JP2019511831A - Tftアレイ基板及びその製造方法、表示装置 - Google Patents
Tftアレイ基板及びその製造方法、表示装置 Download PDFInfo
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- JP2019511831A JP2019511831A JP2017531238A JP2017531238A JP2019511831A JP 2019511831 A JP2019511831 A JP 2019511831A JP 2017531238 A JP2017531238 A JP 2017531238A JP 2017531238 A JP2017531238 A JP 2017531238A JP 2019511831 A JP2019511831 A JP 2019511831A
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- active layer
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- 239000000758 substrate Substances 0.000 title claims abstract description 105
- 238000004519 manufacturing process Methods 0.000 title abstract description 11
- 239000010409 thin film Substances 0.000 claims abstract description 74
- 239000010410 layer Substances 0.000 claims description 364
- 238000000034 method Methods 0.000 claims description 46
- 239000000463 material Substances 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 16
- 238000005468 ion implantation Methods 0.000 claims description 11
- 230000000149 penetrating effect Effects 0.000 claims description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 10
- 239000011229 interlayer Substances 0.000 claims description 9
- 238000000059 patterning Methods 0.000 claims description 9
- 238000002425 crystallisation Methods 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 7
- 230000008025 crystallization Effects 0.000 claims description 7
- 239000007772 electrode material Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 5
- 238000007715 excimer laser crystallization Methods 0.000 claims description 3
- 239000007790 solid phase Substances 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 description 11
- 238000010586 diagram Methods 0.000 description 4
- 238000002513 implantation Methods 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
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- 239000007924 injection Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 229910001092 metal group alloy Inorganic materials 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
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- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006356 dehydrogenation reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- MGRWKWACZDFZJT-UHFFFAOYSA-N molybdenum tungsten Chemical compound [Mo].[W] MGRWKWACZDFZJT-UHFFFAOYSA-N 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
