JP2021064789A - 発光ダイオードパッケージ構造 - Google Patents
発光ダイオードパッケージ構造 Download PDFInfo
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- 239000000758 substrate Substances 0.000 claims abstract description 87
- 239000000463 material Substances 0.000 claims abstract description 67
- 239000004065 semiconductor Substances 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 16
- 230000008569 process Effects 0.000 claims description 16
- 238000000231 atomic layer deposition Methods 0.000 claims description 5
- 229920002120 photoresistant polymer Polymers 0.000 claims description 5
- 239000011347 resin Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- 238000005229 chemical vapour deposition Methods 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910000449 hafnium oxide Inorganic materials 0.000 claims description 3
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 3
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
- 238000002834 transmittance Methods 0.000 claims description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 3
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims description 2
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 2
- 229910001936 tantalum oxide Inorganic materials 0.000 claims 1
- 239000010410 layer Substances 0.000 description 112
- 239000012790 adhesive layer Substances 0.000 description 15
- 229910052594 sapphire Inorganic materials 0.000 description 11
- 239000010980 sapphire Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000000465 moulding Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000004806 packaging method and process Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 230000005012 migration Effects 0.000 description 3
- 238000013508 migration Methods 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/483—Containers
- H01L33/486—Containers adapted for surface mounting
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/075—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
- H01L25/0753—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
- H01L29/0665—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body the shape of the body defining a nanostructure
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- H—ELECTRICITY
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
- H01L33/46—Reflective coating, e.g. dielectric Bragg reflector
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/52—Encapsulations
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/52—Encapsulations
- H01L33/56—Materials, e.g. epoxy or silicone resin
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
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- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12041—LED
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
- H01L2933/0058—Processes relating to semiconductor body packages relating to optical field-shaping elements
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- Microelectronics & Electronic Packaging (AREA)
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- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Led Device Packages (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
Description
100、100’、100a、100b、100c、100d、100e、100f 発光ダイオードパッケージ構造
102、102a、102b、102c、102d、102e、102f 基板
104a、104b、104c、104d、104e、104f 透光材層
104d’ 上部テクスチャ表面
106、106a、106b、106c、106d、106e、106f 発光ダイオードチップ
107B、107B’ 青色の発光ダイオードチップ
107G、107G’ 緑色の発光ダイオードチップ
107R、107R’ 赤色の発光ダイオードチップ
108 黒色材料層
120’ 半導体積層
121’ 第1の半導体層
121a’、121b’、121c’ 半導体層
122’ 発光層
123’ 第2の半導体層
124’ 導電接触層
140 犠牲層
142 支持フレーム
