JP7048182B2 - 集積回路のデバイス構造及び両面製造技術 - Google Patents
集積回路のデバイス構造及び両面製造技術 Download PDFInfo
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- JP7048182B2 JP7048182B2 JP2019502593A JP2019502593A JP7048182B2 JP 7048182 B2 JP7048182 B2 JP 7048182B2 JP 2019502593 A JP2019502593 A JP 2019502593A JP 2019502593 A JP2019502593 A JP 2019502593A JP 7048182 B2 JP7048182 B2 JP 7048182B2
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Description
本願は、「集積回路デバイス構造及び表側構造の裏側暴露を用いた製造技術」という発明の名称で2016年8月26日に出願された米国仮出願第62/380,316号に対する優先権を主張する。
Claims (19)
- デバイス構造であって、
単結晶半導体材料を有し、分離誘電体に隣接する本体と、
前記本体の側壁に隣接するゲートスタックであって、ゲート誘電体により前記側壁から分離されたゲート電極を含む、ゲートスタックと、
前記ゲートスタックの両側で前記本体に結合されるソース及びドレインと、
前記ソース、ドレイン又はゲート電極のうちの少なくとも1つに結合される表側インターコネクトメタライゼーション層と、
前記表側インターコネクトメタライゼーション層に対向する、前記本体の裏側表面上の裏側デバイス層であって、前記本体の組成とは異なる組成を有する第2の半導体材料を有する、裏側デバイス層と、
前記裏側デバイス層に電気的に結合される裏側デバイス端子と
を備え、
前記デバイス構造は、前記裏側デバイス端子に結合される裏側インターコネクトメタライゼーション層をさらに備え、前記本体及び前記裏側デバイス層は、前記表側インターコネクトメタライゼーション層と前記裏側インターコネクトメタライゼーション層との間に配置される構造。 - 前記構造は、
第2の電界効果トランジスタ(FET)上に積層される第1のFETを備え、
前記第2の半導体材料は単結晶であり、
第2のゲートスタックは、前記第2の半導体材料に結合され、
前記裏側デバイス端子は、前記第2の半導体材料に結合される、前記第2のFETのソース又はドレインをさらに有する、請求項1に記載の構造。 - 前記単結晶半導体材料は、第1のIV族又はIII-V族半導体を有し、
前記第2の半導体材料は、第2のIV族又はIII-V族半導体を有する、請求項2に記載の構造。 - 前記裏側デバイス端子は、前記第2のFETの前記ソース又はドレインのうちの一方と接触する、請求項2又は3に記載の構造。
- 前記構造は、薄膜トランジスタ(TFT)上に積層された電界効果トランジスタ(FET)を備え、
前記第2の半導体材料は、多結晶又は非結晶であり、
第2のゲートスタックは、前記第2の半導体材料に結合され、
前記裏側デバイス端子は、前記第2の半導体材料に結合される前記TFTのソース又はドレインをさらに有する、請求項1に記載の構造。 - 前記裏側デバイス端子は、前記FETの前記ソース又はドレインのうちの一方と接触している、請求項5に記載の構造。
- 集積回路(IC)構造であって、
フィールド分離誘電体に隣接するトランジスタ本体であって、単結晶半導体材料を有する、トランジスタ本体と、
前記トランジスタ本体の側壁に隣接するゲートスタックであって、ゲート誘電体により前記側壁から分離されたゲート電極を含む、ゲートスタックと、
前記ゲートスタックの両側で前記トランジスタ本体に結合されるソース及びドレインと、
前記トランジスタ本体の第1面上及び前記フィールド分離誘電体上の表側インターコネクトメタライゼーション層であって、前記ソース、ドレイン又はゲート電極のうちの第1のものに結合される、表側インターコネクトメタライゼーション層と、
前記トランジスタ本体の第2面上及び前記フィールド分離誘電体上の裏側インターコネクトメタライゼーション層であって、前記ソース、ドレイン又はゲート電極のうちの第2のものに結合され、前記表側インターコネクトメタライゼーション層とは異なる組成を有する、裏側インターコネクトメタライゼーション層と
を備えるIC構造。 - 前記表側インターコネクトメタライゼーション層は、前記裏側インターコネクトメタライゼーション層のいずれの金属合金よりも多くのCuを有する合金を含む、又は、前記裏側インターコネクトメタライゼーション層は、前記表側インターコネクトメタライゼーション層のいずれの金属合金よりも多くのCuを有する合金を含む、請求項7に記載のIC構造。
- 前記表側インターコネクトメタライゼーション層は、Ru、Rh、Pd、Ir、Pt、Au、W、Cr又はCoのうちの1又は複数を含み、前記裏側インターコネクトメタライゼーション層はCuを含む、請求項7又は8に記載のIC構造。
