KR100985315B1 - 진동형 관성력 검지 센서의 검출 신호 처리 방법 및 진동형관성력 검지 센서 - Google Patents

진동형 관성력 검지 센서의 검출 신호 처리 방법 및 진동형관성력 검지 센서 Download PDF

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KR100985315B1
KR100985315B1 KR1020087002684A KR20087002684A KR100985315B1 KR 100985315 B1 KR100985315 B1 KR 100985315B1 KR 1020087002684 A KR1020087002684 A KR 1020087002684A KR 20087002684 A KR20087002684 A KR 20087002684A KR 100985315 B1 KR100985315 B1 KR 100985315B1
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detection
signal
drive arm
inertial force
monitor
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KR20080028474A (ko
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다케시 우에무라
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파나소닉 주식회사
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5614—Signal processing

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Gyroscopes (AREA)
KR1020087002684A 2005-10-11 2006-10-10 진동형 관성력 검지 센서의 검출 신호 처리 방법 및 진동형관성력 검지 센서 Active KR100985315B1 (ko)

Applications Claiming Priority (2)

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JPJP-P-2005-00296283 2005-10-11
JP2005296283A JP5458462B2 (ja) 2005-10-11 2005-10-11 振動型慣性力検知センサ

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KR20080028474A KR20080028474A (ko) 2008-03-31
KR100985315B1 true KR100985315B1 (ko) 2010-10-04

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US (2) US7673529B2 (enExample)
EP (1) EP1936324B1 (enExample)
JP (1) JP5458462B2 (enExample)
KR (1) KR100985315B1 (enExample)
CN (1) CN101287961B (enExample)
WO (1) WO2007043503A1 (enExample)

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JP4935069B2 (ja) * 2005-12-28 2012-05-23 パナソニック株式会社 角速度センサ
JP2009162645A (ja) * 2008-01-08 2009-07-23 Panasonic Corp 慣性速度センサ信号処理回路およびそれを備える慣性速度センサ装置
JP5338211B2 (ja) * 2008-09-08 2013-11-13 株式会社村田製作所 振動ジャイロ
FR2954489B1 (fr) * 2009-12-23 2014-08-01 Onera (Off Nat Aerospatiale) Electrodes et circuits electroniques associes pour gyrometre vibrant pizoelectrique
JP5362096B2 (ja) * 2010-02-17 2013-12-11 株式会社村田製作所 振動型慣性力センサ
CN104160255A (zh) * 2012-03-07 2014-11-19 松下电器产业株式会社 载荷传感器
JP6171380B2 (ja) * 2013-02-14 2017-08-02 株式会社リコー アクチュエータ駆動システムと映像機器
US20140303907A1 (en) * 2013-04-05 2014-10-09 Kevin M. Roughen Systems and methods for dynamic force measurement
JP2014202616A (ja) * 2013-04-05 2014-10-27 セイコーエプソン株式会社 振動素子、電子デバイス、電子機器および移動体
CN105180915B (zh) * 2014-06-18 2018-05-04 立锜科技股份有限公司 多微机电元件讯号处理方法与用此方法的复合微机电装置
JP6492949B2 (ja) * 2015-05-14 2019-04-03 セイコーエプソン株式会社 回路装置、物理量検出装置、電子機器及び移動体
JP6354892B2 (ja) * 2017-05-18 2018-07-11 株式会社リコー 位置検出装置と映像機器

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JPH1183495A (ja) * 1997-09-12 1999-03-26 Nikon Corp 圧電振動子およびこの圧電振動子を用いた圧電振動角速度計
JPH11258355A (ja) * 1998-03-12 1999-09-24 Taiheiyo Cement Corp 金属検出装置及びその調整方法及びコンピュータ読み取りが可能な記憶媒体

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JPH02129514A (ja) * 1988-11-10 1990-05-17 Canon Inc 角速度センサー
US6705151B2 (en) * 1995-05-30 2004-03-16 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
CN1142436C (zh) * 1995-05-30 2004-03-17 松下电器产业株式会社 具有自检功能的角速度传感器
JP3536497B2 (ja) * 1995-12-21 2004-06-07 株式会社デンソー 振動型角速度検出装置
JPH109872A (ja) * 1996-06-21 1998-01-16 Kinseki Ltd 角速度センサ
JPH1144540A (ja) * 1997-07-25 1999-02-16 Denso Corp 振動型角速度センサ
JP3932661B2 (ja) * 1998-03-31 2007-06-20 松下電器産業株式会社 角速度センサ駆動回路
JP4019504B2 (ja) * 1998-06-15 2007-12-12 松下電器産業株式会社 角速度センサ
JP3937589B2 (ja) * 1998-06-16 2007-06-27 松下電器産業株式会社 角速度センサ
JP3664950B2 (ja) * 2000-06-15 2005-06-29 株式会社村田製作所 角速度センサ
JP4843855B2 (ja) * 2001-03-09 2011-12-21 パナソニック株式会社 角速度センサ
JP4032681B2 (ja) * 2001-08-27 2008-01-16 株式会社デンソー 同期検波方法及び装置並びにセンサ信号検出装置
JP3964875B2 (ja) * 2004-02-16 2007-08-22 株式会社ジャイトロニクス 角速度センサ
JPWO2005080919A1 (ja) * 2004-02-20 2007-10-25 松下電器産業株式会社 角速度センサ
US7134336B2 (en) * 2004-03-19 2006-11-14 Denso Corporation Vibration type angular velocity sensor
EP1816434A4 (en) * 2004-10-07 2011-01-19 Panasonic Corp ANGLE SPEED SENSOR
KR20080044912A (ko) * 2005-10-11 2008-05-21 마츠시타 덴끼 산교 가부시키가이샤 진동형 관성력 검지 센서 및 그것을 이용한 전자기기
JP2007205803A (ja) * 2006-01-31 2007-08-16 Fujitsu Ltd センサ信号処理システムおよびディテクタ
WO2007129494A1 (ja) * 2006-04-26 2007-11-15 Murata Manufacturing Co., Ltd. 角速度センサインタフェース回路および角速度検出装置
US7891245B2 (en) * 2006-11-22 2011-02-22 Panasonic Corporation Inertial force sensor including a sense element, a drive circuit, a sigma-delta modulator and a signal processing circuit
US7779688B2 (en) * 2006-12-20 2010-08-24 Epson Toyocom Corporation Vibration gyro sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1183495A (ja) * 1997-09-12 1999-03-26 Nikon Corp 圧電振動子およびこの圧電振動子を用いた圧電振動角速度計
JPH11258355A (ja) * 1998-03-12 1999-09-24 Taiheiyo Cement Corp 金属検出装置及びその調整方法及びコンピュータ読み取りが可能な記憶媒体

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US20090145224A1 (en) 2009-06-11
US7673529B2 (en) 2010-03-09
US7886622B2 (en) 2011-02-15
US20100095772A1 (en) 2010-04-22
EP1936324A1 (en) 2008-06-25
CN101287961B (zh) 2011-03-23
JP5458462B2 (ja) 2014-04-02
JP2007107909A (ja) 2007-04-26
EP1936324B1 (en) 2014-03-19
EP1936324A4 (en) 2011-09-14
CN101287961A (zh) 2008-10-15
KR20080028474A (ko) 2008-03-31
WO2007043503A1 (ja) 2007-04-19

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