JP4869070B2 - 高熱伝導性窒化ケイ素焼結体及び窒化ケイ素構造部材 - Google Patents
高熱伝導性窒化ケイ素焼結体及び窒化ケイ素構造部材 Download PDFInfo
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Description
熱伝導率が65W/m・K以上で、三点曲げ強度が室温で700MPa以上で、かつ気孔率が容量比で2%以下であり、
希土類元素、Si、Al、Fe、Ca、Mg及びOを含有する化合物及び/または希土類元素、Si、Al、Fe、Ca、Mg、O及びNを含有する化合物を含む結晶粒界相を含有し、前記結晶粒界相中の結晶質な結晶粒界相の占める比率が20%以上である高熱伝導性窒化ケイ素焼結体が提供される。
[図2]図2は、図1のAで示す結晶粒界相の元素分析結果を示す特性図である。
[図3]図3は、実施例1の窒化ケイ素焼結体の別視野における微細組織についての透過型電子顕微鏡写真である。
[図4]図4は、図1のBで示す結晶粒界相の元素分析結果を示す特性図である。
[図5]図5は、比較例14の窒化ケイ素焼結体の微細組織を示す透過型電子顕微鏡写真である。
[図6]図6は、図5のCで示す結晶粒界相の元素分析結果を示す特性図である。
[図7]図7は、図5のDで示す結晶粒界相の元素分析結果を示す特性図である。
焼結助剤として添加する酸化イットリウムなどの希土類元素は窒化ケイ素粉末と反応して液相を生成することができ、焼結促進剤として機能することが可能である。この希土類元素の添加量を酸化物換算で2質量%未満にすると、焼結体の緻密化が不十分となる。一方、17.5質量%を越える過量となる場合には、熱伝導率、機械的強度あるいは耐酸化性が低下する。より好ましい範囲は3質量%以上、12.5質量%以下である。なお、酸化物換算する際は、R2O3(Rは希土類元素)で換算するものとする。
上記希土類元素の焼結促進剤の機能をさらに促進させることができると共に、低温での緻密化を可能にし結晶組織において粒成長を抑制する機能を果たすことができ、焼結体の曲げ強度を向上させることができる。添加量が0.3質量%未満では添加効果が不十分である。一方、4質量%を越える過量となる場合には熱伝導率および耐酸化性が低下する。より好ましい範囲は0.5質量%以上、3質量%以下である。なお、酸化物換算する際はMgOで換算するものとする。
Alは、希土類元素の焼結促進剤の機能を促進させることができると共に、低温での緻密化を可能にし結晶組織において粒成長を抑制する機能を果たすことができ、焼結体の曲げ強度を向上させることが可能である。Al元素の含有量を酸化物換算で0.1質量%未満にすると、焼結体の緻密化が不十分になる。一方、0.6質量%を越える過量となる場合には、Fe及びCaを適正範囲内で含有させていてもAlの結晶相への固溶が進み、熱伝導率の低下が起こる。より好ましい範囲は0.1質量%以上、0.4質量%以下である。なお、酸化物換算する際はAl2O3で換算するものとする。
Fe元素の含有量を酸化物換算で0.07質量%未満にすると、Ca元素とAl元素の含有量が適正範囲内であっても保護皮膜の形成が不十分になり、800℃以上、1000℃以下での耐酸化性が低下する。一方、0.5質量%を越える過量となる場合には機械的強度の低下が起こる。より好ましい範囲は、0.07質量%以上、0.45質量%以下で、さらに好ましい範囲は0.1質量%以上、0.35質量%以下である。なお、酸化物換算する際はFe2O3で換算するものとする。
Ca元素の含有量を酸化物換算で0.07質量%未満にすると、Fe元素とAl元素の含有量が適正範囲内であっても保護皮膜の形成が不十分になり、800℃以上、1000℃以下での耐酸化性が低下する。一方、0.5質量%を越える過量となる場合には熱伝導率が低下する。より好ましい範囲は、0.07質量%以上、0.45質量%以下で、さらに好ましい範囲は0.1質量%以上、0.3質量%以下である。なお、酸化物換算する際はCaOで換算するものとする。
