JP4091096B2 - インターポーザ接合装置 - Google Patents
インターポーザ接合装置 Download PDFInfo
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- JP4091096B2 JP4091096B2 JP2006546658A JP2006546658A JP4091096B2 JP 4091096 B2 JP4091096 B2 JP 4091096B2 JP 2006546658 A JP2006546658 A JP 2006546658A JP 2006546658 A JP2006546658 A JP 2006546658A JP 4091096 B2 JP4091096 B2 JP 4091096B2
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- Prior art keywords
- interposer
- base
- side terminal
- joining
- press anvil
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- 238000005304 joining Methods 0.000 title claims description 95
- 238000003825 pressing Methods 0.000 claims abstract description 18
- 239000000853 adhesive Substances 0.000 claims description 54
- 230000001070 adhesive effect Effects 0.000 claims description 52
- 230000002093 peripheral effect Effects 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 14
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 238000010292 electrical insulation Methods 0.000 claims description 3
- 239000000088 plastic resin Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 description 14
- 239000010410 layer Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000004026 adhesive bonding Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 229920001169 thermoplastic Polymers 0.000 description 3
- 239000012815 thermoplastic material Substances 0.000 description 3
- 239000004416 thermosoftening plastic Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000003522 acrylic cement Substances 0.000 description 2
- 229920001940 conductive polymer Polymers 0.000 description 2
- 229920006332 epoxy adhesive Polymers 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000012943 hotmelt Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 238000013008 moisture curing Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910021607 Silver chloride Inorganic materials 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000006757 chemical reactions by type Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- -1 dispense Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920005644 polyethylene terephthalate glycol copolymer Polymers 0.000 description 1
- 238000004382 potting Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
- G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
- G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
- G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
- G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
- G06K19/07749—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
- G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
- G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
- G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
- G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
- G06K19/07718—Constructional details, e.g. mounting of circuits in the carrier the record carrier being manufactured in a continuous process, e.g. using endless rolls
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
- G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
- G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
- G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
- G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
- G06K19/07749—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card
- G06K19/0775—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card arrangements for connecting the integrated circuit to the antenna
- G06K19/07752—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card arrangements for connecting the integrated circuit to the antenna using an interposer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/58—Structural electrical arrangements for semiconductor devices not otherwise provided for
- H01L2223/64—Impedance arrangements
- H01L2223/66—High-frequency adaptations
