JP4935069B2 - 角速度センサ - Google Patents
角速度センサ Download PDFInfo
- Publication number
- JP4935069B2 JP4935069B2 JP2005377936A JP2005377936A JP4935069B2 JP 4935069 B2 JP4935069 B2 JP 4935069B2 JP 2005377936 A JP2005377936 A JP 2005377936A JP 2005377936 A JP2005377936 A JP 2005377936A JP 4935069 B2 JP4935069 B2 JP 4935069B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- detection
- vibrator
- angular velocity
- differential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5614—Signal processing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Signal Processing (AREA)
- Gyroscopes (AREA)
Description
34 駆動回路
36 検知回路
38 駆動手段
40 第1検知手段
41 固定基部
42 第2検知手段
43 アーム部
44 モニタ手段
45 駆動電極
46 検波器
47 検知電極
48 第1差動アンプ
49 第2差動アンプ
50 位相シフタ
54 同期検波回路
56 後処理回路
Claims (3)
- 振動子と、
前記振動子を振動させるための駆動回路と、
慣性力に起因して前記振動子に生じる歪を検知するための検知回路と、を備え、
前記振動子は、第1の検知信号を出力する第1の検知手段と、前記第1の検知信号と位相が反転している第2の検知信号を出力する第2の検知手段と、を有し、
前記検知回路は、前記第1の検知信号を基準として、前記第2の検知信号との差動を第1の差動信号として出力する第1の差動アンプと、
前記第2の検知信号を基準として、前記第1の検知信号との差動を第2の差動信号として出力する第2の差動アンプと、
前記第1の差動信号および第2の差動信号を同期検波する同期検波回路と、を有する角速度センサ。 - 同期検波するための検波信号は、前記振動子の駆動振動をモニタするモニタ信号の位相をシフトしたシフト信号に基づいて形成した請求項1記載の角速度センサ。
- 前記振動子は、固定基部に2本のアーム部が連接された音叉形状であって、前記駆動回路および前記第1の検知手段と前記第2の検知手段を2本の前記アーム部の各々に配置した請求項1記載の角速度センサ。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005377936A JP4935069B2 (ja) | 2005-12-28 | 2005-12-28 | 角速度センサ |
KR1020087010847A KR101225254B1 (ko) | 2005-12-28 | 2006-12-22 | 각속도 센서 |
CN2006800492090A CN101346601B (zh) | 2005-12-28 | 2006-12-22 | 角速度传感器 |
US12/097,968 US7987715B2 (en) | 2005-12-28 | 2006-12-22 | Angular speed sensor |
EP06843048A EP1959232A4 (en) | 2005-12-28 | 2006-12-22 | ANGULAR SPEED SENSOR |
PCT/JP2006/325589 WO2007074726A1 (ja) | 2005-12-28 | 2006-12-22 | 角速度センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005377936A JP4935069B2 (ja) | 2005-12-28 | 2005-12-28 | 角速度センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007178297A JP2007178297A (ja) | 2007-07-12 |
JP4935069B2 true JP4935069B2 (ja) | 2012-05-23 |
Family
ID=38217947
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005377936A Active JP4935069B2 (ja) | 2005-12-28 | 2005-12-28 | 角速度センサ |
Country Status (6)
Country | Link |
---|---|
US (1) | US7987715B2 (ja) |
EP (1) | EP1959232A4 (ja) |
JP (1) | JP4935069B2 (ja) |
KR (1) | KR101225254B1 (ja) |
CN (1) | CN101346601B (ja) |
WO (1) | WO2007074726A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2954489B1 (fr) * | 2009-12-23 | 2014-08-01 | Onera (Off Nat Aerospatiale) | Electrodes et circuits electroniques associes pour gyrometre vibrant pizoelectrique |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03172712A (ja) * | 1989-12-01 | 1991-07-26 | Canon Inc | 角速度センサ駆動・検出装置 |
JPH07198394A (ja) * | 1993-12-29 | 1995-08-01 | Murata Mfg Co Ltd | 位相補正回路 |
WO1996038712A1 (fr) * | 1995-05-30 | 1996-12-05 | Matsushita Electric Industrial Co., Ltd. | Capteur de vitesse angulaire |
JP2000193459A (ja) * | 1998-10-23 | 2000-07-14 | Matsushita Electric Ind Co Ltd | 角速度センサ |
JP2002243451A (ja) * | 2001-02-19 | 2002-08-28 | Matsushita Electric Ind Co Ltd | 角速度センサおよびその特性調整方法 |
JP4843855B2 (ja) | 2001-03-09 | 2011-12-21 | パナソニック株式会社 | 角速度センサ |
JP2003087057A (ja) * | 2001-09-12 | 2003-03-20 | Kinseki Ltd | 同期検波回路及びこれを用いた角速度センサ |
JP3870895B2 (ja) * | 2002-01-10 | 2007-01-24 | 株式会社村田製作所 | 角速度センサ |
JP4610012B2 (ja) * | 2004-01-20 | 2011-01-12 | セイコーエプソン株式会社 | 物理量測定装置 |
JP5458462B2 (ja) * | 2005-10-11 | 2014-04-02 | パナソニック株式会社 | 振動型慣性力検知センサ |
-
2005
- 2005-12-28 JP JP2005377936A patent/JP4935069B2/ja active Active
-
2006
- 2006-12-22 EP EP06843048A patent/EP1959232A4/en not_active Withdrawn
- 2006-12-22 US US12/097,968 patent/US7987715B2/en active Active
- 2006-12-22 CN CN2006800492090A patent/CN101346601B/zh not_active Expired - Fee Related
- 2006-12-22 KR KR1020087010847A patent/KR101225254B1/ko not_active IP Right Cessation
- 2006-12-22 WO PCT/JP2006/325589 patent/WO2007074726A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
JP2007178297A (ja) | 2007-07-12 |
US7987715B2 (en) | 2011-08-02 |
EP1959232A4 (en) | 2012-08-01 |
KR101225254B1 (ko) | 2013-03-19 |
CN101346601A (zh) | 2009-01-14 |
US20090288487A1 (en) | 2009-11-26 |
KR20080053955A (ko) | 2008-06-16 |
WO2007074726A1 (ja) | 2007-07-05 |
EP1959232A1 (en) | 2008-08-20 |
CN101346601B (zh) | 2011-07-20 |
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