下地基板を用意する工程と、
下地基板上に2つの薄膜トランジスタを形成する工程であって、それぞれの薄膜トランジスタは、ソース領域及びドレイン領域を有するアクティブ層を含み、前記2つの薄膜トランジスタの2つのアクティブ層を下地基板に垂直な方向において互いに重ならせ、且つ前記2つのアクティブ層のうちの一方のドレイン領域と他方のソース領域とを電気的に接続することにより、前記2つの薄膜トランジスタを直列接続する工程と、を含むTFTアレイ基板の製造方法を提供する。
下地基板上に第1の半導体材料層を形成し、第1のマスクを用いて第1の半導体材料層をパターニングして第1のアクティブ層を形成することと、
第1のアクティブ層を被覆する第1のゲート絶縁層を形成することと、
第1のゲート絶縁層上にゲート電極材料層を形成し、第2のマスクを用いてゲート電極材料層をパターニングして第1のアクティブ層の上方にあるゲート電極を形成することと、
ゲート電極及び第1のゲート絶縁層を被覆する第2のゲート絶縁層を形成することと、
第3のマスクを用いて、第1のアクティブ層のドレイン領域を露出させるように第2のゲート絶縁層及び第1のゲート絶縁層を貫通する貫通孔を形成することと、
第2のゲート絶縁層上に第2の半導体材料層を形成し、前記第1のマスクを用いて第2の半導体材料層をパターニングして第2のアクティブ層を形成し、第2のアクティブ層の一部が貫通孔内にあり接続部分を形成し、第1のアクティブ層のドレイン領域と第2のアクティブ層のソース領域とを電気的に接続することとを含んでもよい。
ゲート電極を形成した後かつ第2のゲート絶縁層を形成する前、ゲート電極を遮蔽マスクとして第1のイオン注入プロセスを行うことで、第1のアクティブ層のソース領域及びドレイン領域に対してイオンドープを行うことと、
第2のアクティブ層を形成した後、前記第2のマスクを別の遮蔽マスクとして第2のイオン注入プロセスを行うことで、第2のアクティブ層のソース領域及びドレイン領域に対してイオンドープを行うこととをさらに含んでもよい。
第5のマスクを用いて、下地基板上に第2のアクティブ層及び第2のゲート絶縁層を被覆する平坦化層を形成することと、
第6のマスクを用いて、平坦化層上に、第2のアクティブ層のドレイン領域に電気的に接続される画素電極層を形成することとをさらに含んでもよい。
Claims (18)
- 下地基板と、
下地基板上にある2つの薄膜トランジスタとを含み、
それぞれの薄膜トランジスタは、ソース領域及びドレイン領域を有するアクティブ層を含み、前記2つの薄膜トランジスタの2つのアクティブ層は下地基板に垂直な方向において互いに重なり、且つ前記2つのアクティブ層のうちの一方のアクティブ層のドレイン領域と他方のアクティブ層のソース領域とが電気的に接続することにより、前記2つの薄膜トランジスタは直列接続される、TFTアレイ基板。 - 前記2つのアクティブ層は、下地基板上に形成される第1のアクティブ層と、第1のアクティブ層の上方にある第2のアクティブ層とを含み、
前記2つの薄膜トランジスタは、少なくとも第1のアクティブ層と第2のアクティブ層との間にあり第1のアクティブ層を被覆する第1のゲート絶縁層と、第1のゲート絶縁層を被覆する第2のゲート絶縁層と、ゲート電極とをさらに含み、前記ゲート電極は第1のゲート絶縁層と第2のゲート絶縁層との間にあり前記2つの薄膜トランジスタの共通ゲート電極とされ、且つ第2のアクティブ層は第2のゲート絶縁層上に設けられる、請求項1に記載のTFTアレイ基板。 - 第1のアクティブ層のドレイン領域を露出させるように第1のゲート絶縁層及び第2のゲート絶縁層を貫通する貫通孔が設けられ、第2のアクティブ層は、この貫通孔内にあり第1のアクティブ層のドレイン領域と第2のアクティブ層のソース領域とを電気的に接続する接続部分を含む、請求項2に記載のTFTアレイ基板。
- 前記2つの薄膜トランジスタのうちの一方の薄膜トランジスタは、下地基板上にある第1のゲート電極と、第1のゲート電極を被覆する第1のゲート絶縁層と、第1のゲート絶縁層上にある第1のアクティブ層とを含み、
前記2つの薄膜トランジスタのうちの他方の薄膜トランジスタは、第1のアクティブ層の上方にある第2のアクティブ層と、第2のアクティブ層を被覆する第2のゲート絶縁層と、第2のゲート絶縁層上にある第2のゲート電極とを含むとともに、
第2のアクティブ層のソース領域と第1のアクティブ層のドレイン領域とが電気的に接続する、請求項1に記載のTFTアレイ基板。 - 前記一方の薄膜トランジスタを被覆する層間絶縁層をさらに含み、
第2のアクティブ層が層間絶縁層上にある、請求項4に記載のTFTアレイ基板。 - 第1のアクティブ層のドレイン領域を露出させるように層間絶縁層を貫通する貫通孔が設けられ、第2のアクティブ層は、この貫通孔内にあり第1のアクティブ層のドレイン領域と第2のアクティブ層のソース領域とを電気的に接続する接続部分を含む、請求項5に記載のTFTアレイ基板。
- 第1のアクティブ層のソース領域に電気的に接続されるソース電極層と、第2のアクティブ層のドレイン領域に電気的に接続される画素電極層とをさらに含む、請求項2〜6のいずれか1項に記載のTFTアレイ基板。
