JP5458462B2 - 振動型慣性力検知センサ - Google Patents

振動型慣性力検知センサ Download PDF

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Publication number
JP5458462B2
JP5458462B2 JP2005296283A JP2005296283A JP5458462B2 JP 5458462 B2 JP5458462 B2 JP 5458462B2 JP 2005296283 A JP2005296283 A JP 2005296283A JP 2005296283 A JP2005296283 A JP 2005296283A JP 5458462 B2 JP5458462 B2 JP 5458462B2
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JP
Japan
Prior art keywords
detection
signal
drive arm
inertial force
amplified
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2005296283A
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English (en)
Japanese (ja)
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JP2007107909A (ja
JP2007107909A5 (enExample
Inventor
猛 植村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Publication date
Priority to JP2005296283A priority Critical patent/JP5458462B2/ja
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to EP06811477.6A priority patent/EP1936324B1/en
Priority to US12/065,200 priority patent/US7673529B2/en
Priority to PCT/JP2006/320164 priority patent/WO2007043503A1/ja
Priority to CN2006800380057A priority patent/CN101287961B/zh
Priority to KR1020087002684A priority patent/KR100985315B1/ko
Publication of JP2007107909A publication Critical patent/JP2007107909A/ja
Publication of JP2007107909A5 publication Critical patent/JP2007107909A5/ja
Priority to US12/646,266 priority patent/US7886622B2/en
Application granted granted Critical
Publication of JP5458462B2 publication Critical patent/JP5458462B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5614—Signal processing

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Gyroscopes (AREA)
JP2005296283A 2005-10-11 2005-10-11 振動型慣性力検知センサ Expired - Lifetime JP5458462B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2005296283A JP5458462B2 (ja) 2005-10-11 2005-10-11 振動型慣性力検知センサ
US12/065,200 US7673529B2 (en) 2005-10-11 2006-10-10 Method for processing detection signal of vibratory inertial force sensor and vibratory inertial force sensor
PCT/JP2006/320164 WO2007043503A1 (ja) 2005-10-11 2006-10-10 振動型慣性力検知センサの検出信号処理方法及び振動型慣性力検知センサ
CN2006800380057A CN101287961B (zh) 2005-10-11 2006-10-10 振动型惯性力检测传感器的检测信号处理方法及振动型惯性力检测传感器
EP06811477.6A EP1936324B1 (en) 2005-10-11 2006-10-10 Method for processing detection signal of vibratory inertial force sensor and vibratory inertial force sensor
KR1020087002684A KR100985315B1 (ko) 2005-10-11 2006-10-10 진동형 관성력 검지 센서의 검출 신호 처리 방법 및 진동형관성력 검지 센서
US12/646,266 US7886622B2 (en) 2005-10-11 2009-12-23 Method for processing detection signal of vibratory inertial force sensor and vibratory inertial force sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005296283A JP5458462B2 (ja) 2005-10-11 2005-10-11 振動型慣性力検知センサ

Publications (3)

Publication Number Publication Date
JP2007107909A JP2007107909A (ja) 2007-04-26
JP2007107909A5 JP2007107909A5 (enExample) 2008-11-27
JP5458462B2 true JP5458462B2 (ja) 2014-04-02

Family

ID=37942739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005296283A Expired - Lifetime JP5458462B2 (ja) 2005-10-11 2005-10-11 振動型慣性力検知センサ

Country Status (6)

Country Link
US (2) US7673529B2 (enExample)
EP (1) EP1936324B1 (enExample)
JP (1) JP5458462B2 (enExample)
KR (1) KR100985315B1 (enExample)
CN (1) CN101287961B (enExample)
WO (1) WO2007043503A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4935069B2 (ja) * 2005-12-28 2012-05-23 パナソニック株式会社 角速度センサ
JP2009162645A (ja) * 2008-01-08 2009-07-23 Panasonic Corp 慣性速度センサ信号処理回路およびそれを備える慣性速度センサ装置
JP5338211B2 (ja) * 2008-09-08 2013-11-13 株式会社村田製作所 振動ジャイロ
FR2954489B1 (fr) * 2009-12-23 2014-08-01 Onera (Off Nat Aerospatiale) Electrodes et circuits electroniques associes pour gyrometre vibrant pizoelectrique
JP5362096B2 (ja) * 2010-02-17 2013-12-11 株式会社村田製作所 振動型慣性力センサ
CN104160255A (zh) * 2012-03-07 2014-11-19 松下电器产业株式会社 载荷传感器
JP6171380B2 (ja) * 2013-02-14 2017-08-02 株式会社リコー アクチュエータ駆動システムと映像機器
JP2014202616A (ja) * 2013-04-05 2014-10-27 セイコーエプソン株式会社 振動素子、電子デバイス、電子機器および移動体
US20140303907A1 (en) * 2013-04-05 2014-10-09 Kevin M. Roughen Systems and methods for dynamic force measurement
CN105180915B (zh) * 2014-06-18 2018-05-04 立锜科技股份有限公司 多微机电元件讯号处理方法与用此方法的复合微机电装置
JP6492949B2 (ja) * 2015-05-14 2019-04-03 セイコーエプソン株式会社 回路装置、物理量検出装置、電子機器及び移動体
JP6354892B2 (ja) * 2017-05-18 2018-07-11 株式会社リコー 位置検出装置と映像機器

