JP3405697B2 - 半導体チップ - Google Patents

半導体チップ

Info

Publication number
JP3405697B2
JP3405697B2 JP26574499A JP26574499A JP3405697B2 JP 3405697 B2 JP3405697 B2 JP 3405697B2 JP 26574499 A JP26574499 A JP 26574499A JP 26574499 A JP26574499 A JP 26574499A JP 3405697 B2 JP3405697 B2 JP 3405697B2
Authority
JP
Japan
Prior art keywords
chip
semiconductor chip
wire
external connection
protective film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP26574499A
Other languages
English (en)
Other versions
JP2001093931A (ja
Inventor
茂幸 上田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17421405&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP3405697(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP26574499A priority Critical patent/JP3405697B2/ja
Priority to KR1020000054904A priority patent/KR100752885B1/ko
Priority to TW089119301A priority patent/TW464994B/zh
Priority to US09/665,663 priority patent/US6744140B1/en
Publication of JP2001093931A publication Critical patent/JP2001093931A/ja
Application granted granted Critical
Publication of JP3405697B2 publication Critical patent/JP3405697B2/ja
Priority to US10/805,385 priority patent/US7037754B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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    • H01L2224/732—Location after the connecting process
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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
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  • Semiconductor Integrated Circuits (AREA)

Description

【発明の詳細な説明】
【０００１】
【発明の属する技術分野】この発明は、半導体チップお
よびその製造方法に関する。
【０００２】
【従来の技術】半導体チップの内部配線は、コストを低
く抑えるために、アルミニウムなどで構成されているの
が一般的である。このアルミニウムなどからなる配線
は、湿気による酸化を受けやすい。そのため、配線の表
面は、たとえば窒化シリコンからなる表面保護膜で覆わ
れていて、この表面保護膜に開口部を形成して配線の一
部を露出させることにより、リード端子のような外部端
子との接続のための外部接続用パッドが形成されてい
る。そして、たとえば金（Ａｕ）からなるワイヤの一端
を外部接続用パッドに付着させて接続し、ワイヤの他端
を外部端子に接続することにより、半導体チップの配線
と外部端子との電気接続が達成される。
【０００３】
【発明が解決しようとする課題】ワイヤが外部接続用パ
ッドに接続された後は、外部接続用パッドの表面がワイ
ヤで覆いつくされることが好ましい。ところが、たとえ
ば外部接続用パッド上におけるワイヤの付着面積が少な
い場合には、外部接続用パッドの表面がワイヤで覆いつ
くされず、外部接続用パッドの一部が露出したままにな
るおそれがある。外部接続用パッドは、アルミニウムな
どで構成されているから、露出していると湿気などで酸
化されて腐食されてしまうおそれがある。
【０００４】そこで、この発明の目的は、ワイヤの接続
状態にかかわらず、外部接続用パッドが腐食されるおそ
れのない半導体チップおよびその製造方法を提供するこ
とである。
【０００５】
【課題を解決するための手段および発明の効果】上記の
目的を達成するための請求項１記載の発明は、内部配線
を覆う表面保護膜を有し、この表面保護膜を他の半導体
チップの表面に対向させた状態で、当該他の半導体チッ
プの表面に重ね合わされて接合される半導体チップであ
って、上記表面保護膜から上記内部配線を部分的に露出
させることにより形成された外部接続用パッドと、この
外部接続用パッドとは異なる部分で、上記表面保護膜か
ら上記内部配線を部分的に露出させることにより形成さ
れたチップ接続用パッドと、上記他の半導体チップとの
電気接続のために、耐酸化性を有する金属材料を用いて
上記チップ接続用パッド上に隆起して形成されたバンプ
と、上記外部接続用パッド上に耐酸化性を有する金属材
料を用いて、上記バンプとほぼ同じ高さに形成されてお
り、外部端子との電気接続のためのワイヤが接続される
ワイヤ接続部とを含むことを特徴とする半導体チップで
ある。
【０００６】この発明によれば、外部接続用パッド上に
は、耐酸化性を有する金属材料からなるワイヤ接続部が
形成されている。言い換えれば、外部接続用パッドの表
面は、耐酸化性を有する金属材料からなるワイヤ接続部
によって覆われている。これにより、ワイヤ接続部への
ワイヤの接続状態にかかわらず、外部接続用パッドが外
部に露呈することはないから、外部接続用パッドが湿気
などで酸化されて腐食されるおそれはない。
【０００７】
【０００８】また、ワイヤ接続部がバンプと同一材料で
構成されているので、ワイヤ接続部をバンプと同じ工程
で形成することができる。
【０００９】そして、ワイヤ接続部をバンプと同一の工
程で形成することができるから、外部接続用パッド上に
ワイヤ接続部を設けたことによって、半導体チップの製
造工程数が増加することはない。さらには、請求項２に
記載のように、上記ワイヤ接続部は、上記ワイヤと同一
材料で構成されていることが好ましい。こうすることに
より、ワイヤ接続部へのワイヤの付着性を向上させるこ