- 前記接続部分は、第2のアクティブ層と同じ材料で形成してドープされる部分を含む、請求項3又は6に記載のTFTアレイ基板。
- 前記アクティブ層は低温多結晶シリコン層を含む、請求項1〜6のいずれか1項に記載のTFTアレイ基板。
- 下地基板を用意する工程と、
下地基板上に2つの薄膜トランジスタを形成する工程であって、それぞれの薄膜トランジスタは、ソース領域及びドレイン領域を有するアクティブ層を含み、前記2つの薄膜トランジスタの2つのアクティブ層を下地基板に垂直な方向において互いに重ならせ、且つ前記2つのアクティブ層のうちの一方のドレイン領域と他方のソース領域とを電気的に接続することにより、前記2つの薄膜トランジスタを直列接続する工程と、を含むTFTアレイ基板の製造方法。 - 薄膜トランジスタを形成する工程は、
下地基板上に第1の半導体材料層を形成し、第1のマスクを用いて第1の半導体材料層をパターニングして第1のアクティブ層を形成することと、
第1のアクティブ層を被覆する第1のゲート絶縁層を形成することと、
第1のゲート絶縁層上にゲート電極材料層を形成し、第2のマスクを用いてゲート電極材料層をパターニングして第1のアクティブ層の上方にあるゲート電極を形成することと、
ゲート電極及び第1のゲート絶縁層を被覆する第2のゲート絶縁層を形成することと、
第3のマスクを用いて、第1のアクティブ層のドレイン領域を露出させるように第2のゲート絶縁層及び第1のゲート絶縁層を貫通する貫通孔を形成することと、
第2のゲート絶縁層上に第2の半導体材料層を形成し、前記第1のマスクを用いて第2の半導体材料層をパターニングして第2のアクティブ層を形成し、第2のアクティブ層の一部が貫通孔内にあり接続部分を形成し、第1のアクティブ層のドレイン領域と第2のアクティブ層のソース領域とを電気的に接続することとを含む、請求項10に記載の方法。 - 第1の半導体材料層及び/又は第2の半導体材料層を形成する工程はそれぞれ、
アモルファスシリコン層を形成することと、
エキシマレーザ結晶化、金属誘起結晶化又は固相結晶化のプロセスによってアモルファスシリコン層を多結晶シリコン層に変化させることとを含む、請求項11に記載の方法。 - 第1のアクティブ層を形成する前、又は第1のアクティブ層を形成した後かつ第1のゲート絶縁層を形成する前、
下地基板上に導電材料層を形成し、かつ第4のマスクを用いて導電材料層をパターニングしてソース電極層とすることをさらに含み、第1のアクティブ層の一部がソース電極層の一部に重なる、請求項11に記載の方法。 - ゲート電極を形成した後かつ第2のゲート絶縁層を形成する前、ゲート電極を遮蔽マスクとして第1のイオン注入プロセスを行うことで、第1のアクティブ層のソース領域及びドレイン領域に対してイオンドープを行うことと、
第2のアクティブ層を形成した後、前記第2のマスクを別の遮蔽マスクとして第2のイオン注入プロセスを行うことで、第2のアクティブ層のソース領域及びドレイン領域に対してイオンドープを行うこととをさらに含む、請求項11に記載の方法。 - 第2のアクティブ層を形成した後、前記第2のマスクを遮蔽マスクとしてイオン注入プロセスを行うことで、第1のアクティブ層及び第2のアクティブ層のソース領域及びドレイン領域に対してイオンドープを行うことをさらに含む、請求項11に記載の方法。
- 第2のアクティブ層に対してイオンドープを行うとき、第2のアクティブ層の貫通孔内にある接続部分もドープされる、請求項14又は15に記載の方法。
- 第5のマスクを用いて、下地基板上に第2のアクティブ層及び第2のゲート絶縁層を被覆する平坦化層を形成することと、
第6のマスクを用いて、平坦化層上に、第2のアクティブ層のドレイン領域に電気的に接続される画素電極層を形成することとをさらに含む、請求項11〜15のいずれか1項に記載の方法。 - 請求項1〜9のいずれか1項に記載のTFTアレイ基板、又は請求項10〜17のいずれか1項に記載の方法によって製造されたTFTアレイ基板を含む表示装置。
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JPH08148693A (ja) * | 1994-09-22 | 1996-06-07 | Sanyo Electric Co Ltd | 薄膜トランジスタ及びその製造方法 |
JP2013138191A (ja) * | 2011-12-01 | 2013-07-11 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
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JP6896627B2 (ja) | 2021-06-30 |
EP3439035A4 (en) | 2019-11-06 |
CN105633101A (zh) | 2016-06-01 |
WO2017166431A1 (zh) | 2017-10-05 |
US10325938B2 (en) | 2019-06-18 |
KR102055247B1 (ko) | 2019-12-11 |
US20180197895A1 (en) | 2018-07-12 |
KR20170124523A (ko) | 2017-11-10 |
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