- 前記裏側インターコネクトメタライゼーション層は、前記ソースに結合され、前記表側インターコネクトメタライゼーション層は、前記ゲート電極に結合され、前記裏側インターコネクトメタライゼーション層は、前記表側インターコネクトメタライゼーション層よりも大きい横寸法又は大きい厚さのうちの少なくとも一方を有するフィーチャを有する、請求項7から9のいずれか一項に記載のIC構造。
- トランジスタ構造を製造する方法であって、
裏側キャリア層上に配置される第1のデバイス層を有するドナー基板を受容する段階であって、前記第1のデバイス層は、第1の半導体材料を有する、段階と、
前記第1のデバイス層内に1又は複数の第1のデバイス層のフィーチャを形成する段階であって、前記第1のデバイス層のフィーチャの側壁にフィールド分離誘電体が隣接する、段階と、
第1のデバイス層のフィーチャに結合される第1の表側デバイス端子を形成する段階と、
前記裏側キャリア層とは反対側の前記ドナー基板の面とホスト基板とを接合する段階と、
前記裏側キャリア層の少なくとも一部を除去することにより、前記第1のデバイス層のフィーチャの裏側を暴露する段階と、
前記第1のデバイス層のフィーチャの裏側に第2のデバイス層を堆積する段階であって、前記第2のデバイス層は、前記第1のデバイス層とは異なる組成を有する第2の半導体材料を有する、段階と、
前記第2のデバイス層に結合される裏側デバイス端子を形成する段階と
を備える方法。 - 前記方法は、
前記第1のデバイス層のフィーチャに、半導体を有する第1のソース又はドレインを堆積する段階と、
前記第1のソース又はドレインに結合される第1のコンタクト金属を形成する段階と
をさらに備え、
前記第2のデバイス層を堆積する段階は、半導体を有する第2のソース又はドレインを堆積する段階をさらに有し、
前記裏側デバイス端子を形成する段階は、
前記第1のソース又はドレインに結合される第2のコンタクト金属を形成する段階をさらに有する、請求項11に記載の方法。 - 前記第1のデバイス層のフィーチャを形成する段階は、第1のトランジスタチャネルを形成する段階をさらに有し、
前記第1の表側デバイス端子を形成する段階は、第1のゲート電極を形成する段階をさらに有し、
前記第2のデバイス層を堆積する段階は、第2のトランジスタチャネル半導体を堆積する段階をさらに有し、
前記裏側デバイス端子を形成する段階は、前記第2のトランジスタチャネル上に第2のゲート電極を形成する段階をさらに有する、請求項12に記載の方法。 - 前記第1のデバイス層に接触するソース又はドレインを形成する段階と、
前記第2のデバイス層に接触するソース又はドレインを形成する段階と
をさらに備える、請求項13に記載の方法。 - 集積回路IC階層を製造する方法であって、
第1の半導体材料を含むデバイス層を有するドナー基板を受容する段階と、
前記デバイス層内にトランジスタを製造する段階と、
前記トランジスタの第1面上に、少なくとも第1の金属を有する表側インターコネクトメタライゼーション層を形成する段階であって、前記表側インターコネクトメタライゼーション層は、前記トランジスタのうちの1又は複数についてのソース、ドレイン又はゲート電極のうちの第1のものに結合される、段階と、
前記トランジスタの第2面上に、少なくとも第2の金属を有する裏側インターコネクトメタライゼーション層を形成する段階であって、前記裏側インターコネクトメタライゼーション層は、前記トランジスタのうちの1又は複数についての前記ソース、ドレイン又はゲート電極のうちの第2のものに結合される、段階と
を備える方法。 - ドナー基板は、裏側キャリア層を含み、前記方法は、
ホスト基板を前記ドナー基板と接合する段階であって、前記ドナー基板は、前記裏側キャリア層の反対側の面上で前記ホスト基板と接合する、段階と、
前記裏側キャリア層の少なくとも一部を除去することにより、前記トランジスタのうちの1又は複数の裏側を暴露する段階と
をさらに備える、請求項15に記載の方法。 - 前記表側インターコネクトメタライゼーション層は、前記裏側インターコネクトメタライゼーション層のいずれの金属合金よりも多くのCuを有する合金を含む、又は、
前記裏側インターコネクトメタライゼーション層は、前記表側インターコネクトメタライゼーション層のいずれの金属合金よりも多くのCuを有する合金を含む、請求項15又は16に記載の方法。 - 前記第1の金属は、Ru、Rh、Pd、Ir、Pt、Au、W、Cr又はCoのうちの1又は複数を含み、前記第2の金属は、Cuを含む、請求項15から17のいずれか一項に記載の方法。
- 前記裏側インターコネクトメタライゼーション層は、前記ソースに結合され、前記表側インターコネクトメタライゼーション層は、前記ゲート電極に結合され、前記裏側インターコネクトメタライゼーション層は、前記表側インターコネクトメタライゼーション層よりも大きい横寸法又は大きい厚さのうちの少なくとも一方を有するフィーチャを有する、請求項15から18のいずれか一項に記載の方法。
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US10872820B2 (en) | 2020-12-22 |
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