- H01L2223/6661—High-frequency adaptations for passive devices
- H01L2223/6677—High-frequency adaptations for passive devices for antenna, e.g. antenna included within housing of semiconductor device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/2919—Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/832—Applying energy for connecting
- H01L2224/83201—Compression bonding
- H01L2224/83205—Ultrasonic bonding
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8338—Bonding interfaces outside the semiconductor or solid-state body
- H01L2224/83385—Shape, e.g. interlocking features
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/66—High-frequency adaptations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/07802—Adhesive characteristics other than chemical not being an ohmic electrical conductor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/141—Analog devices
- H01L2924/142—HF devices
- H01L2924/1421—RF devices
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/321—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
- H05K3/323—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives by applying an anisotropic conductive adhesive layer over an array of pads
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/5313—Means to assemble electrical device
- Y10T29/53174—Means to fasten electrical component to wiring board, base, or substrate
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/5313—Means to assemble electrical device
- Y10T29/53174—Means to fasten electrical component to wiring board, base, or substrate
- Y10T29/53178—Chip component
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/5313—Means to assemble electrical device
- Y10T29/53174—Means to fasten electrical component to wiring board, base, or substrate
- Y10T29/53183—Multilead component
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/5313—Means to assemble electrical device
- Y10T29/53187—Multiple station assembly apparatus
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- Manufacturing & Machinery (AREA)
- Credit Cards Or The Like (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Wire Bonding (AREA)
- Connections Effected By Soldering, Adhesion, Or Permanent Deformation (AREA)
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Description
上記インターポーザ側端子と上記ベース側端子とが対面する状態で、上記インターポーザを積層した上記ベース回路シートを保持するプレスアンビルと、
該プレスアンビルに対して相対的に運動するように構成された接合ヘッドとを有してなり、
上記接合ヘッドは、上記インターポーザ又は上記ベース回路シートの裏面に当接して加圧するように形成した加圧面を有してなり、該加圧面は、上記プレスアンビルに対する上記接合ヘッドの相対的な運動に応じて上記インターポーザ又は上記ベース回路シートの裏面を走査し、上記インターポーザ側端子の全面を上記ベース回路シートに対して加圧するように構成してあることを特徴とするインターポーザ接合装置にある。
10 インターポーザ
11 半導体チップ(ICチップ)
12 インターポーザ側端子
13 チップ保持部材
20 ベース回路シート(アンテナシート)
21 ベース部材
22 ベース側端子
24 アンテナパターン
220 突出変形部
25 接着剤配設層
3 インターポーザ接合装置
31 プレスアンビル
310 凸形成部
311 突出部
32 接合ヘッド
320 加圧面
この場合には、上記可塑性樹脂材料よりなる上記ベース側端子の一部を、上記突出部の作用により突出変形させるのが容易である。そして、その突出先端を上記インターポーザ側端子に圧着させることができる。それ故、上記インターポーザと上記ベース回路シートとの電気的な接続をさらに信頼性高く実現して上記電子部品の耐久性を高めることができる。
なお、上記可塑性材料としては、PS、PC、PA、PP、PPE(PET)等の材料を利用できる。
さらに、上記絶縁性接着剤としては、熱可塑性のものを用いると共に、上記プレスアンビル又は上記接合ヘッドの少なくともいずれかに加熱ヒータを組み込むことも好ましい。この場合には、熱可塑性の絶縁性接着剤を加熱して、その流動性を高めることができる。これにより、上記インターポーザ側端子と上記ベース側端子とが、直接、接触する部分から上記絶縁性接着剤を確実性高く流出させ、両者の電気的な接続状態を確実性高く実現できる。さらに、上記突出変形部分と上記インターポーザ側端子との接触箇所を加熱すれば、両者を熱圧着させることができる。熱圧着によれば、インターポーザ側端子とベース側端子とが直接、接触する箇所における接合状態をさらに良好なものにできる。そしてそのため、インターポーザ側端子とベース側端子との間の電気的な接続状態はさらに確実になり、その良好な接続状態を長期間の使用に渡って信頼性高く維持できる。
この場合には、上記インターポーザ側端子と上記ベース側端子とが直接、接触する箇所に超音波振動を作用することにより、インタポーザ側端子とベース側端子とを融着させることができる。そして、この超音波接合によれば、インターポーザ側端子とベース側端子との間の電気的な接続信頼性をさらに向上でき、その耐久性を一層、高めることができる。
上記接合ヘッドは、上記プレスアンビルの回転により上記インターポーザに対して相対的に運動するように構成してあることが好ましい。
この場合には、上記ベース回路シートを保持した上記プレスアンビルを回転させながら、上記ベース回路シートと上記インターポーザとを接合できる。すなわち、上記ベース回路シートを保持する上記プレスアンビルを静止させる必要がないため、上記ベース回路シートを搬送しながら連続的に加工を実施し得る。
この場合には、上記インターポーザ又は上記ベース回路シートの裏面を走査し、上記インターポーザ側端子の全面を上記ベース回路シートに対して加圧する過程において、上記インターポーザ側端子の全面を同時に加圧できる。それ故、上記インターポーザ側端子を一層、確実性高く接合できる。