150 仮基板
152,154,156 基板
153 スタンプ
158 回路基板
160 搭載基板
170 接着層
181 底部反射層
182 側壁電流リーク低減層
191 第1の導電性パッド
192 第2の導電性パッド
200 青色テープ
300 表示モジュール
301 サブ回路基板
301a 上面
301b 底面
302 パッケージ層
400 表示パネル
A1、A2 面積
BP 支持分断点
SE1、SE2、SE3、SE4、SE5 側面発光
TE1、TE2、TE3、TE4、TE5 上面発光
SA サファイア基板
S1 発光面
T1、T2、T3 厚さ
W1、W2、W3 幅
Claims (20)
- 100μm〜1000μmの幅を有する基板と、
前記基板の上面に電気的接続され、1μm〜100μmの幅を有する少なくとも1つのマイクロ発光ダイオードチップと、
前記少なくとも1つのマイクロ発光ダイオードチップを露出させるように前記基板の前記上面を被覆する黒色材料層と、
前記少なくとも1つのマイクロ発光ダイオードチップと前記黒色材料層を被覆する透光材層と、
を備える発光ダイオードパッケージ構造。 - 前記少なくとも1つのマイクロ発光ダイオードチップは、10μm以下の厚さを有する請求項1に記載の発光ダイオードパッケージ構造。
- 前記黒色材料層は、光反射率が10%よりも小さい黒色のフォトレジスト層を含む請求項1又は2に記載の発光ダイオードパッケージ構造。
- 前記少なくとも1つのマイクロ発光ダイオードチップと前記黒色材料層とは、同じ厚さを有する請求項1〜3の何れか1項に記載の発光ダイオードパッケージ構造。
- 前記少なくとも1つのマイクロ発光ダイオードチップの発光面は第1の面積を有し、前記基板の前記上面は第2の面積を有し、前記第1の面積と前記第2の面積との面積比は、5%以下である請求項1〜4の何れか1項に記載の発光ダイオードパッケージ構造。
- 前記透光材層は100μmよりも小さい厚さを有する請求項1〜5の何れか1項に記載の発光ダイオードパッケージ構造。
- 前記基板の前記幅と前記透光材層の前記厚さとの比は、4以上である請求項6に記載の発光ダイオードパッケージ構造。
- 前記透光材層は、90%以上の光透過率を有する請求項1〜7の何れか1項に記載の発光ダイオードパッケージ構造。
- 前記透光材層は、上部テクスチャ表面を有する請求項1〜8の何れか1項に記載の発光ダイオードパッケージ構造。
- 前記少なくとも1つのマイクロ発光ダイオードチップは、
外部に露出し且つ粗いテクスチャを有する発光面を有する第1の半導体層と、
前記第1の半導体層上に位置する発光層と、
前記発光層上に位置し、前記第1の半導体層と異なるタイプの半導体層である第2の半導体層と、
前記発光面に位置する支持分断点と、
を含む請求項1〜9の何れか1項に記載の発光ダイオードパッケージ構造。 - 前記透光材層は、透明誘電体層或いは透明樹脂層である請求項1〜10の何れか1項に記載の発光ダイオードパッケージ構造。
- 幅を有する基板と、
前記基板の上面に電気的接続される少なくとも1つのマイクロ発光ダイオードチップと、
前記少なくとも1つのマイクロ発光ダイオードチップを被覆し、且つ厚さを有する透光材層と、
を備え、
前記基板の前記幅と前記透光材層の前記厚さとの比は、4以上である発光ダイオードパッケージ構造。 - 前記少なくとも1つのマイクロ発光ダイオードチップを露出させるように前記基板の前記上面を被覆する黒色材料層を更に備える請求項12に記載の発光ダイオードパッケージ構造。
- 前記少なくとも1つのマイクロ発光ダイオードチップは10μm以下の厚さを有し、且つ前記透光材層は100μmよりも小さい厚さを有する請求項12又は13に記載の発光ダイオードパッケージ構造。
- 前記基板の前記幅は、400μm〜1000μmである請求項12〜14の何れか1項に記載の発光ダイオードパッケージ構造。
- 前記黒色材料層は、光反射率が10%よりも小さい黒色のフォトレジスト層を含む請求項13に記載の発光ダイオードパッケージ構造。
- 前記透光材層は、透明誘電体層或いは透明樹脂層である請求項12〜16の何れか1項に記載の発光ダイオードパッケージ構造。
- 前記透明誘電体層は、酸化ケイ素、酸化アルミニウム、酸化チタン、酸化タンタル、酸化ハフニウム、酸化ジルコニウム、酸化イットリウム、フッ化マグネシウム或いは窒化ケイ素を含む請求項17に記載の発光ダイオードパッケージ構造。
- 前記透明誘電体層は、化学気相堆積或いは原子層堆積プロセスによって形成される請求項17に記載の発光ダイオードパッケージ構造。
- 前記少なくとも1つのマイクロ発光ダイオードチップは、
外部に露出し且つ粗いテクスチャを有する発光面を有する第1の半導体層と、
前記第1の半導体層上に位置する発光層と、
前記発光層上に位置し、前記第1の半導体層と異なるタイプの半導体層である第2の半導体層と、
前記発光面に位置する支持分断点と、
を含む請求項12〜19の何れか1項に記載の発光ダイオードパッケージ構造。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/600,577 US11038088B2 (en) | 2019-10-14 | 2019-10-14 | Light emitting diode package |
US16/600,577 | 2019-10-14 |
Publications (2)
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JP2021064789A true JP2021064789A (ja) | 2021-04-22 |
JP7089567B2 JP7089567B2 (ja) | 2022-06-22 |
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JP2020172206A Active JP7089567B2 (ja) | 2019-10-14 | 2020-10-12 | 発光ダイオードパッケージ構造 |
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US (4) | US11038088B2 (ja) |
JP (1) | JP7089567B2 (ja) |
CN (2) | CN112736177A (ja) |
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TWI706537B (zh) * | 2019-05-28 | 2020-10-01 | 友達光電股份有限公司 | 自發光元件及發光裝置的製造方法 |
US11038088B2 (en) * | 2019-10-14 | 2021-06-15 | Lextar Electronics Corporation | Light emitting diode package |
CN113611790A (zh) * | 2021-07-14 | 2021-11-05 | 广州慧谷化学有限公司 | 一种led显示模组 |
CN114220902B (zh) * | 2021-11-05 | 2024-04-09 | 芜湖聚飞光电科技有限公司 | Led光源组件及其制作方法 |
WO2023143693A1 (en) * | 2022-01-25 | 2023-08-03 | Ams-Osram International Gmbh | Optoelectronic device and method of processing the same |
CN117553700B (zh) * | 2023-12-28 | 2024-04-02 | 成都电科星拓科技有限公司 | 一种基于力致发光材料检测滑杆弯曲变形、应力的方法 |
Citations (16)
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CN116525738A (zh) | 2023-08-01 |
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