229910052760 oxygen Inorganic materials 0.000 claims description 17
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 13
- 239000001301 oxygen Substances 0.000 claims description 13
- 238000005229 chemical vapour deposition Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- 239000011229 interlayer Substances 0.000 claims description 7
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 3
- 230000006870 function Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 229910052720 vanadium Inorganic materials 0.000 claims description 2
- 230000008569 process Effects 0.000 description 14
- 230000008859 change Effects 0.000 description 10
- 239000010409 thin film Substances 0.000 description 9
- 239000010408 film Substances 0.000 description 8
- 229910000480 nickel oxide Inorganic materials 0.000 description 8
- 230000010354 integration Effects 0.000 description 6
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910000618 GeSbTe Inorganic materials 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 230000005055 memory storage Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000005291 magnetic effect Effects 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 150000004770 chalcogenides Chemical class 0.000 description 1
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 1
- GNTDGMZSJNCJKK-UHFFFAOYSA-N divanadium pentaoxide Chemical compound O=[V](=O)O[V](=O)=O GNTDGMZSJNCJKK-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000012782 phase change material Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000011232 storage material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/021—Formation of the switching material, e.g. layer deposition
- H10N70/023—Formation of the switching material, e.g. layer deposition by chemical vapor deposition, e.g. MOCVD, ALD
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Patterning of the switching material
- H10N70/066—Patterning of the switching material by filling of openings, e.g. damascene method
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
- H10N70/8833—Binary metal oxides, e.g. TaOx
Description
42 ソース、
44 ドレイン、
46 チャンネル領域、
48 ゲート絶縁膜、
50 ゲート電極、
52 下部電極、
53 絶縁層、
54 データ保存層、
56 上部電極、
58 プレート電極、
60 層間絶縁層、
S データ保存部、
h1 コンタクトホール。
Claims (6)
- スイッチング素子を準備する工程と、前記スイッチング素子に電気的に連結されたデータ保存部を形成する工程と、を含む不揮発性メモリ素子の製造方法において、
前記データ保存部を形成する工程は、
前記スイッチング素子に連結される下部電極を形成する工程と、
前記下部電極上のみに絶縁層を形成する工程と、
前記絶縁層に前記下部電極が露出されるコンタクトホールを形成する工程と、
前記コンタクトホールに、印加される電圧によって相異なる抵抗値を持つ遷移金属酸化物で、データ保存層を形成する工程と、
前記絶縁層及びデータ保存層上に上部電極を形成する工程と、を含み、
さらに、前記データ保存部及び前記スイッチング素子を層間絶縁層によって埋め込む工程と、
前記上部電極の上部面を露出させる工程と、
を含むことを特徴とする不揮発性メモリ素子の製造方法。 - 前記遷移金属酸化物は、Ni、V、Zn、Nb、Ti、WまたはCoの酸化物であることを特徴とする請求項1に記載の不揮発性メモリ素子の製造方法。
- 前記データ保存層は、化学気相蒸着法により形成されることを特徴とする請求項1に記載の不揮発性メモリ素子の製造方法。
- 前記化学気相蒸着法を行う間に、酸素ソースとしてH2O、O2、O2−活性化プラズマガスを交差注入して前記遷移金属酸化物の酸素含量を調節することを特徴とする請求項3に記載の不揮発性メモリ素子の製造方法。
- 前記絶縁層は、SiO2物質で形成されることを特徴とする請求項1に記載の不揮発性メモリ素子の製造方法。
- 前記スイッチング素子は、トランジスタまたはスイッチング機能を持つダイオードであることを特徴とする請求項1に記載の不揮発性メモリ素子の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050008752A KR100682926B1 (ko) | 2005-01-31 | 2005-01-31 | 저항체를 이용한 비휘발성 메모리 소자 및 그 제조방법 |
KR10-2005-0008752 | 2005-01-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006210882A JP2006210882A (ja) | 2006-08-10 |
JP5472888B2 true JP5472888B2 (ja) | 2014-04-16 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2005337858A Active JP5472888B2 (ja) | 2005-01-31 | 2005-11-22 | 抵抗体を利用した不揮発性メモリ素子の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (2) | US7820996B2 (ja) |
EP (1) | EP1686624B1 (ja) |
JP (1) | JP5472888B2 (ja) |
KR (1) | KR100682926B1 (ja) |
DE (1) | DE602005001924T2 (ja) |
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DE602005001924T2 (de) | 2008-04-30 |
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KR100682926B1 (ko) | 2007-02-15 |
US8168469B2 (en) | 2012-05-01 |
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US7820996B2 (en) | 2010-10-26 |
EP1686624A1 (en) | 2006-08-02 |
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US20110008945A1 (en) | 2011-01-13 |
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