この場合には、上記インターポーザの上記半導体チップに対して、上記凸形成部の上記突出部が過大な荷重を作用するおそれがない。そのため、上記電子部品の初期トラブルを抑制して、品質の高い製品を作製できる。
この場合には、先端窄まり形状の上記突出部により、上記インターポーザ側端子を一層、確実性高く接合できる。
この場合には、複数の上記インターポーザの接合を連続的に実施でき、一層効率高く上記電子部品を作製することができる。
ここで、RF−IDとは、Radio−Frequency IDentificationの略である。そして、本発明のインターポーザ接合装置を用いてRF−IDメディアを作製する場合には、信頼性の高い優れた品質の製品を、極めて効率良く製造することができる。特に、RF−IDメディアは、低コスト化が要求されるため、生産効率に優れているという本発明のインターポーザ接合装置の作用効果が特に、有効である。なお、このインターポーザ接合装置を用いて、接触ID用のIDメディアを作製することも可能である。
本例は、インターポーザ10をベース回路シート20に接合した電子部品1を作製するためのインターポーザ接合装置3に関する例である。この内容について、図1〜図9を用いて説明する。
本例のインターポーザ接合装置3は、図1及び図2に示すごとく、シート状のチップ保持部材13に半導体チップ11を実装してなると共に該半導体チップ11から延設された接続端子であるインターポーザ側端子12を有するインターポーザ10を、シート状のベース部材21よりなり、そのの表面にベース側端子22を設けたベース回路シート20に接合するためのものである。
このインターポーザ接合装置3は、インターポーザ側端子12とベース側端子22とが対面する状態で、インターポーザ10を積層したベース回路シート20を保持するプレスアンビル31と、プレスアンビル31に対して相対的に運動するように構成された接合ヘッド32とを有してなる。
ここで、この接合ヘッド32は、インターポーザ10の裏面に当接するように形成した加圧面320を有してなり、この加圧面320は、プレスアンビル31に対する接合ヘッド32の相対的な運動に応じてインターポーザ10の裏面を走査し、少なくともインターポーザ側端子12の全面をベース回路シート20に対して加圧するように構成してある。
以下、この内容について詳しく説明する。
本例は、実施例1のインターポーザ接合装置3を基にして、主として、接合ヘッド32の加圧面320、及びプレスアンビル31の凸形成部310の形状を変更した例である。この内容について、図11〜図16を用いて説明する。
本例の接合ヘッド32は、図11及び図12に示すごとく、プレスアンビル31の湾曲状の外周面に対応するよう、湾曲凹状に形成した加圧面320を有している。この加圧面320は、プレスアンビル31の周方向に当たる寸法がインターポーザ10よりも幅広である。それ故、本例のインターポーザ接合装置3では、プレスアンビル31によるインターポーザ10の搬送中の所定の時間、加圧面320によりインターポーザ側端子12の全面を同時に加圧することができる。
Claims (10)
- シート状のチップ保持部材に半導体チップを実装してなると共に該半導体チップから延設された接続端子であるインターポーザ側端子を有するインターポーザを、シート状のベース部材よりなり、その表面にベース側端子を設けたベース回路シートに接合するためのインターポーザ接合装置において、
上記インターポーザ側端子と上記ベース側端子とが対面する状態で、上記インターポーザを積層した上記ベース回路シートを保持するプレスアンビルと、
該プレスアンビルに対して相対的に運動するように構成された接合ヘッドとを有してなり、
上記接合ヘッドは、上記インターポーザ又は上記ベース回路シートの裏面に当接して加圧するように形成した加圧面を有してなり、該加圧面は、上記プレスアンビルに対する上記接合ヘッドの相対的な運動に応じて上記インターポーザ又は上記ベース回路シートの裏面を走査し、上記インターポーザ側端子の全面を上記ベース回路シートに対して加圧するように構成してあることを特徴とするインターポーザ接合装置。 - 請求項1において、上記ベース部材は、可塑性樹脂材料よりなり、上記プレスアンビルは、上記ベース回路シートの上記ベース側端子の裏面領域の一部に向けて突出する突出部を含む凸形成部を設けてなることを特徴とするインターポーザ接合装置。
- 請求項1において、上記インターポーザと上記ベース回路シートとが対面して形成される間隙のうち、少なくとも上記インターポーザ側端子と上記ベース側端子との間隙に配設した接着剤により、上記インターポーザと上記ベース回路シートとを接合するように構成してあり、上記接着剤が、電気的な絶縁性を有する絶縁性接着剤であることを特徴とするインターポーザ接合装置。
- 請求項3において、上記接合ヘッドは、上記インターポーザに超音波振動を作用するように構成してあることを特徴とするインターポーザ接合装置。
- 請求項2において、上記プレスアンビルは、略円柱形状をなし、その外表面に上記ベース回路シートを保持すると共に、上記略円柱形状の軸芯を中心として回転するように構成してあり、
上記接合ヘッドは、上記プレスアンビルの回転により上記インターポーザに対して相対的に運動するように構成してあることを特徴とするインターポーザ接合装置。 - 請求項5において、上記接合ヘッドの上記加圧面は、上記プレスアンビルの外周面に対応する湾曲凹面状をなし、上記インターポーザの全面を同時に加圧し得るように形成してあることを特徴とするインターポーザ接合装置。
- 請求項5において、上記インターポーザは、上記半導体チップを挟んで対向するように一対の上記インターポーザ側端子を有しており、上記プレスアンビルは、上記軸芯に沿って離れた2カ所の位置に上記凸形成部を有してなると共に、上記各凸形成部が上記ベース側端子に対面する状態で上記ベース回路シートを保持するように構成してあることを特徴とするインターポーザ接合装置。
- 請求項6において、上記各凸形成部では、上記プレスアンビルの周方向に沿って上記突出部を設けてあり、該突出部は、突出方向の先端側に向かって断面積が縮小するように形成してあることを特徴とするインターポーザ接合装置。
- 請求項5において、上記プレスアンビルは、該プレスアンビルの外周面の全周に渡って上記各凸形成部を配設してなり、複数の上記インターポーザの接合を連続的に実施し得るように構成してあることを特徴とするインターポーザ接合装置。
- 請求項1〜9のいずれか1項において、上記半導体チップは、RF−IDメディア用のICチップであり、上記ベース回路シートには、上記ICチップと電気的に接続されるアンテナパターンを設けてあることを特徴とするインターポーザの接合装置。
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-
2005
- 2005-12-03 JP JP2006546658A patent/JP4091096B2/ja active Active
- 2005-12-03 DE DE602005024861T patent/DE602005024861D1/de active Active
- 2005-12-03 EP EP05811787A patent/EP1835796B9/en active Active
- 2005-12-03 US US11/720,756 patent/US7578053B2/en active Active
- 2005-12-03 WO PCT/JP2005/022220 patent/WO2006059732A1/ja active Application Filing
- 2005-12-03 AT AT05811787T patent/ATE488985T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
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ATE488985T1 (de) | 2010-12-15 |
DE602005024861D1 (de) | 2010-12-30 |
EP1835796A1 (en) | 2007-09-19 |
WO2006059732A1 (ja) | 2006-06-08 |
EP1835796B9 (en) | 2011-02-23 |
EP1835796B1 (en) | 2010-11-17 |
US20080053617A1 (en) | 2008-03-06 |
US7578053B2 (en) | 2009-08-25 |
JPWO2006059732A1 (ja) | 2008-06-05 |
EP1835796A4 (en) | 2009-11-11 |
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