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02129514A (ja) * 1988-11-10 1990-05-17 Canon Inc 角速度センサー
WO1996038712A1 (fr) * 1995-05-30 1996-12-05 Matsushita Electric Industrial Co., Ltd. Capteur de vitesse angulaire
US6705151B2 (en) * 1995-05-30 2004-03-16 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
JP3536497B2 (ja) * 1995-12-21 2004-06-07 株式会社デンソー 振動型角速度検出装置
JPH109872A (ja) * 1996-06-21 1998-01-16 Kinseki Ltd 角速度センサ
JPH1144540A (ja) * 1997-07-25 1999-02-16 Denso Corp 振動型角速度センサ
JPH1183495A (ja) * 1997-09-12 1999-03-26 Nikon Corp 圧電振動子およびこの圧電振動子を用いた圧電振動角速度計
JPH11258355A (ja) * 1998-03-12 1999-09-24 Taiheiyo Cement Corp 金属検出装置及びその調整方法及びコンピュータ読み取りが可能な記憶媒体
JP3932661B2 (ja) * 1998-03-31 2007-06-20 松下電器産業株式会社 角速度センサ駆動回路
JP4019504B2 (ja) * 1998-06-15 2007-12-12 松下電器産業株式会社 角速度センサ
JP3937589B2 (ja) * 1998-06-16 2007-06-27 松下電器産業株式会社 角速度センサ
JP3664950B2 (ja) * 2000-06-15 2005-06-29 株式会社村田製作所 角速度センサ
JP4843855B2 (ja) * 2001-03-09 2011-12-21 パナソニック株式会社 角速度センサ
JP4032681B2 (ja) * 2001-08-27 2008-01-16 株式会社デンソー 同期検波方法及び装置並びにセンサ信号検出装置
JP3964875B2 (ja) * 2004-02-16 2007-08-22 株式会社ジャイトロニクス 角速度センサ
JPWO2005080919A1 (ja) * 2004-02-20 2007-10-25 松下電器産業株式会社 角速度センサ
US7134336B2 (en) * 2004-03-19 2006-11-14 Denso Corporation Vibration type angular velocity sensor
US7533568B2 (en) * 2004-10-07 2009-05-19 Panasonic Corporation Angular rate sensor for correcting a false distortion
KR20080044912A (ko) * 2005-10-11 2008-05-21 마츠시타 덴끼 산교 가부시키가이샤 진동형 관성력 검지 센서 및 그것을 이용한 전자기기
JP2007205803A (ja) * 2006-01-31 2007-08-16 Fujitsu Ltd センサ信号処理システムおよびディテクタ
WO2007129494A1 (ja) * 2006-04-26 2007-11-15 Murata Manufacturing Co., Ltd. 角速度センサインタフェース回路および角速度検出装置
US7891245B2 (en) * 2006-11-22 2011-02-22 Panasonic Corporation Inertial force sensor including a sense element, a drive circuit, a sigma-delta modulator and a signal processing circuit
US7779688B2 (en) * 2006-12-20 2010-08-24 Epson Toyocom Corporation Vibration gyro sensor

Also Published As

Publication number Publication date
KR100985315B1 (ko) 2010-10-04
US7673529B2 (en) 2010-03-09
US7886622B2 (en) 2011-02-15
CN101287961B (zh) 2011-03-23
KR20080028474A (ko) 2008-03-31
JP2007107909A (ja) 2007-04-26
US20100095772A1 (en) 2010-04-22
EP1936324A4 (en) 2011-09-14
WO2007043503A1 (ja) 2007-04-19
EP1936324A1 (en) 2008-06-25
EP1936324B1 (en) 2014-03-19
CN101287961A (zh) 2008-10-15
US20090145224A1 (en) 2009-06-11

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