とができる。
【００１０】
【発明の実施の形態】以下では、この発明の実施の形態
を、添付図面を参照して詳細に説明する。図１は、この
発明の一実施形態に係る半導体チップが適用された半導
体装置の概略構成を示す図解的な断面図である。この半
導体装置は、いわゆるチップ・オン・チップ構造を有し
ており、親チップ１の表面１１に子チップ２を重ね合わ
せて接合した後、これらをパッケージ３に納めることに
よって構成されている。
【００１１】親チップ１および子チップ２は、たとえば
シリコンチップからなっている。親チップ１の表面１１
は、親チップ１の基体をなす半導体基板においてトラン
ジスタなどの機能素子が形成された活性表層領域側の表
面であり、最表面は、たとえば窒化シリコンで構成され
る表面保護膜で覆われている。この表面保護膜上には、
複数のワイヤ接続部１２が周縁付近に配置されており、
このワイヤ接続部１２は、たとえば金からなるボンディ
ングワイヤ４によってリードフレーム５に接続されてい
る。また、親チップ１の表面１１には、子チップ２との
電気接続のための複数個のバンプＢＭが配置されてい
る。
【００１２】子チップ２は、表面２１を親チップ１の表
面１１に対向させた、いわゆるフェースダウン方式で親
チップ１に接合されている。子チップ２の表面２１は、
子チップ２の基体をなす半導体基板においてトランジス
タなどの機能素子が形成された活性表層領域側の表面で
あり、最表面は、たとえば窒化シリコンからなる表面保
護膜で覆われている。この表面保護膜上には、内部配線
に接続された複数個のバンプＢＳが親チップ１のバンプ
ＢＭに対向して配置されており、子チップ２は、バンプ
ＢＳがそれぞれ対向する親チップ１のバンプＢＭに接続
されることによって、親チップ１の表面１１との間に所
定間隔を保持した状態で支持されるとともに、親チップ
１と電気的に接続されている。
【００１３】図２は、親チップ１の一部を拡大して示す
断面図である。親チップ１の基体をなす半導体基板１３
上には、たとえば酸化シリコンで構成される層間絶縁膜
１４が形成されており、この層間絶縁膜１４上には、た
とえばアルミニウムからなる内部配線１５が配設されて
いる。層間絶縁膜１４および内部配線１５の表面は、た
とえば窒化シリコンで構成される表面保護膜１６で覆わ
れている。そして、この表面保護膜１６に開口部１７
Ａ，１７Ｂを形成して、表面保護膜１６から内部配線１
５を部分的に露出させることにより、それぞれチップ間
接続用パッド１５Ａおよび外部接続用パッド１５Ｂが形
成されている。
【００１４】開口部１７Ａ内に形成されたチップ間接続
用パッド１５Ａ上には、耐酸化性の金属からなるバンプ
ＢＭが隆起して形成されている。一方、外部接続用パッ
ド１５Ｂは、親チップ１の周縁部に形成されており、こ
の外部接続用パッド１５Ｂ上には、耐酸化性の金属を用
いて、ボンディングワイヤ４（図１参照）を接続するた
めのワイヤ接続部１２が隆起して形成されている。バン
プＢＭおよびワイヤ接続部１２を構成する耐酸化性の金
属としては、たとえば金、プラチナ、銀、パラジウムま
たはイリジウムなどを例示することができ、特に金を用
いることが好ましい。また、ワイヤ接続部１２は、ボン
ディングワイヤ４と同一の材料で構成されることが好ま
しく、こうすることにより、ワイヤ接続部１２へのボン
ディングワイヤ４の付着性を向上させることができる。
【００１５】さらに、バンプＢＭとワイヤ接続部１２と
は、同じ材料を用いることにより、同一の工程で形成す
ることができる。たとえば、表面保護膜１６に開口部１
７Ａ，１７Ｂを形成した後、この開口部１７Ａ，１７Ｂ
が形成された表面保護膜１６上にシード膜を形成する。
そして、このシード膜上に、チップ間接続用パッド１５
Ａ（開口部１７Ａ）および外部接続用パッド１５Ｂ（開
口部１７Ｂ）に対応する開口を有するレジスト膜をパタ
ーン形成した後、バンプＢＭおよびワイヤ接続部１２の
材料を用いたメッキを行う。その後、シード膜上のレジ
スト膜を除去し、さらにレジスト膜の除去によって露出
したシード膜を除去することにより、チップ間接続用パ
ッド１５Ａおよび外部接続用パッド１５Ｂ上に、それぞ
れバンプＢＭおよびワイヤ接続部１２を得ることができ
る。
【００１６】以上のようにこの実施形態によれば、外部
接続用パッド１５Ｂ（配線１５）上には、耐酸化性を有
する金属材料からなるワイヤ接続部１２が隆起して形成
されている。言い換えれば、外部接続用パッド１５Ｂの
表面は、耐酸化性を有する金属材料からなるワイヤ接続
部１２によって覆われている。そして、リードフレーム
５との電気接続のためのボンディングワイヤ４は、ワイ
ヤ接続部１２に溶着されるようになっている。これによ
り、ワイヤ接続部１２へのボンディングワイヤ４の接続
状態にかかわらず、外部接続用パッド１５Ｂが外部に露
呈することはないから、外部接続用パッド１５Ｂが湿気
などで酸化されて腐食されるおそれはない。
【００１７】また、ワイヤ接続部１２は、バンプＢＭと
同じ材料を用いることにより同一の工程で形成すること
ができるから、このワイヤ接続部１２を設けたことによ
って、親チップ１の製造工程数が増加することはない。
ただし、バンプＢＭとワイヤ接続部１２とを異なる材料
で構成してもよく、この場合には、ワイヤ接続部１２は
バンプＢＭと別の工程で形成することになる。この発明
の一実施形態について説明したが、この発明は、他の形
態でも実施することができる。たとえば、親チップ１お
よび子チップ２は、いずれもシリコンからなるチップで
あるとしたが、シリコンの他にも、化合物半導体（たと
えばガリウム砒素半導体など）やゲルマニウム半導体な
どの他の任意の半導体材料を用いた半導体チップであっ
てもよい。この場合に、親チップ１の半導体材料と子チ
ップ２の半導体材料は、同じでもよいし異なっていても
よい。
【００１８】また、上述の実施形態では、チップ・オン
・チップ構造の半導体装置を取り上げたが、この発明に
係る半導体チップは、チップ・オン・チップ構造以外の
構造を有する半導体装置に広く適用することができる。
その他、特許請求の範囲に記載された事項の範囲内で、
種々の設計変更を施すことが可能である。
【図面の簡単な説明】
【図１】この発明の一実施形態に係る半導体チップが適
用された半導体装置の概略構成を示す図解的な断面図で
ある。
【図２】図１に示す半導体装置に備えられている親チッ
プの一部を拡大して示す断面図である。
【符号の説明】
１ 親チップ（半導体チップ） １１ 表面（半導体チップの表面） １２ ワイヤ接続部 １５ 内部配線 １５Ａ チップ間接続用パッド １５Ｂ 外部接続用パッド １６ 表面保護膜 １７Ａ，１７Ｂ 開口部 ２ 子チップ（他の半導体チップ） ２１ 表面（他の半導体チップの表面） ４ ボンディングワイヤ ５ リードフレーム（外部端子） ＢＭ バンプ
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) H01L 21/60 301 H01L 25/07 H01L 25/18 H01L 21/60 H01L 25/065

