JP4882292B2 - 研磨布の製造方法 - Google Patents

研磨布の製造方法 Download PDF

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Publication number
JP4882292B2
JP4882292B2 JP2005195839A JP2005195839A JP4882292B2 JP 4882292 B2 JP4882292 B2 JP 4882292B2 JP 2005195839 A JP2005195839 A JP 2005195839A JP 2005195839 A JP2005195839 A JP 2005195839A JP 4882292 B2 JP4882292 B2 JP 4882292B2
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JP
Japan
Prior art keywords
fiber
treatment
polishing cloth
preferable
polishing
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005195839A
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English (en)
Japanese (ja)
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JP2006045757A (ja
JP2006045757A5 (https=
Inventor
智之 堀口
健太郎 梶原
悟 下山
昭大 田辺
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Toray Industries Inc
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Toray Industries Inc
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Priority to JP2005195839A priority Critical patent/JP4882292B2/ja
Publication of JP2006045757A publication Critical patent/JP2006045757A/ja
Publication of JP2006045757A5 publication Critical patent/JP2006045757A5/ja
Application granted granted Critical
Publication of JP4882292B2 publication Critical patent/JP4882292B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Nonwoven Fabrics (AREA)
JP2005195839A 2004-07-05 2005-07-05 研磨布の製造方法 Expired - Fee Related JP4882292B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005195839A JP4882292B2 (ja) 2004-07-05 2005-07-05 研磨布の製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004197671 2004-07-05
JP2004197671 2004-07-05
JP2005195839A JP4882292B2 (ja) 2004-07-05 2005-07-05 研磨布の製造方法

Publications (3)

Publication Number Publication Date
JP2006045757A JP2006045757A (ja) 2006-02-16
JP2006045757A5 JP2006045757A5 (https=) 2008-07-24
JP4882292B2 true JP4882292B2 (ja) 2012-02-22

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ID=36024660

Family Applications (1)

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JP2005195839A Expired - Fee Related JP4882292B2 (ja) 2004-07-05 2005-07-05 研磨布の製造方法

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JP (1) JP4882292B2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102691172A (zh) * 2012-05-09 2012-09-26 中国人民解放军总后勤部军需装备研究所 一种汉麻针刺非织造布及其制备方法

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5040260B2 (ja) * 2005-10-31 2012-10-03 東レ株式会社 研磨布およびその製造方法
JP4997859B2 (ja) * 2006-07-21 2012-08-08 信越半導体株式会社 バッキングパッド並びにワークの研磨装置及びワークの研磨方法
JP5018094B2 (ja) * 2007-01-12 2012-09-05 東レ株式会社 研磨布
JP5415700B2 (ja) * 2007-02-01 2014-02-12 株式会社クラレ 研磨パッド及び研磨パッドの製造方法
WO2008093850A1 (ja) 2007-02-01 2008-08-07 Kuraray Co., Ltd. 研磨パッド及び研磨パッドの製造方法
JP4899947B2 (ja) * 2007-03-07 2012-03-21 東レ株式会社 繊維構造体の製造方法
JP2009007713A (ja) * 2007-06-29 2009-01-15 Toray Ind Inc シート状物
WO2008111442A1 (ja) * 2007-03-07 2008-09-18 Toray Industries, Inc. 繊維構造体およびその製造方法
JP4499136B2 (ja) * 2007-06-06 2010-07-07 シャープ株式会社 研磨パッドの製造方法
US20090061743A1 (en) * 2007-08-29 2009-03-05 Stephen Jew Method of soft pad preparation to reduce removal rate ramp-up effect and to stabilize defect rate
JP5451160B2 (ja) * 2009-04-15 2014-03-26 帝人株式会社 研磨材
CN104153122A (zh) * 2014-07-17 2014-11-19 南通江潮纤维制品有限公司 用于鲜花包装的超吸水纤维无纺布
JP7104961B2 (ja) * 2018-02-01 2022-07-22 東レコーテックス株式会社 研磨布
WO2023119951A1 (ja) 2021-12-21 2023-06-29 信越半導体株式会社 両面研磨装置、半導体シリコンウェーハの両面研磨方法、両面研磨シリコンウェーハ及びその製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6075682A (ja) * 1983-09-30 1985-04-30 Toray Ind Inc 皮革様シ−トの製造法
JPH0615750B2 (ja) * 1988-01-22 1994-03-02 東レ株式会社 ポリアミド系超極細繊維シートの着色方法
JPH0694629B2 (ja) * 1989-03-08 1994-11-24 東レ株式会社 柔軟な皮革様シート物の製造方法
JP3774302B2 (ja) * 1997-09-11 2006-05-10 株式会社クラレ 研磨用布帛
JP2000237951A (ja) * 1999-02-19 2000-09-05 Toray Ind Inc 研磨布および研磨装置
JP2001001253A (ja) * 1999-06-21 2001-01-09 Toray Ind Inc 研磨布
JP2002079472A (ja) * 2000-06-19 2002-03-19 Kuraray Co Ltd テクスチャー加工用研磨シート及びその製造方法
JP4808867B2 (ja) * 2001-06-28 2011-11-02 ダイワボウホールディングス株式会社 研磨不織布及びその製造方法
JP2003094320A (ja) * 2001-09-25 2003-04-03 Toray Ind Inc 研磨布
JP2003235896A (ja) * 2002-02-15 2003-08-26 Daio Paper Corp 不織布を有する吸収性物品及びその製造方法
JP2003236739A (ja) * 2002-02-20 2003-08-26 Teijin Ltd 研磨基布
JP4254115B2 (ja) * 2002-03-18 2009-04-15 東レ株式会社 研磨布の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102691172A (zh) * 2012-05-09 2012-09-26 中国人民解放军总后勤部军需装备研究所 一种汉麻针刺非织造布及其制备方法
CN102691172B (zh) * 2012-05-09 2015-04-15 中国人民解放军总后勤部军需装备研究所 一种汉麻针刺非织造布及其制备方法

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JP2006045757A (ja) 2006-02-16

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