金属窒化法で製造された酸素量1.7質量%、不純物としてFe元素を0.2質量%、Al元素を0.1質量%、Ca元素を0.2質量%、Mg元素を0.01質量%以下を含有し、α相型窒化ケイ素90%を含む平均粒径1.1μmのSi3N4(窒化ケイ素)原料粉末Aに、焼結助剤として平均粒径0.7μmのY2O3(酸化イットリウム)粉末、平均粒径0.5μmのAl2O3(酸化アルミニウム)粉末、平均粒径0.5μmのFe2O3(酸化鉄)粉末、平均粒径0.5μmのCaO(酸化カルシウム)粉末、平均粒径0.5μmのMgO(酸化マグネシウム)粉末、平均粒径0.6μmのHfO2(酸化ハフニウム)粉末を下記表1に示す組成比となるように添加し、エチルアルコ−ル中で窒化ケイ素ボールを用いて100時間湿式混合し原料混合体を調製した。次に、100MPaの成型圧力でプレス成型し、50×50×厚さ5mmの成型体を多数製作した。得られた成型体を空気気流中において450℃で4時間脱脂した後、表1に示す条件にて焼結し、実施例1〜20および比較例1〜8に係わる窒化ケイ素焼結体を調製した。
金属窒化法で製造された酸素量1.5質量%、不純物としてFe元素を0.03質量%、Al元素を0.07質量%、Ca元素を0.02質量%、Mg元素を0.01質量%以下を含有し、α相型窒化ケイ素93%を含む平均粒径0.7μmのSi3N4原料粉末Bを使用し、表2に示す条件にて実施例21〜24及び比較例9〜12に係わる窒化ケイ素焼結体を調製した。
イミド分解法で製造された酸素量1.2質量%、不純物としてFe元素を0.001質量%以下、Al元素を0.0005質量%以下、Ca元素を0.0005質量%以下、Mg元素を0.0005質量%以下を含有し、α相型窒化ケイ素97%を含む平均粒径0.5μmの微細で高純度なSi3N4原料粉末Cを使用し、表2に示す条件にて実施例25〜28及び比較例13〜16に係わる窒化ケイ素焼結体を調製した。
[表1]
[表2]
[表3]
Claims (10)
- 希土類元素を酸化物換算で2質量%以上、17.5質量%以下と、Fe元素を酸化物換算で0.07質量%以上、0.5質量%以下と、Ca元素を酸化物換算で0.07質量%以上、0.5質量%以下と、Al元素を酸化物換算で0.1質量%以上、0.6質量%以下と、Mg元素を酸化物換算で0.3質量%以上、4質量%以下と、Hf元素を酸化物換算で0.2質量%以上、5質量%以下とを含有し、
熱伝導率が65W/m・K以上で、三点曲げ強度が室温で700MPa以上で、かつ気孔率が容量比で2%以下であり、
希土類元素、Si、Al、Fe、Ca、Mg及びOを含有する化合物及び/または希土類元素、Si、Al、Fe、Ca、Mg、O及びNを含有する化合物を含む結晶粒界相を含有し、前記結晶粒界相中の結晶質な結晶粒界相の占める比率が20%以上である高熱伝導性窒化ケイ素焼結体。 - 前記結晶粒界相は、希土類元素、Si、Al、Fe、Ca、Mg及びOを含有する化合物及び/または希土類元素、Si、Al、Fe、Ca、Mg、O及びNを含有する化合物を含む粒界ガラス相を含む請求項1記載の高熱伝導性窒化ケイ素焼結体。
- 800℃及び1000℃それぞれの温度の静止空気中で1000時間酸化処理後の室温強度の劣化率が10%以下である請求項1または2記載の高熱伝導性窒化ケイ素焼結体。
- 前記希土類元素は、Y、Er及びYbよりなる群から選択される少なくとも1種類の元素である請求項1〜3いずれか1項に記載の高熱伝導性窒化ケイ素焼結体。
- 前記希土類元素の酸化物換算量が3質量%以上、12.5質量%以下である請求項1〜4いずれか1項に記載の高熱伝導性窒化ケイ素焼結体。
- 前記Fe元素の酸化物換算量が0.07質量%以上、0.45質量%以下である請求項1〜5いずれか1項に記載の高熱伝導性窒化ケイ素焼結体。
- 前記Ca元素の酸化物換算量が0.07質量%以上、0.45質量%以下である請求項1〜6いずれか1項に記載の高熱伝導性窒化ケイ素焼結体。
- 前記Al元素の酸化物換算量が0.1質量%以上、0.4質量%以下である請求項1〜7いずれか1項に記載の高熱伝導性窒化ケイ素焼結体。
- 前記Mg元素の酸化物換算量が0.5質量%以上、3質量%以下である請求項1〜8いずれか1項に記載の高熱伝導性窒化ケイ素焼結体。
- 請求項1〜9いずれか1項記載の高熱伝導性窒化ケイ素焼結体を含有する窒化ケイ素構造部材。
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