Claims (2)

    (57)【特許請求の範囲】
  1. 【請求項１】内部配線を覆う表面保護膜を有し、この表
    面保護膜を他の半導体チップの表面に対向させた状態
    で、当該他の半導体チップの表面に重ね合わされて接合
    される半導体チップであって、 上記表面保護膜から上記内部配線を部分的に露出させる
    ことにより形成された外部接続用パッドと、 この外部接続用パッドとは異なる部分で、上記表面保護
    膜から上記内部配線を部分的に露出させることにより形
    成されたチップ接続用パッドと、 上記他の半導体チップとの電気接続のために、耐酸化性
    を有する金属材料を用いて上記チップ接続用パッド上に
    隆起して形成されたバンプと 上記外部接続用パッド上に上記バンプと同一の耐酸化性
    を有する金属材料を用いて、上記バンプとほぼ同じ高さ
    に形成されており、外部端子との電気接続のためのワイ
    ヤが接続されるワイヤ接続部とを含むことを特徴とする
    半導体チップ。
  2. 【請求項２】上記ワイヤ接続部は、上記ワイヤと同一材
    料で構成されていることを特徴とする請求項１記載の半
    導体チップ。
JP26574499A 1999-09-20 1999-09-20 半導体チップ Ceased JP3405697B2 (ja)

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JP26574499A JP3405697B2 (ja) 1999-09-20 1999-09-20 半導体チップ
KR1020000054904A KR100752885B1 (ko) 1999-09-20 2000-09-19 반도체 칩 및 반도체 칩의 제조방법
TW089119301A TW464994B (en) 1999-09-20 2000-09-20 Semiconductor chip and method of producing the same
US09/665,663 US6744140B1 (en) 1999-09-20 2000-09-20 Semiconductor chip and method of producing the same
US10/805,385 US7037754B2 (en) 1999-09-20 2004-03-22 Semiconductor chip and method of producing the same

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JP3405697B2 true JP3405697B2 (ja) 2003-05-12

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TW464994B (en) 2001-11-21
US6744140B1 (en) 2004-06-01
KR20010039901A (ko) 2001-05-15
US7037754B2 (en) 2006-05-02
KR100752885B1 (ko) 2007-08-28
JP2001093931A (ja) 2001-04-06

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